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Defect inspection apparatus and pattern chip
Grant 10,955,361 - Urano , et al. March 23, 2 | 2021-03-23 |
Defect inspection device, pattern chip, and defect inspection method
Grant 10,948,424 - Urano , et al. March 16, 2 | 2021-03-16 |
Optical inspection tool and method
Grant 10,853,959 - Yoshitake , et al. December 1, 2 | 2020-12-01 |
Optical Inspection Tool And Method
App 20200311955 - Yoshitake; Yasuhiro ; et al. | 2020-10-01 |
Defect Inspection Apparatus And Pattern Chip
App 20200182804 - URANO; Yuta ; et al. | 2020-06-11 |
Defect Inspection Device, Pattern Chip, And Defect Inspection Method
App 20190107498 - URANO; Yuta ; et al. | 2019-04-11 |
Distance measuring device and distance measuring method
Grant 8,982,332 - Tachizaki , et al. March 17, 2 | 2015-03-17 |
Pattern inspection device of substrate surface and pattern inspection method of the same
Grant 8,736,830 - Watanabe , et al. May 27, 2 | 2014-05-27 |
DUV-UV band spectroscopic optical system and spectrometer using same
Grant 8,730,471 - Oka , et al. May 20, 2 | 2014-05-20 |
Wavefront aberration measuring method and device therefor
Grant 8,705,024 - Yoshitake , et al. April 22, 2 | 2014-04-22 |
Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light
Grant 8,659,761 - Nakata , et al. February 25, 2 | 2014-02-25 |
Defect inspection system
Grant 8,660,336 - Ueno , et al. February 25, 2 | 2014-02-25 |
Defect inspection device using catadioptric objective lens
Grant 8,553,216 - Yoshimizu , et al. October 8, 2 | 2013-10-08 |
Method and equipment for detecting pattern defect
Grant 8,553,214 - Shishido , et al. October 8, 2 | 2013-10-08 |
Defect inspection apparatus and method
Grant 8,416,292 - Shibata , et al. April 9, 2 | 2013-04-09 |
Method and apparatus for inspecting defects
Grant 8,416,402 - Shibata , et al. April 9, 2 | 2013-04-09 |
Method and apparatus for inspecting defects
Grant 8,411,264 - Ueno , et al. April 2, 2 | 2013-04-02 |
Defect Inspection System
App 20130058558 - UENO; Taketo ; et al. | 2013-03-07 |
Distance Measuring Device and Distance Measuring Method
App 20130003038 - Tachizaki; Takehiro ; et al. | 2013-01-03 |
Defect Inspection Device Using Catadioptric Objective Lens
App 20120281207 - Yoshimizu; Keiko ; et al. | 2012-11-08 |
Spectral detection method and device, and defect inspection method and apparatus using the same
Grant 8,279,431 - Hirose , et al. October 2, 2 | 2012-10-02 |
Defect inspection system
Grant 8,275,189 - Ueno , et al. September 25, 2 | 2012-09-25 |
Method And Apparatus For Inspecting Defects
App 20120236296 - SHIBATA; Yukihiro ; et al. | 2012-09-20 |
Magnetic recording disk having aligning pattern and method for aligning thereof
Grant 8,259,414 - Hirose , et al. September 4, 2 | 2012-09-04 |
Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system
Grant 8,227,265 - Nemoto , et al. July 24, 2 | 2012-07-24 |
Method and apparatus for inspecting defects
Grant 8,203,706 - Shibata , et al. June 19, 2 | 2012-06-19 |
Method and apparatus for inspecting defects of patterns formed on a hard disk medium
Grant 8,148,705 - Hirose , et al. April 3, 2 | 2012-04-03 |
Method And Apparatus For Measuring Displacement Of A Sample To Be Inspected Using An Interference Light
App 20120062903 - Nakata; Toshihiko ; et al. | 2012-03-15 |
Method and apparatus for inspecting defects
Grant 8,121,398 - Yoshitake , et al. February 21, 2 | 2012-02-21 |
Wavefront Aberration Measuring Method And Device Therefor
App 20120019813 - Yoshitake; Yasuhiro ; et al. | 2012-01-26 |
Defect Inspection Method And Defect Inspection Apparatus
App 20120019816 - Shibata; Yukihiro ; et al. | 2012-01-26 |
Pattern Inspection Device Of Substrate Surface And Pattern Inspection Method Of The Same
App 20120013890 - Watanabe; Masahiro ; et al. | 2012-01-19 |
Method And Apparatus For Reviewing Defect
App 20120008132 - SAITO; Keiya ; et al. | 2012-01-12 |
Method and apparatus for measuring displacement of a sample to be inspected using an interference light
Grant 8,064,066 - Nakata , et al. November 22, 2 | 2011-11-22 |
Duv-uv Band Spectroscopic Optical System And Spectrometer Using Same
App 20110279820 - Oka; Keiko ; et al. | 2011-11-17 |
Method and apparatus for reviewing defect
Grant 8,045,146 - Saito , et al. October 25, 2 | 2011-10-25 |
Adjustable Beam Size Illumination Optical Apparatus and Beam Size Adjusting Method
App 20110228537 - YOSHIMIZU; Keiko ; et al. | 2011-09-22 |
Defect Inspection System
App 20110069895 - Ueno; Taketo ; et al. | 2011-03-24 |
Apparatus for optically arranging surface of alignment film and method for manufacturing liquid crystal display device using the same
Grant 7,894,029 - Arai , et al. February 22, 2 | 2011-02-22 |
Defect inspection system
Grant 7,881,520 - Ueno , et al. February 1, 2 | 2011-02-01 |
Method Of Measuring Pattern Shape, Method Of Manufacturing Semiconductor Device, And Process Control System
App 20110020956 - NEMOTO; Kana ; et al. | 2011-01-27 |
Method And Equipment For Detecting Pattern Defect
App 20110001972 - Shishido; Hiroaki ; et al. | 2011-01-06 |
Method and equipment for detecting pattern defect
Grant 7,791,725 - Shishido , et al. September 7, 2 | 2010-09-07 |
Spectral Detection Method And Device, And Defect Inspection Method And Apparatus Using The Same
App 20100182589 - HIROSE; Takenori ; et al. | 2010-07-22 |
Method And Apparatus For Measuring Displacement Of A Sample
App 20100039652 - Nakata; Toshihiko ; et al. | 2010-02-18 |
Method and Apparatus for Inspecting Defects
App 20100014083 - UENO; Takeo ; et al. | 2010-01-21 |
Method and Apparatus for Inspecting Defects
App 20100014075 - Ueno; Takeo ; et al. | 2010-01-21 |
Method and apparatus for inspecting a semiconductor device
Grant 7,643,140 - Ueno , et al. January 5, 2 | 2010-01-05 |
Method And Apparatus For Inspecting Defects
App 20090279079 - Shibata; Yukihiro ; et al. | 2009-11-12 |
Method and apparatus for measuring displacement of a sample
Grant 7,612,889 - Nakata , et al. November 3, 2 | 2009-11-03 |
Method and Apparatus for Inspecting Defects
App 20090257647 - Yoshitake; Yasuhiro ; et al. | 2009-10-15 |
Method for optically detecting height of a specimen and charged particle beam apparatus using the same
Grant 7,599,076 - Saito , et al. October 6, 2 | 2009-10-06 |
Defect Inspection Apparatus And Method
App 20090213215 - Shibata; Yukihiro ; et al. | 2009-08-27 |
Method and apparatus for inspecting defects of patterns formed on a hard disk medium
App 20090161244 - Hirose; Takenori ; et al. | 2009-06-25 |
Method And Equipment For Detecting Pattern Defect
App 20090073443 - Shishido; Hiroaki ; et al. | 2009-03-19 |
Method and Apparatus for Reviewing Defect
App 20090002695 - SAITO; Keiya ; et al. | 2009-01-01 |
Hard disk media having alignment pattern and alignment method
App 20080298222 - Hirose; Takenori ; et al. | 2008-12-04 |
Method and equipment for detecting pattern defect
Grant 7,456,963 - Shishido , et al. November 25, 2 | 2008-11-25 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method
Grant 7,449,689 - Nagatomo , et al. November 11, 2 | 2008-11-11 |
Method And Apparatus For Inspecting A Semiconductor Device
App 20080239289 - UENO; Taketo ; et al. | 2008-10-02 |
Method And Apparatus For Detecting Defects
App 20080068593 - NAKANO; HIROYUKI ; et al. | 2008-03-20 |
Method for controlling semiconductor device production process and a method for producing semiconductor devices
Grant 7,273,685 - Sasazawa , et al. September 25, 2 | 2007-09-25 |
Method for optically detecting height of a specimen and charged particle beam apparatus using the same
App 20070109557 - Saito; Keiya ; et al. | 2007-05-17 |
Defect inspection system
App 20070053581 - Ueno; Taketo ; et al. | 2007-03-08 |
Method and equipment for detecting pattern defect
App 20070052955 - Shishido; Hiroaki ; et al. | 2007-03-08 |
Method and equipment for detecting pattern defect
Grant 7,132,669 - Shishido , et al. November 7, 2 | 2006-11-07 |
Method and apparatus for measuring displacement of a sample
App 20060215171 - Nakata; Toshihiko ; et al. | 2006-09-28 |
Method for controlling semiconductor device production process and a method for producing semiconductor devices
App 20060183040 - Sasazawa; Hideaki ; et al. | 2006-08-17 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method
App 20060108524 - Nagatomo; Wataru ; et al. | 2006-05-25 |
Method and equipment for detecting pattern defect
App 20050253081 - Shishido, Hiroaki ; et al. | 2005-11-17 |
Apparatus for optically arranging surface of alignment film and method for manufacturing liquid crystal display device using the same
App 20050225695 - Arai, Takeshi ; et al. | 2005-10-13 |
Method and equipment for detecting pattern defect
Grant 6,921,905 - Shishido , et al. July 26, 2 | 2005-07-26 |
Method and system for monitoring a semiconductor device manufacturing process
Grant 6,909,930 - Shishido , et al. June 21, 2 | 2005-06-21 |
Method and its apparatus for manufacturing semiconductor device
Grant 6,869,807 - Yoshitake , et al. March 22, 2 | 2005-03-22 |
Method and equipment for detecting pattern defect
App 20050045830 - Shishido, Hiroaki ; et al. | 2005-03-03 |
Method and system for processing a semi-conductor device
Grant 6,841,321 - Matsumoto , et al. January 11, 2 | 2005-01-11 |
Method and equipment for detecting pattern defect
Grant 6,800,859 - Shishido , et al. October 5, 2 | 2004-10-05 |
Overlay inspection apparatus for semiconductor substrate and method thereof
Grant 6,801,827 - Yoshitake , et al. October 5, 2 | 2004-10-05 |
Process management system
Grant 6,757,621 - Mizuno , et al. June 29, 2 | 2004-06-29 |
Exposure processing method and exposure system for the same
Grant 6,721,940 - Miwa , et al. April 13, 2 | 2004-04-13 |
Exposure mask with appended mask error data
Grant 6,720,117 - Matsumoto , et al. April 13, 2 | 2004-04-13 |
Overlay inspection apparatus for semiconductor substrate and method thereof
Grant 6,697,698 - Yoshitake , et al. February 24, 2 | 2004-02-24 |
Method for producing a semiconductor device
Grant 6,686,107 - Matsumoto , et al. February 3, 2 | 2004-02-03 |
Process and apparatus for manufacturing semiconductor device
Grant 6,667,806 - Yoshitake , et al. December 23, 2 | 2003-12-23 |
Exposure method
Grant 6,653,032 - Miwa , et al. November 25, 2 | 2003-11-25 |
Inspection system and method for manufacturing electronic devices using the inspection system
Grant 6,611,728 - Morioka , et al. August 26, 2 | 2003-08-26 |
Method for producing a semiconductor device
App 20030134208 - Matsumoto, Shunichi ; et al. | 2003-07-17 |
Process management system
App 20030130806 - Mizuno, Fumio ; et al. | 2003-07-10 |
Method and its apparatus for manufacturing simiconductor device
App 20030121022 - Yoshitake, Yasuhiro ; et al. | 2003-06-26 |
Process control system
Grant 6,542,830 - Mizuno , et al. April 1, 2 | 2003-04-01 |
Method and system for manufacturing semiconductor devices
App 20030033046 - Yoshitake, Yasuhiro ; et al. | 2003-02-13 |
Method and system for manufacturing semiconductor devices
App 20030018406 - Yoshitake, Yasuhiro ; et al. | 2003-01-23 |
Method and system for monitoring a semiconductor device manufacturing process
App 20030015660 - Shishido, Chie ; et al. | 2003-01-23 |
Method and apparatus for processing inspection data
Grant 6,456,951 - Maeda , et al. September 24, 2 | 2002-09-24 |
Method and system for processing a semi-conductor device
App 20020111038 - Matsumoto, Shunichi ; et al. | 2002-08-15 |
Exposure processing method and exposure system for the same
App 20020100013 - Miwa, Toshiharu ; et al. | 2002-07-25 |
Method for producing a semiconductor device
App 20020081506 - Matsumoto, Shunichi ; et al. | 2002-06-27 |
Exposure method and exposure system the same
App 20020076629 - Miwa, Toshiharu ; et al. | 2002-06-20 |
Process and apparatus for manufacturing semiconductor device
App 20020048020 - Yoshitake, Yasuhiro ; et al. | 2002-04-25 |
Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods
App 20020042682 - Yoshitake, Yasuhiro ; et al. | 2002-04-11 |
Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system
Grant 5,684,565 - Oshida , et al. November 4, 1 | 1997-11-04 |
Refractive/diffractive optical system for broad-band through-the-lens imaging of alignment marks on substrates in stepper machines
Grant 5,371,570 - Morris , et al. December 6, 1 | 1994-12-06 |
Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same
Grant 5,016,149 - Tanaka , et al. May 14, 1 | 1991-05-14 |
Method and apparatus for pattern detection
Grant 4,993,837 - Oshida , et al. February 19, 1 | 1991-02-19 |
Semiconductor exposing system having apparatus for correcting change in wavelength of light source
Grant 4,922,290 - Yoshitake , et al. May 1, 1 | 1990-05-01 |
Method and apparatus for optical alignment of semiconductor by using a hologram
Grant 4,862,008 - Oshida , et al. August 29, 1 | 1989-08-29 |
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Grant 4,819,033 - Yoshitake , et al. April 4, 1 | 1989-04-04 |
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