Yu, Shtuh-Sheng
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yu, Shtuh-Sheng.The latest application filed is for "utilizing chemical dry etching for forming rounded corner in shallow trench isolation process".
- Yu, Shtuh-Sheng - Keelung TW
| Patent | Date |
|---|---|
| Utilizing chemical dry etching for forming rounded corner in shallow trench isolation process App 20030186555 - Liang, Ming-Chung ; et al. | 2003-10-02 |
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