Yu; Tom
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yu; Tom.The latest application filed is for "apparatus and method for reducing redeposition in a physical vapor deposition system".
- Yu; Tom - Santa Clara CA
- Yu; Tom - San Leandro CA
- Yu; Tom - Hsin Chu Hsien TW
| Patent | Date |
|---|---|
| Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer Grant 7,645,696 - Dulkin , et al. January 12, 2 | 2010-01-12 |
| Apparatus and method for improving film uniformity in a physical vapor deposition system Grant 6,471,831 - Lu , et al. October 29, 2 | 2002-10-29 |
| Apparatus and method for reducing redeposition in a physical vapor deposition system App 20020096427 - Lu, Jean Qing ; et al. | 2002-07-25 |
| Apparatus and method for improving film uniformity in a physical vapor deposition system App 20020088711 - Lu, Jean Qing ; et al. | 2002-07-11 |
| Antenna of wireless LAN card Grant 6,362,794 - Yu March 26, 2 | 2002-03-26 |
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