| Patent | Date |
|---|
Position and temperature monitoring of ALD platen susceptor
Grant 11,430,680 - Ravid , et al. August 30, 2 | 2022-08-30 |
Injector For Batch Processing And Methods Of Use
App 20220162748 - Yudovsky; Joseph ; et al. | 2022-05-26 |
Apparatus and method for providing uniform flow of gas
Grant RE48,994 - Yudovsky , et al. March 29, 2 | 2022-03-29 |
Rotary Reactor For Uniform Particle Coating With Thin Films
App 20220064794 - Neikirk; Colin C. ; et al. | 2022-03-03 |
Injector for batch processing and methods of use
Grant 11,261,525 - Yudovsky , et al. March 1, 2 | 2022-03-01 |
Patterned vacuum chuck for double-sided processing
Grant 11,222,809 - Yudovsky , et al. January 11, 2 | 2022-01-11 |
Apparatus and Methods for Wafer Chucking on a Susceptor for ALD
App 20210384063 - Yudovsky; Joseph ; et al. | 2021-12-09 |
Rotary reactor for uniform particle coating with thin films
Grant 11,180,851 - Neikirk , et al. November 23, 2 | 2021-11-23 |
Rotary reactor for uniform particle coating with thin films
Grant 11,174,552 - Neikirk , et al. November 16, 2 | 2021-11-16 |
Apparatus and methods for wafer chucking on a susceptor for ALD
Grant 11,094,577 - Yudovsky , et al. August 17, 2 | 2021-08-17 |
Device to increase deposition uniformity in spatial ALD processing chamber
Grant 11,085,129 - Yudovsky , et al. August 10, 2 | 2021-08-10 |
Enhanced spatial ALD of metals through controlled precursor mixing
Grant 11,043,386 - Chan , et al. June 22, 2 | 2021-06-22 |
Temporal atomic layer deposition process chamber
Grant 10,954,596 - Polyak , et al. March 23, 2 | 2021-03-23 |
High temperature heater for processing chamber
Grant 10,959,294 - Polyak , et al. March 23, 2 | 2021-03-23 |
Electron Beam Pvd Endpoint Detection And Closed-loop Process Control Systems
App 20210062326 - ISHIKAWA; David Masayuki ; et al. | 2021-03-04 |
Electron Beam Pvd Endpoint Detection And Closed-loop Process Control Systems
App 20210062324 - ISHIKAWA; David Masayuki ; et al. | 2021-03-04 |
Deflection Restraint System For Build Plate In Additive Manufacturing
App 20210053286 - Yudovsky; Joseph ; et al. | 2021-02-25 |
Apparatus for susceptor temperature verification and methods of use
Grant 10,900,125 - Yudovsky , et al. January 26, 2 | 2021-01-26 |
Apparatus and methods for wafer rotation in carousel susceptor
Grant 10,861,736 - Gangakhedkar , et al. December 8, 2 | 2020-12-08 |
Patterned Vacuum Chuck For Double-sided Processing
App 20200373188 - YUDOVSKY; Joseph ; et al. | 2020-11-26 |
Contour Pocket and Hybrid Susceptor for Wafer Uniformity
App 20200312702 - Gangakhedkar; Kaushal ; et al. | 2020-10-01 |
Gate Valve For Continuous Tow Processing
App 20200292084 - YUDOVSKY; Joseph ; et al. | 2020-09-17 |
Qualification And Repair Station
App 20200290835 - SCHMID; Andreas ; et al. | 2020-09-17 |
Contour pocket and hybrid susceptor for wafer uniformity
Grant 10,685,864 - Gangakhedkar , et al. | 2020-06-16 |
Apparatus for prevention of backside deposition in a spatial ALD process chamber
Grant 10,658,223 - Yudovsky , et al. | 2020-05-19 |
Susceptor position and rational apparatus and methods of use
Grant 10,597,779 - Weaver , et al. | 2020-03-24 |
Device To Increase Deposition Uniformity In Spatial ALD Processing Chamber
App 20200087816 - Yudovsky; Joseph ; et al. | 2020-03-19 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
Grant 10,586,720 - Weaver , et al. | 2020-03-10 |
Temporal Atomic Layer Deposition Process Chamber
App 20200032396 - Polyak; Alexander S. ; et al. | 2020-01-30 |
Atmospheric lid with rigid plate for carousel processing chambers
Grant 10,508,340 - Yudovsky , et al. Dec | 2019-12-17 |
Rotary Reactor For Uniform Particle Coating With Thin Films
App 20190376182 - Neikirk; Colin C. ; et al. | 2019-12-12 |
Rotary Reactor for Uniform Particle Coating with Thin Films
App 20190376181 - Neikirk; Colin C. ; et al. | 2019-12-12 |
Device to increase deposition uniformity in spatial ALD processing chamber
Grant 10,494,736 - Yudovsky , et al. De | 2019-12-03 |
In-Situ Wafer Rotation for Carousel Processing Chambers
App 20190333783 - Yudovsky; Joseph ; et al. | 2019-10-31 |
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems
Grant 10,415,137 - Polyak , et al. Sept | 2019-09-17 |
Patterned Vacuum Chuck For Double-sided Processing
App 20190259648 - YUDOVSKY; Joseph ; et al. | 2019-08-22 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20190244842 - Ravid; Abraham ; et al. | 2019-08-08 |
Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD
Grant 10,351,956 - Yudovsky , et al. July 16, 2 | 2019-07-16 |
Wafer Processing Systems Including Multi-position Batch Load Lock Apparatus With Temperature Control Capability
App 20190198368 - Weaver; William T. ; et al. | 2019-06-27 |
Apparatus And Methods For Wafer Rotation In Carousel Susceptor
App 20190189498 - Gangakhedkar; Kaushal ; et al. | 2019-06-20 |
Apparatus and method for providing uniform flow of gas
Grant RE47,440 - Yudovsky , et al. | 2019-06-18 |
Position and temperature monitoring of ALD platen susceptor
Grant 10,312,120 - Ravid , et al. | 2019-06-04 |
Top lamp module for carousel deposition chamber
Grant 10,273,578 - Yudovsky , et al. | 2019-04-30 |
Apparatus and methods for wafer rotation in carousel susceptor
Grant 10,262,888 - Gangakhedkar , et al. | 2019-04-16 |
Spring-Loaded Pins For Susceptor Assembly And Processing Methods Using Same
App 20190109036 - Yudovsky; Joseph | 2019-04-11 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
Grant 10,256,125 - Weaver , et al. | 2019-04-09 |
Intelligent hardstop for gap detection and control mechanism
Grant 10,197,385 - Khandelwal , et al. Fe | 2019-02-05 |
Wafer placement and gap control optimization through in situ feedback
Grant 10,196,741 - Griffin , et al. Fe | 2019-02-05 |
Spring-loaded pins for susceptor assembly and processing methods using same
Grant 10,192,770 - Yudovsky Ja | 2019-01-29 |
Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD
Grant 10184180 - | 2019-01-22 |
Apparatus and methods for wafer rotation to improve spatial ALD process uniformity
Grant 10,186,449 - Weaver , et al. Ja | 2019-01-22 |
Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing
App 20180240676 - Chan; Kelvin ; et al. | 2018-08-23 |
Apparatus And Methods For Wafer Chucking On A Susceptor For Ald
App 20180211863 - Yudovsky; Joseph ; et al. | 2018-07-26 |
Apparatus And Methods For Wafer Rotation To Improve Spatial ALD Process Uniformity
App 20180190535 - Weaver; William T. ; et al. | 2018-07-05 |
Integrated Atomic Layer Deposition Tool
App 20180155834 - Srinivasan; Mukund ; et al. | 2018-06-07 |
Apparatus and methods for wafer chucking on a susceptor for ALD
Grant 9,922,860 - Yudovsky , et al. March 20, 2 | 2018-03-20 |
Multi-zone resistive heater
Grant 9,892,941 - Cui , et al. February 13, 2 | 2018-02-13 |
Device To Increase Deposition Uniformity In Spatial ALD Processing Chamber
App 20180002830 - Yudovsky; Joseph ; et al. | 2018-01-04 |
Auto-refill ampoule and methods of use
Grant 9,856,561 - Yudovsky , et al. January 2, 2 | 2018-01-02 |
Apparatus For Susceptor Temperature Verification And Methods Of Use
App 20170370001 - Yudovsky; Joseph ; et al. | 2017-12-28 |
Contour Pocket And Hybrid Susceptor For Wafer Uniformity
App 20170352575 - Gangakhedkar; Kaushal ; et al. | 2017-12-07 |
Hot wall reactor with cooled vacuum containment
Grant 9,837,250 - Huston , et al. December 5, 2 | 2017-12-05 |
Apparatus For Prevention Of Backside Deposition In A Spatial ALD Process Chamber
App 20170309512 - Yudovsky; Joseph ; et al. | 2017-10-26 |
Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing
App 20170306490 - Chan; Kelvin ; et al. | 2017-10-26 |
Apparatus And Methods For Wafer Rotation In Carousel Susceptor
App 20170287770 - Gangakhedkar; Kaushal ; et al. | 2017-10-05 |
Apparatus for susceptor temperature verification and methods of use
Grant 9,765,434 - Yudovsky , et al. September 19, 2 | 2017-09-19 |
Intelligent Hardstop For Gap Detection And Control Mechanism
App 20170261312 - Khandelwal; Somesh ; et al. | 2017-09-14 |
Elongated capacitively coupled plasma source for high temperature low pressure environments
Grant 9,721,757 - Forster , et al. August 1, 2 | 2017-08-01 |
High Temperature Heater For Processing Chamber
App 20170196047 - Polyak; Alexander S. ; et al. | 2017-07-06 |
Non-Metallic Thermal CVD/ALD Gas Injector And Purge System
App 20170191159 - Polyak; Alexander S. ; et al. | 2017-07-06 |
Intelligent hardstop for gap detection and control mechanism
Grant 9,663,859 - Khandelwal , et al. May 30, 2 | 2017-05-30 |
Atomic layer deposition carousel with continuous rotation and methods of use
Grant 9,631,277 - Yudovsky April 25, 2 | 2017-04-25 |
Apparatus and methods for injector to substrate gap control
Grant 9,617,640 - Yudovsky , et al. April 11, 2 | 2017-04-11 |
Plasma Module With Slotted Ground Plate
App 20170076917 - Yudovsky; Joseph ; et al. | 2017-03-16 |
Heating Source For Spatial Atomic Layer Deposition
App 20170051407 - Kwong; Garry K. ; et al. | 2017-02-23 |
Injector For Batch Processing And Methods Of Use
App 20160369398 - Yudovsky; Joseph ; et al. | 2016-12-22 |
Susceptor Position and Rotation Apparatus and Methods of Use
App 20160355927 - Weaver; William T. ; et al. | 2016-12-08 |
Wafer Processing Systems Including Multi-position Batch Load Lock Apparatus With Temperature Control Capability
App 20160284578 - Weaver; William T. ; et al. | 2016-09-29 |
Elongated Capacitively Coupled Plasma Source For High Temperature Low Pressure Environments
App 20160276136 - Forster; John C. ; et al. | 2016-09-22 |
Acoustically-monitored semiconductor substrate processing systems and methods
Grant 9,429,247 - Subrahmanyam , et al. August 30, 2 | 2016-08-30 |
Injector For Spatially Separated Atomic Layer Deposition Chamber
App 20160215392 - Yudovsky; Joseph ; et al. | 2016-07-28 |
Intelligent Hardstop For Gap Detection And Control Mechanism
App 20160215396 - Khandelwal; Somesh ; et al. | 2016-07-28 |
Multi-position batch load lock apparatus and systems and methods including same
Grant 9,378,994 - Weaver , et al. June 28, 2 | 2016-06-28 |
Elongated capacitively coupled plasma source for high temperature low pressure environments
Grant 9,355,819 - Forster , et al. May 31, 2 | 2016-05-31 |
Spring-Loaded Pins For Susceptor Assembly and Processing Methods Using Same
App 20160099166 - Yudovsky; Joseph | 2016-04-07 |
Top Lamp Module For Carousel Deposition Chamber
App 20160097122 - Yudovsky; Joseph ; et al. | 2016-04-07 |
Methods for atomic layer etching
Grant 9,305,805 - Chang , et al. April 5, 2 | 2016-04-05 |
Lamp Heater For Atomic Layer Deposition
App 20160068958 - Kelkar; Umesh M. ; et al. | 2016-03-10 |
Sealing apparatus for a process chamber
Grant 9,261,193 - Yudovsky February 16, 2 | 2016-02-16 |
Atmospheric Lid With Rigid Plate For Carousel Processing Chambers
App 20160024655 - Yudovsky; Joseph ; et al. | 2016-01-28 |
Carousel Gas Distribution Assembly With Optical Measurements
App 20160027674 - Griffin; Kevin ; et al. | 2016-01-28 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20160027675 - Ravid; Abraham ; et al. | 2016-01-28 |
Plasma Source For Rotating Platen ALD Chambers
App 20160024653 - Forster; John C. ; et al. | 2016-01-28 |
Apparatus And Methods For Wafer Chucking On A Susceptor For ALD
App 20160020132 - Yudovsky; Joseph ; et al. | 2016-01-21 |
Apparatus And Methods For Carousel Atomic Layer Deposition
App 20150376786 - Yudovsky; Joseph ; et al. | 2015-12-31 |
Wafer Placement And Gap Control Optimization Through In Situ Feedback
App 20150376782 - Griffin; Kevin ; et al. | 2015-12-31 |
Apparatus And Methods For Differential Pressure Chucking Of Substrates
App 20150376790 - Yudovsky; Joseph ; et al. | 2015-12-31 |
Hole Pattern For Uniform Illumination Of Workpiece Below A Capacitively Coupled Plasma Source
App 20150380221 - Liu; Ren ; et al. | 2015-12-31 |
Apparatus And Process Containment For Spatially Separated Atomic Layer Deposition
App 20150368798 - Kwong; Garry K. | 2015-12-24 |
Apparatus And Methods For Injector To Substrate Gap Control
App 20150345022 - Yudovsky; Joseph ; et al. | 2015-12-03 |
Atomic layer deposition chamber with multi inject
Grant 9,175,394 - Yudovsky , et al. November 3, 2 | 2015-11-03 |
Apparatus For Susceptor Temperature Verification And Methods Of Use
App 20150299855 - Yudovsky; Joseph ; et al. | 2015-10-22 |
Auto-Refill Ampoule and Methods of Use
App 20150299858 - Yudovsky; Joseph ; et al. | 2015-10-22 |
Integrated Two-Axis Lift-Rotation Motor Center Pedestal In Multi-Wafer Carousel ALD
App 20150236566 - Yudovsky; Joseph ; et al. | 2015-08-20 |
Methods for atomic layer etching
Grant 9,111,876 - Chang , et al. August 18, 2 | 2015-08-18 |
Apparatus and method for providing uniform flow of gas
Grant 9,109,754 - Yudovsky , et al. August 18, 2 | 2015-08-18 |
Tilted Plate For Batch Processing And Methods Of Use
App 20150147889 - Yudovsky; Joseph ; et al. | 2015-05-28 |
Methods For Atomic Layer Etching
App 20150132961 - Chang; Mei ; et al. | 2015-05-14 |
Hot Wall Reactor With Cooled Vacuum Containment
App 20150059981 - HUSTON; JOEL M. ; et al. | 2015-03-05 |
Elongated Capacitively Coupled Plasma Source For High Temperature Low Pressure Environments
App 20150048739 - Forster; John C. ; et al. | 2015-02-19 |
Apparatus and method for providing uniform flow of gas
Grant 8,955,547 - Gungor , et al. February 17, 2 | 2015-02-17 |
Acoustically-monitored Semiconductor Substrate Processing Systems And Methods
App 20140260624 - Subrahmanyam; Kommisetti ; et al. | 2014-09-18 |
Multi-position Batch Load Lock Apparatus And Systems And Methods Including Same
App 20140271054 - Weaver; William T. ; et al. | 2014-09-18 |
Temperature Control Systems And Methods For Small Batch Substrate Handling Systems
App 20140271057 - Weaver; William T. ; et al. | 2014-09-18 |
Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of Use
App 20140127404 - Yudovsky; Joseph ; et al. | 2014-05-08 |
Methods For Atomic Layer Etching
App 20140106565 - Chang; Mei ; et al. | 2014-04-17 |
Methods for atomic layer etching
Grant 8,633,115 - Chang , et al. January 21, 2 | 2014-01-21 |
Apparatus and Method for Providing Uniform Flow of Gas
App 20130263944 - Gungor; Faruk ; et al. | 2013-10-10 |
Multi-Injector Spatial ALD Carousel and Methods of Use
App 20130210238 - Yudovsky; Joseph | 2013-08-15 |
Sealing Apparatus For A Process Chamber
App 20130192756 - YUDOVSKY; JOSEPH | 2013-08-01 |
Rotary Substrate Processing System
App 20130192761 - Yudovsky; Joseph ; et al. | 2013-08-01 |
Multi-Chamber Substrate Processing System
App 20130196078 - Yudovsky; Joseph ; et al. | 2013-08-01 |
Self-Contained Heating Element
App 20130164445 - Kwong; Garry K. ; et al. | 2013-06-27 |
Multi-Component Film Deposition
App 20130143415 - Yudovsky; Joseph ; et al. | 2013-06-06 |
Methods for Atomic Layer Etching
App 20130137267 - Chang; Mei ; et al. | 2013-05-30 |
Apparatus and Method for Providing Uniform Flow of Gas
App 20130098477 - Yudovsky; Joseph ; et al. | 2013-04-25 |
Reactant Delivery System For ALD/CVD Processes
App 20130019960 - Choi; Kenric ; et al. | 2013-01-24 |
Self aligning non contact shadow ring process kit
Grant 8,342,119 - Yudovsky , et al. January 1, 2 | 2013-01-01 |
Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use
App 20120269967 - Yudovsky; Joseph ; et al. | 2012-10-25 |
Apparatus And Process For Atomic Layer Deposition
App 20120225193 - Yudovsky; Joseph | 2012-09-06 |
Apparatus And Process For Atomic Layer Deposition
App 20120225219 - Yudovsky; Joseph | 2012-09-06 |
Apparatus and Process for Atomic Layer Deposition
App 20120225206 - Yudovsky; Joseph | 2012-09-06 |
Atomic Layer Deposition Carousel With Continuous Rotation And Methods Of Use
App 20120225195 - Yudovsky; Joseph | 2012-09-06 |
Atomic Layer Deposition Carousel with Continuous Rotation and Methods of Use
App 20120222620 - Yudovsky; Joseph | 2012-09-06 |
Apparatus and Process for Atomic Layer Deposition
App 20120225207 - Yudovsky; Joseph | 2012-09-06 |
Apparatus and Process for Atomic Layer Deposition
App 20120225204 - Yudovsky; Joseph | 2012-09-06 |
Apparatus And Process For Atomic Layer Deposition
App 20120225192 - Yudovsky; Joseph ; et al. | 2012-09-06 |
Apparatus and Process for Atomic Layer Deposition
App 20120225203 - Yudovsky; Joseph | 2012-09-06 |
Apparatus and Process for Atomic Layer Deposition
App 20120225191 - Yudovsky; Joseph ; et al. | 2012-09-06 |
Apparatus And Process For Atomic Layer Deposition
App 20120225194 - Yudovsky; Joseph | 2012-09-06 |
Substrate Processing Apparatus Using A Batch Processing Chamber
App 20120210937 - THAKUR; RANDHIR ; et al. | 2012-08-23 |
Plasma, Uv And Ion/neutral Assisted Ald Or Cvd In A Batch Tool
App 20120192792 - MAHAJANI; MAITREYEE ; et al. | 2012-08-02 |
Apparatus and Process for Atomic Layer Deposition
App 20120135609 - Yudovsky; Joseph ; et al. | 2012-05-31 |
Flow Meter With Improved Thermal Stability And Methods Of Use
App 20120103425 - Yudovsky; Joseph ; et al. | 2012-05-03 |
Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
Grant 8,168,269 - Mahajani , et al. May 1, 2 | 2012-05-01 |
Wafer edge cleaning
Grant 8,099,817 - Yudovsky , et al. January 24, 2 | 2012-01-24 |
Atomic Layer Deposition Chamber With Multi Inject
App 20110223334 - Yudovsky; Joseph ; et al. | 2011-09-15 |
Wafer Edge Cleaning
App 20110154590 - Yudovsky; Joseph ; et al. | 2011-06-30 |
Brush box cleaner module with force control
Grant 7,962,990 - Chen , et al. June 21, 2 | 2011-06-21 |
Millisecond annealing (DSA) edge protection
Grant 7,923,280 - Koelmel , et al. April 12, 2 | 2011-04-12 |
Chamber components with increased pyrometry visibility
Grant 7,921,803 - Yudovsky , et al. April 12, 2 | 2011-04-12 |
Wafer edge cleaning
Grant 7,900,311 - Yudovsky , et al. March 8, 2 | 2011-03-08 |
Batch Processing Platform For Ald And Cvd
App 20110041764 - Webb; Aaron ; et al. | 2011-02-24 |
Plasma, Uv And Ion/neutral Assisted Ald Or Cvd In A Batch Tool
App 20110000433 - Mahajani; Maitreeyee ; et al. | 2011-01-06 |
Methods For Determining The Quantity Of Precursor In An Ampoule
App 20100305884 - Yudovsky; Joseph ; et al. | 2010-12-02 |
Batch processing platform for ALD and CVD
Grant 7,833,351 - Webb , et al. November 16, 2 | 2010-11-16 |
Millisecond Annealing (dsa) Edge Protection
App 20100273334 - Koelmel; Blake ; et al. | 2010-10-28 |
Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
Grant 7,798,096 - Mahajani , et al. September 21, 2 | 2010-09-21 |
Methods and apparatus for installing a scrubber brush on a mandrel
Grant 7,779,527 - Yudovsky , et al. August 24, 2 | 2010-08-24 |
Scrubber box and methods for using the same
Grant 7,774,887 - Yudovsky , et al. August 17, 2 | 2010-08-17 |
Millisecond annealing (DSA) edge protection
Grant 7,754,518 - Koelmel , et al. July 13, 2 | 2010-07-13 |
Substrate Processing Apparatus Using A Batch Processing Chamber
App 20100173495 - Thakur; Randhir ; et al. | 2010-07-08 |
Batch deposition tool and compressed boat
Grant 7,748,542 - Yudovsky , et al. July 6, 2 | 2010-07-06 |
Sealing Apparatus For A Process Chamber
App 20100117309 - YUDOVSKY; JOSEPH | 2010-05-13 |
Brush Box Cleaner Module With Force Control
App 20100078041 - Chen; Hui (Fred) ; et al. | 2010-04-01 |
Concrete Vacuum Chamber
App 20100021273 - POLYAK; ALEXANDER S. ; et al. | 2010-01-28 |
Multi-Zone Resistive Heater
App 20090314762 - Cui; Anqing ; et al. | 2009-12-24 |
Millisecond Annealing (dsa) Edge Protection
App 20090209112 - Koelmel; Blake ; et al. | 2009-08-20 |
Chamber Components With Increased Pyrometry Visibility
App 20090078198 - YUDOVSKY; JOSEPH ; et al. | 2009-03-26 |
Wafer Edge Cleaning
App 20090044831 - Yudovsky; Joseph ; et al. | 2009-02-19 |
Methods And Apparatus For Installing A Scrubber Brush On A Mandrel
App 20090031516 - Yudovsky; Joseph ; et al. | 2009-02-05 |
Lid For A Semiconductor Device Processing Apparatus And Methods For Using The Same
App 20090032071 - Yudovsky; Joseph ; et al. | 2009-02-05 |
Wafer Edge Cleaning
App 20090031511 - Yudovsky; Joseph ; et al. | 2009-02-05 |
Methods And Apparatus For Installing A Scrubber Brush On A Mandrel
App 20090025197 - Yudovsky; Joseph ; et al. | 2009-01-29 |
Lid For A Semiconductor Device Processing Apparatus And Methods For Using The Same
App 20090025757 - Yudovsky; Joseph ; et al. | 2009-01-29 |
Thermal Batch Reactor with Removable Susceptors
App 20090004405 - Merry; Nir ; et al. | 2009-01-01 |
Multizone heater for furnace
Grant 7,429,717 - Yudovsky September 30, 2 | 2008-09-30 |
Methods And Apparatus For Monitoring The Rotation Of A Substrate During Cleaning
App 20080216863 - Ettinger; Gary C. ; et al. | 2008-09-11 |
Scrubber Box And Methods For Using The Same
App 20080210258 - Yudovsky; Joseph ; et al. | 2008-09-04 |
Removable heater
Grant 7,381,926 - Yudovsky , et al. June 3, 2 | 2008-06-03 |
Scrubber box
Grant 7,377,002 - Yudovsky , et al. May 27, 2 | 2008-05-27 |
Self Aligning Non Contact Shadow Ring Process Kit
App 20080072823 - Yudovsky; Joseph ; et al. | 2008-03-27 |
Multizone heater for furnace
App 20080017628 - Yudovsky; Joseph | 2008-01-24 |
Batch Processing Platform For ALD and CVD
App 20070295274 - Webb; Aaron ; et al. | 2007-12-27 |
Plasma, Uv And Ion/neutral Assisted Ald Or Cvd In A Batch Tool
App 20070259110 - Mahajani; Maitreyee ; et al. | 2007-11-08 |
Method And Apparatus For Photo-excitation Of Chemicals For Atomic Layer Deposition Of Dielectric Film
App 20070259111 - Singh; Kaushal K. ; et al. | 2007-11-08 |
Synchronization of precursor pulsing and wafer rotation
App 20070252299 - Mahajani; Maitreyee ; et al. | 2007-11-01 |
Multi-zone resistive heater
App 20070125762 - Cui; Anqing ; et al. | 2007-06-07 |
Electronically actuated valve
Grant 7,222,636 - Nguyen , et al. May 29, 2 | 2007-05-29 |
Batch Processing Chamber With Diffuser Plate And Injector Assembly
App 20070084408 - Yudovsky; Joseph ; et al. | 2007-04-19 |
Reaction chamber with opposing pockets for gas injection and exhaust
App 20070084406 - Yudovsky; Joseph ; et al. | 2007-04-19 |
Batch deposition tool and compressed boat
App 20070059128 - Yudovsky; Joseph ; et al. | 2007-03-15 |
Removable heater
App 20070056950 - Yudovsky; Joseph ; et al. | 2007-03-15 |
Methods and apparatus for adjusting belt tension of a scrubber
App 20060240921 - Yudovsky; Joseph ; et al. | 2006-10-26 |
Substrate processing apparatus using a batch processing chamber
App 20060156979 - Thakur; Randhir ; et al. | 2006-07-20 |
Membrane gas valve for pulsing a gas
Grant 6,994,319 - Yudovsky February 7, 2 | 2006-02-07 |
Electronically actuated valve
App 20050229969 - Nguyen, Anh N. ; et al. | 2005-10-20 |
Lid for a semiconductor device processing apparatus and methods for using the same
App 20050211276 - Yudovsky, Joseph ; et al. | 2005-09-29 |
Methods and apparatus for installing a scrubber brush on a mandrel
App 20050172438 - Yudovsky, Joseph ; et al. | 2005-08-11 |
Wafer edge cleaning
App 20050172430 - Yudovsky, Joseph ; et al. | 2005-08-11 |
Scrubber box and methods for using the same
App 20050087212 - Yudovsky, Joseph ; et al. | 2005-04-28 |
Rotary gas valve for pulsing a gas
Grant 6,868,859 - Yudovsky March 22, 2 | 2005-03-22 |
Gas distribution system for cyclical layer deposition
Grant 6,821,563 - Yudovsky November 23, 2 | 2004-11-23 |
Reciprocating gas valve for pulsing a gas
Grant 6,818,094 - Yudovsky November 16, 2 | 2004-11-16 |
Rotary gas valve for pulsing a gas
App 20040144431 - Yudovsky, Joseph | 2004-07-29 |
Reciprocating gas valve for pulsing a gas
App 20040144309 - Yudovsky, Joseph | 2004-07-29 |
Membrane gas valve for pulsing a gas
App 20040144308 - Yudovsky, Joseph | 2004-07-29 |
Lift pin actuating mechanism for semiconductor processing chamber
Grant 6,767,176 - Yudovsky , et al. July 27, 2 | 2004-07-27 |
Ceramic substrate support
Grant 6,730,175 - Yudovsky , et al. May 4, 2 | 2004-05-04 |
Cyclical layer deposition system
App 20040065255 - Yang, Michael X. ; et al. | 2004-04-08 |
Gas distribution system for cyclical layer deposition
App 20040067641 - Yudovsky, Joseph | 2004-04-08 |
Self aligning non contact shadow ring process kit
App 20040003780 - Yudovsky, Joseph ; et al. | 2004-01-08 |
Aluminum oxide chamber and process
App 20030198754 - Xi, Ming ; et al. | 2003-10-23 |
Ceramic substrate support
App 20030136520 - Yudovsky, Joseph ; et al. | 2003-07-24 |
Self aligning non contact shadow ring process kit
Grant 6,589,352 - Yudovsky , et al. July 8, 2 | 2003-07-08 |
Heater with detachable ceramic top plate
Grant 6,544,340 - Yudovsky April 8, 2 | 2003-04-08 |
Substrate support including purge ring having inner edge aligned to wafer edge
Grant 6,521,292 - Yudovsky , et al. February 18, 2 | 2003-02-18 |
Lift pin actuating mechanism for semiconductor processing chamber
App 20030000775 - Yudovsky, Joseph ; et al. | 2003-01-02 |
Substrate processing chamber
App 20030000647 - Yudovsky, Joseph ; et al. | 2003-01-02 |
Substrate support member for a processing chamber
Grant 6,464,795 - Sherstinsky , et al. October 15, 2 | 2002-10-15 |
Apparatus for aligning a wafer
Grant 6,436,192 - Chen , et al. August 20, 2 | 2002-08-20 |
Heater with detachable ceramic top plate
App 20020069820 - Yudovsky, Joseph | 2002-06-13 |
Method and apparatus for preventing edge deposition
Grant 6,375,748 - Yudovsky , et al. April 23, 2 | 2002-04-23 |
Heater for processing chamber
Grant 6,350,320 - Sherstinsky , et al. February 26, 2 | 2002-02-26 |
Apparatus and method for aligning and controlling edge deposition on a substrate
Grant 6,328,808 - Tsai , et al. December 11, 2 | 2001-12-11 |
Apparatus for improved remote microwave plasma source for use with substrate processing systems
App 20010042513 - Kao, Chien-Teh ; et al. | 2001-11-22 |
Apparatus And Method For Aligning A Wafer
App 20010037771 - Chen, Ling ; et al. | 2001-11-08 |
Method for improved remote microwave plasma source for use with substrate processing system
Grant 6,271,148 - Kao , et al. August 7, 2 | 2001-08-07 |
Apparatus and method for delivering a gas
Grant 6,248,176 - Yudovsky , et al. June 19, 2 | 2001-06-19 |
Shadow ring and guide for supporting the shadow ring in a chamber
Grant 6,168,668 - Yudovsky January 2, 2 | 2001-01-02 |
Apparatus and method for aligning a substrate on a support member
Grant 6,146,463 - Yudovsky , et al. November 14, 2 | 2000-11-14 |
Method for aligning a wafer
Grant 6,063,440 - Chen , et al. May 16, 2 | 2000-05-16 |
Substrate support member with a purge gas channel and pumping system
Grant 6,040,011 - Yudovsky , et al. March 21, 2 | 2000-03-21 |
Apparatus for improved remote microwave plasma source for use with substrate processing systems
Grant 6,026,762 - Kao , et al. February 22, 2 | 2000-02-22 |
Apparatus and method for delivering a gas
Grant 5,985,033 - Yudovsky , et al. November 16, 1 | 1999-11-16 |
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