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Semiconductor device structure with salicide layer and method for forming the same
Grant 11,444,173 - Shen , et al. September 13, 2 | 2022-09-13 |
Method of Gap Filling Using Conformal Deposition-Annealing-Etching Cycle for Reducing Seam Void and Bending
App 20220172958 - Yu; De-Wei ; et al. | 2022-06-02 |
Semiconductor Device and Method for Manufacture
App 20220130979 - Chang; Chia-Ao ; et al. | 2022-04-28 |
Method of gap filling using conformal deposition-annealing-etching cycle for reducing seam void and bending
Grant 11,289,343 - Yu , et al. March 29, 2 | 2022-03-29 |
Defect filling in patterned layer
Grant 11,205,709 - Chang , et al. December 21, 2 | 2021-12-21 |
Method for forming a FinFET structure that prevents or reduces deformation of adjacent fins
Grant 11,183,426 - Teng , et al. November 23, 2 | 2021-11-23 |
Method Of Manufacturing A Semiconductor Device And A Semiconductor Device
App 20210359111 - CHIU; Ya-Wen ; et al. | 2021-11-18 |
Cap layer and anneal for gapfill improvement
Grant 11,114,545 - Yu , et al. September 7, 2 | 2021-09-07 |
Selective silicon growth for gapfill improvement
Grant 11,107,903 - Yu , et al. August 31, 2 | 2021-08-31 |
Semiconductor Device and Method
App 20210134984 - Yu; De-Wei ; et al. | 2021-05-06 |
Gap-filling germanium through selective bottom-up growth
Grant 10,868,140 - Yu , et al. December 15, 2 | 2020-12-15 |
Semiconductor device and method
Grant 10,868,137 - Yu , et al. December 15, 2 | 2020-12-15 |
Method of semiconductor integrated circuit fabrication
Grant 10,861,751 - Yu , et al. December 8, 2 | 2020-12-08 |
Selective Silicon Growth for Gapfill Improvement
App 20200373412 - Yu; De-Wei ; et al. | 2020-11-26 |
Selective film growth for bottom-up gap filling
Grant 10,784,106 - Huang , et al. Sept | 2020-09-22 |
Selective silicon growth for gapfill improvement
Grant 10,741,674 - Yu , et al. A | 2020-08-11 |
Post UV cure for gapfill improvement
Grant 10,727,064 - Yu , et al. | 2020-07-28 |
Method of semiconductor integrated circuit fabrication
Grant 10,685,867 - Yu , et al. | 2020-06-16 |
Selective Silicon Growth for Gapfill Improvement
App 20200152771 - Yu; De-Wei ; et al. | 2020-05-14 |
Method For Forming A Finfet Device
App 20200105605 - Teng; Yun Chen ; et al. | 2020-04-02 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20200083112 - YU; De-Wei ; et al. | 2020-03-12 |
Cap Layer and Anneal for Gapfill Improvement
App 20200075745 - Yu; De-Wei ; et al. | 2020-03-05 |
Gap-filling Germanium Through Selective Bottom-up Growth
App 20200052089 - Yu; De-Wei ; et al. | 2020-02-13 |
Selective Film Growth for Bottom-Up Gap Filling
App 20200043730 - Huang; Yu-Lien ; et al. | 2020-02-06 |
Semiconductor Device And Method
App 20200044048 - Yu; De-Wei ; et al. | 2020-02-06 |
Method of Gap Filling Using Conformal Deposition-Annealing-Etching Cycle for Reducing Seam Void and Bending
App 20200035506A1 - | 2020-01-30 |
Interlayer dielectric film in semiconductor devices
Grant 10,535,557 - Wang , et al. Ja | 2020-01-14 |
Selective silicon growth for gapfill improvement
Grant 10,535,751 - Yu , et al. Ja | 2020-01-14 |
Defect Filling in Patterned Layer
App 20190393325 - Chang; Chia-Ao ; et al. | 2019-12-26 |
Cap layer and anneal for gapfill improvement
Grant 10,510,865 - Yu , et al. Dec | 2019-12-17 |
Selective film growth for bottom-up gap filling
Grant 10,504,724 - Huang , et al. Dec | 2019-12-10 |
Method of gap filling using conformal deposition-annealing-etching cycle for reducing seam void and bending
Grant 10,504,747 - Yu , et al. Dec | 2019-12-10 |
Selective Silicon Growth for Gapfill Improvement
App 20190371914 - Yu; De-Wei ; et al. | 2019-12-05 |
Method of semiconductor integrated circuit fabrication
Grant 10,483,170 - Yu , et al. Nov | 2019-11-19 |
Gap-filling germanium through selective bottom-up growth
Grant 10,468,501 - Yu , et al. No | 2019-11-05 |
Post UV Cure for Gapfill Improvement
App 20190318932 - Yu; De-Wei ; et al. | 2019-10-17 |
Cap Layer And Anneal For Gapfill Improvement
App 20190319113 - YU; De-Wei ; et al. | 2019-10-17 |
Interlayer Dielectric Film in Semiconductor Devices
App 20190229012 - WANG; Tsan-Chun ; et al. | 2019-07-25 |
Gapfill improvement
Grant 10,347,741 - Liang , et al. July 9, 2 | 2019-07-09 |
Post UV cure for gapfill improvement
Grant 10,332,746 - Yu , et al. | 2019-06-25 |
Semiconductor Device Structure With Salicide Layer And Method For Forming The Same
App 20190131421 - SHEN; Hsiang-Ku ; et al. | 2019-05-02 |
Selective Film Growth for Bottom-Up Gap Filling
App 20190109004 - Huang; Yu-Lien ; et al. | 2019-04-11 |
Silicon Reflow for Reducing Seam and Void and Bending During Gap Fill
App 20190103284 - Yu; De-Wei ; et al. | 2019-04-04 |
Gap-Filling Germanium Through Selective Bottom-Up Growth
App 20190103476 - Yu; De-Wei ; et al. | 2019-04-04 |
Interlayer dielectric film in semiconductor devices
Grant 10,249,530 - Wang , et al. | 2019-04-02 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20190067083 - YU; De-Wei ; et al. | 2019-02-28 |
Selective film growth for bottom-up gap filling
Grant 10,170,305 - Huang , et al. J | 2019-01-01 |
Method of semiconductor integrated circuit fabrication
Grant 10,115,624 - Yu , et al. October 30, 2 | 2018-10-30 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20180308765 - YU; De-Wei ; et al. | 2018-10-25 |
Method of semiconductor integrated circuit fabrication
Grant 10,008,418 - Yu , et al. June 26, 2 | 2018-06-26 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20180096898 - YU; De-Wei ; et al. | 2018-04-05 |
Method Of Semiconductor Integrated Circuit Fabrication
App 20180005869 - YU; De-Wei ; et al. | 2018-01-04 |
Interlayer Dielectric Film in Semiconductor Devices
App 20170207117 - WANG; Tsan-Chun ; et al. | 2017-07-20 |
Interlayer dielectric film in semiconductor devices
Grant 9,634,141 - Wang , et al. April 25, 2 | 2017-04-25 |
Interlayer Dielectric Film in Semiconductor Devices
App 20170110577 - WANG; Tsan-Chun ; et al. | 2017-04-20 |
Systems and methods for semiconductor device process determination using reflectivity measurement
Grant 9,482,518 - Tsai , et al. November 1, 2 | 2016-11-01 |
Methods for doping Fin field-effect transistors and Fin field-effect transistor
Grant 9,450,097 - Tsai , et al. September 20, 2 | 2016-09-20 |
Method of forming a semiconductor device
Grant 9,324,865 - Fang , et al. April 26, 2 | 2016-04-26 |
Methods For Doping Fin Field-effect Transistors And Fin Field-effect Transistor
App 20160071973 - TSAI; Chun Hsiung ; et al. | 2016-03-10 |
Methods for doping fin field-effect transistors
Grant 9,209,280 - Tsai , et al. December 8, 2 | 2015-12-08 |
Systems And Methods For Semiconductor Device Process Determination Using Reflectivity Measurement
App 20150292868 - Tsai; Chun Hsiung ; et al. | 2015-10-15 |
Methods For Doping Fin Field-effect Transistors
App 20150155370 - TSAI; Chun Hsiung ; et al. | 2015-06-04 |
Methods for doping fin field-effect transistors
Grant 8,980,719 - Tsai , et al. March 17, 2 | 2015-03-17 |
Method And Apparatus For Thermal Mapping And Thermal Process Control
App 20150069046 - TSAI; CHUN HSIUNG ; et al. | 2015-03-12 |
Method of Forming A Semiconductor Device
App 20150028355 - Fang; Ziwei ; et al. | 2015-01-29 |
System for semiconductor device characterization using reflectivity measurement
Grant 8,883,522 - Tsai , et al. November 11, 2 | 2014-11-11 |
Method of forming a semiconductor device
Grant 8,877,599 - Fang , et al. November 4, 2 | 2014-11-04 |
System For Semiconductor Device Characterization Using Reflectivity Measurement
App 20140233043 - Tsai; Chun Hsiung ; et al. | 2014-08-21 |
Method and system for semiconductor device pattern loading effect characterization
Grant 8,753,904 - Tsai , et al. June 17, 2 | 2014-06-17 |
Method And System For Semiconductor Device Pattern Loading Effect Characterization
App 20130330847 - Tsai; Chun Hsiung ; et al. | 2013-12-12 |
Method of Forming a Semiconductor Device
App 20130309829 - Fang; Ziwei ; et al. | 2013-11-21 |
Methods of forming integrated circuits
Grant 8,187,928 - Yu , et al. May 29, 2 | 2012-05-29 |
Method Of Forming Integrated Circuits
App 20120070953 - YU; De-Wei ; et al. | 2012-03-22 |
Thermal Leveling for Semiconductor Devices
App 20120015459 - Tsai; Chun Hsiung ; et al. | 2012-01-19 |
Method And Apparatus For Measuring Intra-die Temperature
App 20110295539 - TSAI; Chun Hsiung ; et al. | 2011-12-01 |
Methods For Doping Fin Field-effect Transistors
App 20110269287 - TSAI; Chun Hsiung ; et al. | 2011-11-03 |
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