Yuan; Bausan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yuan; Bausan.The latest application filed is for "fluid synthesis system".

Company Profile

1.42.48

Yuan; Bausan - Belmont CA
Yuan; Bausan - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Fluid synthesis system Grant 11,401,450 - Nagata , et al. August 2, 2	2022-08-02
Motor with force constant modeling and identification for flexible mode control Grant 11,223,303 - Yang , et al. January 11, 2	2022-01-11
Neighborhood haze density estimation for single-image dehaze Grant 10,477,128 - Bhutani , et al. Nov	2019-11-12
Fluid Synthesis System App 20190338174 - Nagata; Takashi ; et al.	2019-11-07
Motor With Force Constant Modeling And Identification For Flexible Mode Control App 20180367067 - Yang; Pai-Hsueh ; et al.	2018-12-20
Neighborhood Haze Density Estimation For Single-image Dehaze App 20180198998 - Bhutani; Ripul ; et al.	2018-07-12
Method for determining a commutation offset and for determining a compensation map for a stage Grant 9,465,305 - Yang , et al. October 11, 2	2016-10-11
Method for determing a commutation offset and for determining a compensation map for a stage Grant 9,013,134 - Yang , et al. April 21, 2	2015-04-21
Linearized control of piezoelectric actuator to reduce hysteresis Grant 8,836,252 - Hsin , et al. September 16, 2	2014-09-16
Projection optical device and exposure apparatus Grant 8,767,172 - Ebihara , et al. July 1, 2	2014-07-01
Linearized Control Of Piezoelectric Actuator To Reduce Hysteresis App 20140055060 - Hsin; Yi-Ping ; et al.	2014-02-27
Direct derivative feedforward vibration compensation system Grant 8,619,361 - Hsin , et al. December 31, 2	2013-12-31
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage Grant 8,582,080 - Binnard , et al. November 12, 2	2013-11-12
Measurement System That Includes An Encoder And An Interferometer App 20130182235 - Chang; Ping-Wei ; et al.	2013-07-18
Isolation System For An Optical Element Of An Exposure Apparatus App 20120127445 - Ebihara; Akimitsu ; et al.	2012-05-24
Method For Determing A Commutation Offset And For Determining A Compensation Map For A Stage App 20120127447 - Yang; Pai-Hsueh ; et al.	2012-05-24
Method For Determining A Commutation Offset And For Determining A Compensation Map For A Stage App 20120113405 - Yang; Pai-Hsueh ; et al.	2012-05-10
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage Grant 8,140,288 - Yang , et al. March 20, 2	2012-03-20
Direct Derivative Feedforward Vibration Compensation System App 20110242660 - Hsin; Yi-Ping ; et al.	2011-10-06
Active-isolation mounts for optical elements Grant 7,989,756 - Koo , et al. August 2, 2	2011-08-02
Projection optical device and exposure apparatus App 20110043781 - Ebihara; Akimitsu ; et al.	2011-02-24
Interferometric position-measuring devices and methods Grant 7,876,452 - Sogard , et al. January 25, 2	2011-01-25
Active-isolation Mounts For Optical Elements App 20090237793 - Koo; Shiang-Lung ; et al.	2009-09-24
System for controlling a dual mover assembly for an exposure apparatus Grant 7,583,361 - Hsin , et al. September 1, 2	2009-09-01
Interferometric Position-measuring Devices And Methods App 20080291464 - Sogard; Michael R. ; et al.	2008-11-27
Stage Assembly With Measurement System Initialization, Vibration Compensation, Low Transmissibility, And Lightweight Fine Stage App 20080278705 - Binnard; Michael ; et al.	2008-11-13
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage App 20080275661 - Yang; Pai-Hsueh ; et al.	2008-11-06
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage Grant 7,417,714 - Binnard , et al. August 26, 2	2008-08-26
Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatus App 20080109178 - Sogard; Michael R. ; et al.	2008-05-08
Minimum force output control method for counter-mass with cable Grant 7,366,642 - Hsin , et al. April 29, 2	2008-04-29
Projection Optical Device And Exposure Apparatus App 20080068568 - Ebihara; Akimitsu ; et al.	2008-03-20
Moving mechanism with high bandwidth response and low force transmissibility Grant 7,333,179 - Yuan , et al. February 19, 2	2008-02-19
Hexapod kinematic mountings for optical elements, and optical systems comprising same App 20070284502 - Hsin; Yi-Ping ; et al.	2007-12-13
Anti-Gravity Device for Supporting Weight and Reducing Transmissibility App 20070236854 - Lee; Martin E. ; et al.	2007-10-11
System for controlling a dual mover assembly for an exposure apparatus App 20070211237 - Hsin; Yi-Ping ; et al.	2007-09-13
E/I core actuator commutation formula and control method Grant 7,253,576 - Yang , et al. August 7, 2	2007-08-07
Lithographic System with Separated Isolation Structures App 20070115451 - Yuan; Bausan	2007-05-24
Active damper with counter mass to compensate for structural vibrations of a lithographic system App 20070097340 - Yuan; Bausan ; et al.	2007-05-03
Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers App 20070030462 - Yuan; Bausan ; et al.	2007-02-08
Fine force actuator assembly for chemical mechanical polishing apparatuses Grant 7,172,493 - Novak , et al. February 6, 2	2007-02-06
Minimum force output control method for counter-mass with cable App 20060241873 - Hsin; Yi-Ping ; et al.	2006-10-26
Linear motor force ripple identification and compensation with iterative learning control App 20060170382 - Yang; Pai-Hsueh ; et al.	2006-08-03
Image adjustor including damping assembly Grant 7,061,577 - Yuan , et al. June 13, 2	2006-06-13
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage App 20060101928 - Binnard; Michael ; et al.	2006-05-18
Auto-calibration of attraction-only type actuator commutations Grant 7,034,474 - Yang , et al. April 25, 2	2006-04-25
Stage assembly including a stage having increased vertical stroke App 20060061751 - Teng; Ting-Chien ; et al.	2006-03-23
Lithographic system with separated isolation structures App 20060038972 - Yuan; Bausan	2006-02-23
Fine force actuator assembly for chemical mechanical polishing apparatuses App 20060035564 - Novak; W. Thomas ; et al.	2006-02-16
Moving mechanism with high bandwidth response and low force transmissibility App 20060033903 - Yuan; Bausan ; et al.	2006-02-16
Reaction mass for a stage device Grant 6,987,558 - Yuan , et al. January 17, 2	2006-01-17
Real-time through lens image measurement system and method App 20050286050 - Yuan, Bausan ; et al.	2005-12-29
Stage counter mass system Grant 6,963,821 - Binnard , et al. November 8, 2	2005-11-08
Feedforward control with reduced learning time for lithographic system to improve throughput and accuracy App 20050231706 - Yang, Pai-Hsueh ; et al.	2005-10-20
E/I core actuator commutation formula and control method App 20050218842 - Yang, Pai-Hsueh ; et al.	2005-10-06
Wafer polishing control system for chemical mechanical planarization machines App 20050221736 - Hsin, Yi-Ping ; et al.	2005-10-06
Fine force control of actuators for chemical mechanical polishing apparatuses App 20050197045 - Novak, W. Thomas ; et al.	2005-09-08
Auto calibration of attraction-only type actuator commutations App 20050173992 - Yang, Pai Hsueh ; et al.	2005-08-11
Following stage planar motor Grant 6,927,505 - Binnard , et al. August 9, 2	2005-08-09
Fine force control of actuators for chemical mechanical polishing apparatuses Grant 6,855,032 - Yang , et al. February 15, 2	2005-02-15
Stage counter mass system App 20040158427 - Binnard, Michael ; et al.	2004-08-12
Control system and method for improving tracking accuracy of a stage through processing of information from previous operations App 20040128918 - Yang, Pai-Hsueh ; et al.	2004-07-08
Image adjustor including damping assembly App 20040046947 - Yuan, Bausan ; et al.	2004-03-11
Scanning exposure method with reduced time between scans Grant 6,686,990 - Hazelton , et al. February 3, 2	2004-02-03
Support assembly for an exposure apparatus Grant 6,646,719 - Lee , et al. November 11, 2	2003-11-11
Active vibration isolation system having pressure control Grant 6,590,639 - Yuan , et al. July 8, 2	2003-07-08
Following stage planar motor App 20030111912 - Binnard, Michael ; et al.	2003-06-19
Moving coil type planar motor control App 20030102721 - Ueta, Toshio ; et al.	2003-06-05
Moving magnet type planar motor control App 20030102722 - Ueta, Toshio ; et al.	2003-06-05
Control scheme and system for active vibration isolation App 20030097205 - Yuan, Bausan ; et al.	2003-05-22
Guideless stage Grant 6,486,941 - Hazelton , et al. November 26, 2	2002-11-26
Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators Grant 6,472,777 - Teng , et al. October 29, 2	2002-10-29
Multiple point support assembly for a stage App 20020137358 - Binnard, Mike ; et al.	2002-09-26
Support assembly for an exposure apparatus App 20020102481 - Lee, Martin E. ; et al.	2002-08-01
Reaction mass for a stage device App 20020093637 - Yuan, Bausan ; et al.	2002-07-18
Command trajectory for driving a stage with minimal vibration Grant 6,320,345 - Yuan , et al. November 20, 2	2001-11-20
Method And Apparatus For Controlling Trajectory In A Scan And Step Wafer Stepper App 20010021009 - YUAN, BAUSAN ; et al.	2001-09-13
Scanning exposure method with reduced time between scans Grant 6,285,438 - Hazelton , et al. September 4, 2	2001-09-04
Stage control with reduced synchronization error and settling time Grant 6,260,282 - Yuan , et al. July 17, 2	2001-07-17
Method And Apparatus For Controlling The Leveling Table Of A Wafer Stage App 20010002303 - YUAN, BAUSAN	2001-05-31
Scanning exposure method with reduced time between scans App 20010000974 - Hazelton, Andrew J. ; et al.	2001-05-10
Magnetic actuator producing large acceleration on fine stage and low RMS power gain Grant 6,130,517 - Yuan , et al. October 10, 2	2000-10-10
Stage having paired E/I core actuator control Grant 6,069,417 - Yuan , et al. May 30, 2	2000-05-30
Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system Grant 6,008,610 - Yuan , et al. December 28, 1	1999-12-28
Stage control method and apparatus with varying stage controller parameter Grant 5,940,789 - Yuan August 17, 1	1999-08-17
Voice coil motor with air guide and air bellows Grant 5,777,403 - Yuan July 7, 1	1998-07-07

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