Patent | Date |
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Exposure apparatus and method of manufacturing device Grant 9,383,660 - Yoshihara , et al. July 5, 2 | 2016-07-05 |
Exposure apparatus and device manufacturing method Grant 8,634,061 - Shigenobu , et al. January 21, 2 | 2014-01-21 |
Exposure Apparatus And Method Of Manufacturing Device App 20120293781 - YOSHIHARA; Toshiyuki ;   et al. | 2012-11-22 |
Exposure apparatus and method of manufacturing device Grant 8,102,503 - Yoshihara , et al. January 24, 2 | 2012-01-24 |
Exposure Apparatus And Device Manufacturing Method App 20100302524 - Shigenobu; Atsushi ;   et al. | 2010-12-02 |
Projection Exposure Apparatus, Method For Calibrating Measurement Criterion Of Displacement Measurement Unit, And Method For Manufacturing Device App 20100124724 - Hoshino; Tomohiro ;   et al. | 2010-05-20 |
Exposure Apparatus And Method Of Manufacturing Device App 20090103065 - Yoshihara; Toshiyuki ;   et al. | 2009-04-23 |
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method Grant 7,301,615 - Fukagawa , et al. November 27, 2 | 2007-11-27 |
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method Grant 7,230,692 - Fukagawa , et al. June 12, 2 | 2007-06-12 |
Optical Apparatus, Method Of Determining Position Of Optical Element In Optical System, And Device Manufacturing Method App 20070115458 - Fukagawa; Youzou ;   et al. | 2007-05-24 |
Aberration correcting optical system App 20060056038 - Yoshihara; Toshiyuki | 2006-03-16 |
Aberration correction optical system Grant 6,987,621 - Yoshihara January 17, 2 | 2006-01-17 |
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method App 20050206880 - Fukugawa, Youzou ;   et al. | 2005-09-22 |
Aberration correcting optical system Grant 6,924,937 - Yoshihara August 2, 2 | 2005-08-02 |
Aberration correction optical system App 20050030638 - Yoshihara, Toshiyuki | 2005-02-10 |
Aberration Correcting Optical System App 20020163738 - YOSHIHARA, TOSHIYUKI | 2002-11-07 |
Electrophotographic apparatus and process cartridge featuring an electrophotographic photosensitive member having a surface layer of lubricative fluorine-containing resin powder Grant 5,610,690 - Yoshihara , et al. March 11, 1 | 1997-03-11 |
Electrophotographic image forming method, apparatus and device unit Grant 5,538,826 - Ainoya , et al. July 23, 1 | 1996-07-23 |
Method of measuring the time for forming refractive index grating of a photo-nonlinear medium Grant 5,303,032 - Uesu , et al. April 12, 1 | 1994-04-12 |
Image forming apparatus Grant 5,157,442 - Tanigawa , et al. October 20, 1 | 1992-10-20 |
Electrophotographic charging device Grant 5,068,762 - Yoshihara November 26, 1 | 1991-11-26 |
Apparatus for preparing electrophotographic photosensitive members Grant 4,974,964 - Yoshihara , et al. December 4, 1 | 1990-12-04 |
Electrophotographic member with the surface layer having a fluorine type resin powder and a fluorine type block polymer Grant 4,863,823 - Hiro , et al. September 5, 1 | 1989-09-05 |
Electrophotographic member with surface layer having fluorine resin powder and fluorine graft polymer Grant 4,792,507 - Yoshihara , et al. December 20, 1 | 1988-12-20 |
Electrophotographic member with silicone graft copolymer in surface layer Grant 4,716,091 - Yoshihara , et al. December 29, 1 | 1987-12-29 |