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Charged particle beam drawing apparatus and method of manufacturing article Grant 8,754,382 - Suzuki , et al. June 17, 2 | 2014-06-17 |
Charged particle optical system, drawing apparatus, and method of manufacturing article Grant 8,716,672 - Sano , et al. May 6, 2 | 2014-05-06 |
Charged Particle Optical System, Drawing Apparatus, And Method Of Manufacturing Article App 20130273478 - Sano; Kentaro ;   et al. | 2013-10-17 |
Charged Particle Beam Drawing Apparatus And Method Of Manufacturing Article App 20130068959 - SUZUKI; Takehiko ;   et al. | 2013-03-21 |
Multi-electron beam exposure method and apparatus Grant 7,126,140 - Yoda , et al. October 24, 2 | 2006-10-24 |
Multi-electron beam exposure method and apparatus Grant 7,067,830 - Yoda , et al. June 27, 2 | 2006-06-27 |
Electron beam source and electron beam exposure apparatus employing the electron beam source Grant 6,992,307 - Yui , et al. January 31, 2 | 2006-01-31 |
Multi-electron beam exposure method and apparatus App 20060017021 - Yoda; Haruo ;   et al. | 2006-01-26 |
Charged particle beam drawing apparatus App 20050285054 - Inoue, Yuji ;   et al. | 2005-12-29 |
Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method Grant 6,903,352 - Muraki , et al. June 7, 2 | 2005-06-07 |
Electron beam source and electron beam exposure apparatus employing the electron beam source App 20040262539 - Yui, Yoshikiyo ;   et al. | 2004-12-30 |
Correcting method for correcting exposure data used for a charged particle beam exposure system Grant 6,835,937 - Muraki , et al. December 28, 2 | 2004-12-28 |
Charged-particle beam exposure apparatus and device manufacturing method using the same Grant 6,777,697 - Yui , et al. August 17, 2 | 2004-08-17 |
Multi-electron beam exposure method and apparatus App 20040143356 - Yoda, Haruo ;   et al. | 2004-07-22 |
Exposure method and device manufacturing method using this exposure method Grant 6,741,732 - Yui May 25, 2 | 2004-05-25 |
Exposure Method And Device Manufacturing Method Using This Exposure Method App 20040071336 - YUI, YOSHIKIYO | 2004-04-15 |
Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same Grant 6,667,486 - Ohta , et al. December 23, 2 | 2003-12-23 |
Electron Beam Exposure Method, Electron Beam Exposure Apparatus And Device Manufacturing Method Using The Same App 20030189181 - Ohta, Hiroya ;   et al. | 2003-10-09 |
Electron gun and electron beam drawing apparatus using the same Grant 6,593,686 - Yui July 15, 2 | 2003-07-15 |
Charged-particle Beam Exposure Apparatus And Device Manufacturing Method Using The Same App 20030094584 - Yui, Yoshikiyo ;   et al. | 2003-05-22 |
Mask Pattern Transfer Method, Mask Pattern Transfer Apparatus Using The Method, And Device Manufacturing Method App 20030034460 - Ono, Haruhito ;   et al. | 2003-02-20 |
Control system for a charged particle exposure apparatus Grant 6,483,120 - Yui , et al. November 19, 2 | 2002-11-19 |
Transfer Apparatus And Transfer Method App 20020163628 - Yui, Yoshikiyo ;   et al. | 2002-11-07 |
Transfer apparatus and transfer method Grant 6,466,301 - Yui , et al. October 15, 2 | 2002-10-15 |
Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method App 20020008207 - Muraki, Masato ;   et al. | 2002-01-24 |
Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method App 20010004185 - Muraki, Masato ;   et al. | 2001-06-21 |
Exposure control system Grant 5,107,275 - Tsuruoka , et al. April 21, 1 | 1992-04-21 |
Method and apparatus for automatic focusing Grant 4,714,331 - Oda , et al. December 22, 1 | 1987-12-22 |