| Patent | Date |
|---|
Optical coherence tomography apparatus and method
Grant 9,052,179 - Inoue , et al. June 9, 2 | 2015-06-09 |
Optical Coherence Tomographic Imaging Apparatus
App 20140029013 - Yoshii; Minoru ; et al. | 2014-01-30 |
Optical Coherence Tomography Apparatus And Method
App 20130169973 - Inoue; Yukihiro ; et al. | 2013-07-04 |
Light Source Device And Optical Coherence Tomography Apparatus
App 20130027714 - Yoshii; Minoru ; et al. | 2013-01-31 |
Swept Light Source Apparatus And Imaging System Including The Same
App 20120307257 - Yoshii; Minoru ; et al. | 2012-12-06 |
Light Source Apparatus
App 20120127464 - Oigawa; Makoto ; et al. | 2012-05-24 |
Exposure apparatus and device manufacturing method
Grant 7,508,493 - Takeuchi , et al. March 24, 2 | 2009-03-24 |
Phase measuring method and apparatus for measuring characterization of optical thin films
Grant 7,327,467 - Takeuchi , et al. February 5, 2 | 2008-02-05 |
Exposure Apparatus And Device Manufacturing Method
App 20070188730 - Takeuchi; Seiji ; et al. | 2007-08-16 |
Phase measurement apparatus for measuring characterization of optical thin films
Grant 7,030,998 - Takeuchi , et al. April 18, 2 | 2006-04-18 |
Phase measuring method and apparatus for measuring characterization of optical thin films
App 20060055940 - Takeuchi; Seiji ; et al. | 2006-03-16 |
Position detecting system and exposure apparatus using the same
Grant 6,972,847 - Ina , et al. December 6, 2 | 2005-12-06 |
Position Detecting System And Exposure Apparatus Using The Same
App 20050195405 - Ina, Hideki ; et al. | 2005-09-08 |
Position detecting system and exposure apparatus using the same
Grant 6,906,805 - Ina , et al. June 14, 2 | 2005-06-14 |
Door switches
Grant 6,720,508 - Moriyama , et al. April 13, 2 | 2004-04-13 |
Aligning method, aligner, and device manufacturing method
Grant 6,714,302 - Suzuki , et al. March 30, 2 | 2004-03-30 |
Alignment method and exposure apparatus using the same
Grant 6,636,311 - Ina , et al. October 21, 2 | 2003-10-21 |
Phase measuring method and apparatus
App 20030144819 - Takeuchi, Seiji ; et al. | 2003-07-31 |
Door switches
App 20030005732 - Moriyama, Hiroyuki ; et al. | 2003-01-09 |
Exposure Apparatus
App 20020093656 - TAKEUCHI, SEIJI ; et al. | 2002-07-18 |
Aligning Method, Aligner, And Device Manufacturing Method
App 20020024671 - SUZUKI, AKIYOSHI ; et al. | 2002-02-28 |
Position sensor having a reflective projecting system and device fabrication method using the sensor
Grant 6,124,601 - Yoshii , et al. September 26, 2 | 2000-09-26 |
Surface position detecting system and exposure apparatus using the same
Grant 5,969,820 - Yoshii , et al. October 19, 1 | 1999-10-19 |
Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position
Grant 5,861,952 - Tsuji , et al. January 19, 1 | 1999-01-19 |
Surface position detecting system and projection exposure apparatus using the same
Grant 5,834,767 - Hasegawa , et al. November 10, 1 | 1998-11-10 |
Exposure state detecting system and exposure apparatus using the same
Grant 5,777,744 - Yoshii , et al. July 7, 1 | 1998-07-07 |
Inspection system and device manufacturing method using the same
Grant 5,767,962 - Suzuki , et al. June 16, 1 | 1998-06-16 |
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
Grant 5,751,426 - Nose , et al. May 12, 1 | 1998-05-12 |
Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium
Grant 5,721,721 - Yanagisawa , et al. February 24, 1 | 1998-02-24 |
Inspection system for original with pellicle
Grant 5,652,657 - Yoshii , et al. July 29, 1 | 1997-07-29 |
Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head
Grant 5,610,715 - Yoshii , et al. March 11, 1 | 1997-03-11 |
Encoder for controlling measurements in the range of a few angstroms
Grant 5,519,686 - Yanagisawa , et al. May 21, 1 | 1996-05-21 |
Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern
Grant 5,486,919 - Tsuji , et al. January 23, 1 | 1996-01-23 |
Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same
Grant 5,461,474 - Yoshii , et al. October 24, 1 | 1995-10-24 |
Image recognition method
Grant 5,450,503 - Ogino , et al. September 12, 1 | 1995-09-12 |
Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams
Grant 5,404,220 - Takeuchi , et al. April 4, 1 | 1995-04-04 |
In-focus detecting device
Grant 5,396,336 - Yoshii , et al. March 7, 1 | 1995-03-07 |
Method and apparatus for measuring an interval between two objects
Grant 5,343,291 - Ohwada , et al. August 30, 1 | 1994-08-30 |
Apparatus and method of detecting positional relationship using a weighted coefficient
Grant 5,340,992 - Matsugu , et al. August 23, 1 | 1994-08-23 |
Measuring method and apparatus for meausring the positional relationship of first and second gratings
Grant 5,333,050 - Nose , et al. July 26, 1 | 1994-07-26 |
Device for detecting positional relationship between two objects
Grant 5,327,221 - Saitoh , et al. July 5, 1 | 1994-07-05 |
Position detecting system utilizing a weight coefficient to determine a gravity center of light
Grant 5,291,023 - Hasegawa , et al. March 1, 1 | 1994-03-01 |
Position detecting method and apparatus
Grant 5,200,800 - Suda , et al. April 6, 1 | 1993-04-06 |
Distance measuring system utilizing an object with at least one inclined surface
Grant 5,122,660 - Yoshii , et al. June 16, 1 | 1992-06-16 |
Focus detecting apparatus jointly employing outputs of plural diverse detectors
Grant 5,055,665 - Baba , et al. October 8, 1 | 1991-10-08 |
Distance measuring system
Grant 5,000,572 - Nose , et al. March 19, 1 | 1991-03-19 |
Phase shift measuring apparatus utilizing optical meterodyne techniques
Grant 4,842,408 - Yoshii , et al. June 27, 1 | 1989-06-27 |
Image stabilizing device
Grant 4,788,596 - Kawakami , et al. November 29, 1 | 1988-11-29 |
Anti-vibration imaging device
Grant 4,780,739 - Kawakami , et al. October 25, 1 | 1988-10-25 |
Aberration measuring method
Grant 4,641,962 - Sueda , et al. February 10, 1 | 1987-02-10 |
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