Patent | Date |
---|
Etching Method And Etching Apparatus App 20220068657 - TAKEYA; Koji ;   et al. | 2022-03-03 |
Etching Method And Etching Apparatus App 20220020601 - TODA; Satoshi ;   et al. | 2022-01-20 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20190341255 - MURAMATSU; Makoto ;   et al. | 2019-11-07 |
Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers Grant 10,418,242 - Muramatsu , et al. Sept | 2019-09-17 |
Substrate treatment method, computer storage medium and substrate treatment system Grant 10,329,144 - Muramatsu , et al. | 2019-06-25 |
High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container Grant 10,207,349 - Mitsuoka , et al. Feb | 2019-02-19 |
Substrate processing method, substrate processing apparatus, and storage medium Grant 10,199,240 - Hayashi , et al. Fe | 2019-02-05 |
Substrate processing method and storage medium Grant 10,096,462 - Hayashi , et al. October 9, 2 | 2018-10-09 |
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 10,046,370 - Goshi , et al. August 14, 2 | 2018-08-14 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20180065843 - MURAMATSU; Makoto ;   et al. | 2018-03-08 |
Method for processing target object Grant 9,911,621 - Tobana , et al. March 6, 2 | 2018-03-06 |
Substrate Processing Apparatus, Substrate Processing Method, Fluid Supplying Method And Storage Medium App 20170320107 - GOSHI; Gentaro ;   et al. | 2017-11-09 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20170287749 - MURAMATSU; Makoto ;   et al. | 2017-10-05 |
Substrate treatment method, computer readable storage medium and substrate treatment system Grant 9,741,583 - Muramatsu , et al. August 22, 2 | 2017-08-22 |
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 9,662,685 - Goshi , et al. May 30, 2 | 2017-05-30 |
Method For Processing Target Object App 20170148641 - TOBANA; Toshikatsu ;   et al. | 2017-05-25 |
Substrate Treatment Method, Computer Readable Storage Medium And Substrate Treatment System App 20170133235 - MURAMATSU; Makoto ;   et al. | 2017-05-11 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 9,583,330 - Ji , et al. February 28, 2 | 2017-02-28 |
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20140250714 - JI; Linan ;   et al. | 2014-09-11 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 8,771,429 - Ji , et al. July 8, 2 | 2014-07-08 |
High-pressure Container, Substrate Processing Apparatus, And Method For Manufacturing High-pressure Container App 20140145390 - Mitsuoka; Kazuyuki ;   et al. | 2014-05-29 |
Substrate Processing Method, Substrate Processing Apparatus And Storage Medium App 20140020721 - HAYASHI; Hidekazu ;   et al. | 2014-01-23 |
Substrate Processing Apparatus, Substrate Processing Method, Fluid Supplying Method And Storage Medium App 20130333726 - GOSHI; Gentaro ;   et al. | 2013-12-19 |
Supercritical drying method and apparatus for semiconductor substrates Grant 8,372,212 - Sato , et al. February 12, 2 | 2013-02-12 |
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20130019905 - JI; Linan ;   et al. | 2013-01-24 |
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20120304485 - Hayashi; Hidekazu ;   et al. | 2012-12-06 |
Supercritical Drying Method And Apparatus For Semiconductor Substrates App 20120247516 - SATO; Yohei ;   et al. | 2012-10-04 |
Substrate processing method and computer storage medium Grant 8,084,372 - You , et al. December 27, 2 | 2011-12-27 |
Method And Apparatus For Reforming Film And Controlling Slimming Amount Thereof App 20100040980 - Nishimura; Eiichi ;   et al. | 2010-02-18 |
Substrate Processing Method And Computer Storage Medium App 20090053904 - You; Gen ;   et al. | 2009-02-26 |
Method and apparatus for reforming film and controlling slimming amount thereof App 20050214683 - Nishimura, Eiichi ;   et al. | 2005-09-29 |