loadpatents
Patent applications and USPTO patent grants for Young; Roger M..The latest application filed is for "alignment correction system and method of use".
Patent | Date |
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Metrology management Grant 9,652,729 - Hoffman, Jr. , et al. May 16, 2 | 2017-05-16 |
Alignment correction system and method of use Grant 8,736,275 - Foster , et al. May 27, 2 | 2014-05-27 |
Alignment correction system and method of use Grant 8,680,871 - Foster , et al. March 25, 2 | 2014-03-25 |
Alignment Correction System And Method Of Use App 20130245993 - FOSTER; Robert J. ;   et al. | 2013-09-19 |
Alignment Correction System And Method Of Use App 20130238112 - FOSTER; Robert J. ;   et al. | 2013-09-12 |
Alignment correction system and method of use Grant 8,451,008 - Foster , et al. May 28, 2 | 2013-05-28 |
Metrology Management App 20130110448 - Hoffman, JR.; William K. ;   et al. | 2013-05-02 |
Monitoring stage alignment and related stage and calibration target Grant 8,411,270 - Zangooie , et al. April 2, 2 | 2013-04-02 |
Manufacturing work in process management system Grant 7,937,177 - Gifford , et al. May 3, 2 | 2011-05-03 |
Offset determination method for measurement system matching Grant 7,853,345 - Brendler , et al. December 14, 2 | 2010-12-14 |
Determining angle of incidence with respect to workpiece Grant 7,742,160 - Bottini , et al. June 22, 2 | 2010-06-22 |
Determining azimuth angle of incident beam to wafer Grant 7,646,491 - Zangooie , et al. January 12, 2 | 2010-01-12 |
Alignment Correction System And Method Of Use App 20090312982 - Foster; Robert J. ;   et al. | 2009-12-17 |
Method Of Releasing Units In A Production Facility App 20090299511 - Chan; John ;   et al. | 2009-12-03 |
Alignment correction system and method of use Grant 7,592,817 - Foster , et al. September 22, 2 | 2009-09-22 |
Monitoring Stage Alignment And Related Stage And Calibration Target App 20090185183 - Zangooie; Shahin ;   et al. | 2009-07-23 |
Determining Signal Quality Of Optical Metrology Tool App 20090182529 - Zangooie; Shahin ;   et al. | 2009-07-16 |
Determining Angle Of Incidence With Respect To Workpiece App 20090180108 - Bottini; Clemente ;   et al. | 2009-07-16 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput Grant 7,542,136 - Zangooie , et al. June 2, 2 | 2009-06-02 |
Optical Spot Geometric Parameter Determination Using Calibration Targets App 20090027660 - Zangooie; Shahin ;   et al. | 2009-01-29 |
Alignment Correction System and Method of Use App 20090021236 - Foster; Robert J. ;   et al. | 2009-01-22 |
Optical spot geometric parameter determination using calibration targets Grant 7,477,365 - Zangooie , et al. January 13, 2 | 2009-01-13 |
Flipping Stage Arrangement For Reduced Wafer Contamination Cross Section And Improved Measurement Accuracy And Throughput App 20090009763 - Zangooie; Shahin ;   et al. | 2009-01-08 |
Manufacturing Work In Process Management System App 20090005896 - Gifford; Jeffrey P. ;   et al. | 2009-01-01 |
Determining Azimuth Angle Of Incident Beam To Wafer App 20080316471 - Zangooie; Shahin ;   et al. | 2008-12-25 |
Determining Tool Set Matching Using Production Data App 20080201009 - Brendler; Andrew C. ;   et al. | 2008-08-21 |
Optical spot geometric parameter determination using calibration targets App 20080024781 - Zangooie; Shahin ;   et al. | 2008-01-31 |
Offset Determination For Measurement System Matching App 20080015815 - Brendler; Andrew C. ;   et al. | 2008-01-17 |
Offset determination for measurement system matching Grant 7,318,206 - Brendler , et al. January 8, 2 | 2008-01-08 |
Automated Tool Recipe Verification And Correction App 20070179651 - Holmes; Timothy L. ;   et al. | 2007-08-02 |
Automated tool recipe verification and correction Grant 7,248,936 - Holmes , et al. July 24, 2 | 2007-07-24 |
Offset Determination For Measurement System Matching App 20070078612 - Brendler; Andrew C. ;   et al. | 2007-04-05 |
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