Yoshioka; Katsushi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yoshioka; Katsushi.The latest application filed is for "substrate treating apparatus and method".
- Yoshioka; Katsushi - Kyoto JP
| Patent | Date |
|---|---|
| Substrate treating method and apparatus Grant 7,105,074 - Tamada , et al. September 12, 2 | 2006-09-12 |
| Substrate treating apparatus Grant 6,893,171 - Fukutomi , et al. May 17, 2 | 2005-05-17 |
| Substrate treating apparatus and method Grant 6,832,863 - Sugimoto , et al. December 21, 2 | 2004-12-21 |
| Chemical treating apparatus Grant 6,827,782 - Goto , et al. December 7, 2 | 2004-12-07 |
| Substrate processing apparatus Grant 6,752,543 - Fukutomi , et al. June 22, 2 | 2004-06-22 |
| Substrate treating apparatus and method App 20040005149 - Sugimoto, Kenji ; et al. | 2004-01-08 |
| Substrate processing apparatus App 20030217695 - Fukutomi, Yoshiteru ; et al. | 2003-11-27 |
| Substrate treating apparatus App 20030213431 - Fukutomi, Yoshiteru ; et al. | 2003-11-20 |
| Chemical treating apparatus App 20030141314 - Goto, Shigehiro ; et al. | 2003-07-31 |
| Substrate treating method and apparatus App 20030017665 - Tamada, Osamu ; et al. | 2003-01-23 |
| Substrate processing apparatus App 20020152958 - Shigemori, Kazuhito ; et al. | 2002-10-24 |
| Substrate processing apparatus Grant 6,149,727 - Yoshioka , et al. November 21, 2 | 2000-11-21 |
| Substrate processing apparatus and air supply method in substrate processing apparatus Grant 5,792,259 - Yoshioka , et al. August 11, 1 | 1998-08-11 |
| Substrate spin coating apparatus Grant 5,762,709 - Sugimoto , et al. June 9, 1 | 1998-06-09 |
| Substrate spin treating method and apparatus Grant 5,677,000 - Yoshioka , et al. October 14, 1 | 1997-10-14 |
| Device for holding and rotating a substrate Grant 5,376,216 - Yoshioka , et al. December 27, 1 | 1994-12-27 |
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