Yoshikawa; Shoji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yoshikawa; Shoji.The latest application filed is for "lunar orbiting satellite system, and ground station of lunar orbiting satellite system".

Company Profile

2.81.71

Yoshikawa; Shoji - Tokyo JP
Yoshikawa; Shoji - Hachioji JP
Yoshikawa; Shoji - Hachioji-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lunar orbiting satellite system, and ground station of lunar orbiting satellite system Grant 11,260,996 - Imamura , et al. March 1, 2	2022-03-01
Lunar Orbiting Satellite System, And Ground Station Of Lunar Orbiting Satellite System App 20210078733 - IMAMURA; Naoki ; et al.	2021-03-18
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Grant 10,446,404 - Tajima , et al. Oc	2019-10-15
Inspection device Grant 10,157,722 - Hatakeyama , et al. Dec	2018-12-18
Inspection system and inspection image data generation method Grant 10,074,510 - Suematsu , et al. September 11, 2	2018-09-11
Electron-beam Irradiated Area Adjustment Method And Adjustment System, Electron-beam Irradiated Region Correction Method, And Electron Beam Irradiation Apparatus App 20180233374 - TAJIMA; Ryo ; et al.	2018-08-16
Surface processing apparatus Grant 9,852,878 - Hatakeyama , et al. December 26, 2	2017-12-26
Inspection apparatus Grant 9,601,302 - Yoshikawa , et al. March 21, 2	2017-03-21
Inspection Device App 20160307726 - Hatakeyama; Masahiro ; et al.	2016-10-20
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Surface Processing Apparatus App 20150371813 - HATAKEYAMA; Masahiro ; et al.	2015-12-24
Inspection Apparatus App 20150340193 - YOSHIKAWA; Shoji ; et al.	2015-11-26
Inspection apparatus Grant 9,134,261 - Yoshikawa , et al. September 15, 2	2015-09-15
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded Grant 9,105,445 - Tajima , et al. August 11, 2	2015-08-11
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Inspection Apparatus App 20150097116 - HATAKEYAMA; Masahiro ; et al.	2015-04-09
Inspection System And Inspection Image Data Generation Method App 20150041646 - Suematsu; Kenichi ; et al.	2015-02-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Inspection apparatus Grant 8,946,629 - Hatakeyama , et al. February 3, 2	2015-02-03
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Sample observing device and sample observing method Grant 8,884,225 - Karimata , et al. November 11, 2	2014-11-11
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Inspection Apparatus App 20140319345 - HATAKEYAMA; Masahiro ; et al.	2014-10-30
Inspection Apparatus App 20140312227 - YOSHIKAWA; Shoji ; et al.	2014-10-23
Inspection System, Inspection Image Data Generation Method, Inspection Display Unit, Defect Determination Method, And Storage Medium On Which Inspection Display Program Is Recorded App 20140291515 - TAJIMA; Ryo ; et al.	2014-10-02
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Detector and inspecting apparatus Grant 8,796,621 - Hatakeyama , et al. August 5, 2	2014-08-05
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Inspection apparatus Grant 8,742,344 - Hatakeyama , et al. June 3, 2	2014-06-03
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Inspection Apparatus App 20140077078 - HATAKEYAMA; Masahiro ; et al.	2014-03-20
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Inspection Device App 20140014848 - Hatakeyama; Masahiro ; et al.	2014-01-16
Detector And Inspecting Apparatus App 20130228684 - Hatakeyama; Masahiro ; et al.	2013-09-05
Inspection device Grant 8,497,476 - Hatakeyama , et al. July 30, 2	2013-07-30
Sample Observing Device And Sample Observing Method App 20130161511 - Karimata; Tsutomu ; et al.	2013-06-27
Detector and inspecting apparatus Grant 8,431,892 - Hatakeyama , et al. April 30, 2	2013-04-30
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Inspection Device App 20120235036 - Hatakeyama; Masahiro ; et al.	2012-09-20
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Detector and inspecting apparatus Grant 7,928,382 - Hatakeyama , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Detector And Inspecting Apparatus App 20110024623 - HATAKEYAMA; Masahiro ; et al.	2011-02-03
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Method for marking defect and device therefor Grant 7,599,052 - Uesugi , et al. October 6, 2	2009-10-06
Detector And Inspecting Apparatus App 20090224151 - Hatakeyama; Masahiro ; et al.	2009-09-10
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
Method for marking defect and device therefor App 20090086209 - Uesugi; Mitsuaki ; et al.	2009-04-02
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Electron beam apparatus and device manufacturing method using the same Grant 7,479,634 - Nakasuji , et al. January 20, 2	2009-01-20
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Method for marking defect and device therefor Grant 7,423,744 - Uesugi , et al. September 9, 2	2008-09-09
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Information recording medium examining apparatus and method Grant 7,403,279 - Tohyama , et al. July 22, 2	2008-07-22
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Image pickup information recognition system Grant 7,305,149 - Yoshikawa , et al. December 4, 2	2007-12-04
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Method for marking defect and device therefor Grant 7,248,366 - Uesugi , et al. July 24, 2	2007-07-24
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus and device manufacturing method using the same App 20070158565 - Nakasuji; Mamoru ; et al.	2007-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Electron beam apparatus and device manufacturing method using same Grant 7,205,540 - Nakasuji , et al. April 17, 2	2007-04-17
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for marking defect and device therefor App 20070052964 - Uesugi; Mitsuaki ; et al.	2007-03-08
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Electron beam system Grant 7,157,703 - Nakasuji , et al. January 2, 2	2007-01-02
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Information recording medium examining apparatus and method App 20060087953 - Tohyama; Keiichi ; et al.	2006-04-27
Stage device and angle detecting device Grant 7,025,005 - Shinozaki , et al. April 11, 2	2006-04-11
Electron beam apparatus and device manufacturing method using same App 20060054819 - Nakasuji; Mamoru ; et al.	2006-03-16
Electron beam apparatus and device manufacturing method using same Grant 6,998,611 - Nakasuji , et al. February 14, 2	2006-02-14
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Electron beam system App 20040159787 - Nakasuji, Mamoru ; et al.	2004-08-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Image pickup information recognition system App 20030169903 - Yoshikawa, Shoji ; et al.	2003-09-11
Stage device and angle detecting device App 20030136309 - Shinozaki, Hiroyuki ; et al.	2003-07-24
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Electron beam apparatus and device manufacturing method using same App 20030042417 - Nakasuji, Mamoru ; et al.	2003-03-06
Method for marking defect and device therefor App 20020154308 - Uesugi, Mitsuaki ; et al.	2002-10-24
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Apparatus for determining attitude of artificaial satellite App 20020117585 - Yoshikawa, Shoji ; et al.	2002-08-29
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
GPS receiving system App 20020032525 - Yoshikawa, Shoji ; et al.	2002-03-14
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07
Attitude determination system for artificial satellite Grant 6,227,496 - Yoshikawa , et al. May 8, 2	2001-05-08
Artificial satellite navigation system and method Grant 6,166,684 - Yoshikawa , et al. December 26, 2	2000-12-26
Attitude determination system for artificial satellite Grant 6,102,338 - Yoshikawa , et al. August 15, 2	2000-08-15
Optical information recording and reproducing apparatus performing focus and/or track control by normalized error signals Grant 5,109,367 - Yoshikawa April 28, 1	1992-04-28
Photodisc apparatus with gain control of tracking servo loop Grant 5,014,256 - Horie , et al. May 7, 1	1991-05-07
Optical recording/reproducing apparatus Grant 4,797,866 - Yoshikawa January 10, 1	1989-01-10
Optical recording and reproducing apparatus Grant 4,706,232 - Funada , et al. November 10, 1	1987-11-10
Modulated light source with power stabilized according to data signal Grant 4,692,606 - Sakai , et al. September 8, 1	1987-09-08
Optical recording and reproducing equipment Grant 4,651,314 - Yoshikawa , et al. March 17, 1	1987-03-17
Light power controlling apparatus Grant 4,577,320 - Yoshikawa , et al. March 18, 1	1986-03-18
Temperature control device for a semiconductor laser Grant 4,571,728 - Yoshikawa February 18, 1	1986-02-18
System for detecting defects on an optical surface Grant 4,505,585 - Yoshikawa , et al. March 19, 1	1985-03-19
System for focusing an optical head onto a flat surface Grant 4,495,407 - Kodama , et al. January 22, 1	1985-01-22
Apparatus for detecting optically defects Grant 4,464,050 - Kato , et al. August 7, 1	1984-08-07