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Patent applications and USPTO patent grants for Young; Roger Y. B..The latest application filed is for "dynamic edge bead removal".
Patent | Date |
---|---|
Wafer edge defect inspection using captured image analysis Grant 7,968,859 - Young , et al. June 28, 2 | 2011-06-28 |
Dynamic edge bead removal Grant 7,183,181 - Li , et al. February 27, 2 | 2007-02-27 |
Dynamic edge bead removal App 20060073703 - Li; Xiao ;   et al. | 2006-04-06 |
Wafer edge defect inspection App 20050023491 - Young, Roger Y. B. ;   et al. | 2005-02-03 |
Apparatus for removing photoresist edge beads from thin film substrates Grant 6,614,507 - Young , et al. September 2, 2 | 2003-09-02 |
Apparatus for removing photoresist edge beads from thin film substrates App 20030031959 - Young, Roger Y.B. ;   et al. | 2003-02-13 |
Method and apparatus for removing photoresist edge beads from thin film substrates Grant 6,495,312 - Young , et al. December 17, 2 | 2002-12-17 |
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