Yuditsky; Yury
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yuditsky; Yury.The latest application filed is for "large-particle monitoring with laser power control for defect inspection".
- Yuditsky; Yury - Mountain View CA
| Patent | Date |
|---|---|
| Large-Particle Monitoring with Laser Power Control for Defect Inspection App 20220091047 - Romanovsky; Anatoly ; et al. | 2022-03-24 |
| System and method for compensation of illumination beam misalignment Grant 10,495,579 - Li , et al. De | 2019-12-03 |
| Wafer inspection Grant 10,488,348 - Romanovsky , et al. Nov | 2019-11-26 |
| Wafer Inspection App 20180164228 - Romanovsky; Anatoly ; et al. | 2018-06-14 |
| Wafer inspection Grant 9,915,622 - Romanovsky , et al. March 13, 2 | 2018-03-13 |
| System and Method for Compensation of Illumination Beam Misalignment App 20170336329 - Li; Frank ; et al. | 2017-11-23 |
| Scanning inspection system with angular correction Grant 9,587,936 - Yuditsky , et al. March 7, 2 | 2017-03-07 |
| Method and apparatus for high speed acquisition of moving images using pulsed illumination Grant 9,426,400 - Brown , et al. August 23, 2 | 2016-08-23 |
| Wafer inspection Grant 9,279,774 - Romanovsky , et al. March 8, 2 | 2016-03-08 |
| Wafer Inspection App 20150369753 - Romanovsky; Anatoly ; et al. | 2015-12-24 |
| Extended defect sizing range for wafer inspection Grant 9,091,666 - Cai , et al. July 28, 2 | 2015-07-28 |
| Scanning Inspection System With Angular Correction App 20140278188 - Yuditsky; Yury ; et al. | 2014-09-18 |
| Method And Apparatus For High Speed Acquisition Of Moving Images Using Pulsed Illumination App 20140158864 - Brown; David L. ; et al. | 2014-06-12 |
| Extended Defect Sizing Range for Wafer Inspection App 20130208269 - Cai; Zhongping ; et al. | 2013-08-15 |
| Wafer Inspection App 20130016346 - Romanovsky; Anatoly ; et al. | 2013-01-17 |
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