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Patent applications and USPTO patent grants for Yoshihara; Naohiko.The latest application filed is for "substrate treatment apparatus".
Patent | Date |
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Substrate processing method and substrate processing apparatus Grant 11,152,204 - Nakai , et al. October 19, 2 | 2021-10-19 |
Substrate processing apparatus and substrate processing method Grant 11,139,180 - Yoshihara , et al. October 5, 2 | 2021-10-05 |
Substrate processing method Grant 10,964,526 - Okutani , et al. March 30, 2 | 2021-03-30 |
Substrate drying method and substrate processing apparatus Grant 10,921,057 - Okutani , et al. February 16, 2 | 2021-02-16 |
Substrate Treatment Apparatus App 20200398302 - ABE; Hiroshi ;   et al. | 2020-12-24 |
Substrate Processing Method And Substrate Processing Apparatus App 20200381246 - NAKAI; Hitoshi ;   et al. | 2020-12-03 |
Substrate processing apparatus and substrate processing method Grant 10,825,713 - Yoshihara , et al. November 3, 2 | 2020-11-03 |
Substrate drying method and substrate processing apparatus Grant 10,760,852 - Okutani , et al. Sep | 2020-09-01 |
Substrate Processing Method And Substrate Processing Apparatus App 20200243350 - OKUTANI; Manabu ;   et al. | 2020-07-30 |
Substrate processing method and substrate processing apparatus Grant 10,695,792 - Okutani , et al. | 2020-06-30 |
Substrate Processing Apparatus And Substrate Processing Method App 20200035514 - YOSHIHARA; Naohiko ;   et al. | 2020-01-30 |
Substrate processing method and substrate processing apparatus Grant 10,527,348 - Yoshihara , et al. J | 2020-01-07 |
Substrate processing apparatus and substrate processing method Grant 10,475,670 - Yoshihara , et al. Nov | 2019-11-12 |
Substrate Processing Method App 20190172703 - OKUTANI; Manabu ;   et al. | 2019-06-06 |
Substrate processing method Grant 10,249,487 - Okutani , et al. | 2019-04-02 |
Substrate Drying Method And Substrate Processing Apparatus App 20190063833 - OKUTANI; Manabu ;   et al. | 2019-02-28 |
Substrate Drying Method And Substrate Processing Apparatus App 20190063834 - OKUTANI; Manabu ;   et al. | 2019-02-28 |
Substrate Processing Apparatus And Substrate Processing Method App 20180308715 - YOSHIHARA; Naohiko ;   et al. | 2018-10-25 |
Substrate Treatment Apparatus App 20180272376 - ABE; Hiroshi ;   et al. | 2018-09-27 |
Substrate Processing Method And Substrate Processing Apparatus App 20180193886 - ABE; Hiroshi ;   et al. | 2018-07-12 |
Substrate Processing Method And Substrate Processing Apparatus App 20180087836 - YOSHIHARA; Naohiko ;   et al. | 2018-03-29 |
Substrate Processing Apparatus And Substrate Processing Method App 20170301580 - YOSHIHARA; Naohiko ;   et al. | 2017-10-19 |
Substrate Processing Method And Substrate Processing Apparatus App 20170282210 - OKUTANI; Manabu ;   et al. | 2017-10-05 |
Substrate processing apparatus and substrate processing method Grant 9,728,443 - Yoshihara , et al. August 8, 2 | 2017-08-08 |
Substrate processing method and substrate processing apparatus Grant 9,607,844 - Okuda , et al. March 28, 2 | 2017-03-28 |
Substrate Processing Method App 20160214148 - OKUTANI; Manabu ;   et al. | 2016-07-28 |
Substrate Processing Method And Substrate Processing Apparatus App 20160093516 - OKUDA; Jiro ;   et al. | 2016-03-31 |
Substrate Processing Apparatus And Substrate Processing Method App 20150270146 - YOSHIHARA; Naohiko ;   et al. | 2015-09-24 |
Substrate Processing Apparatus And Substrate Processing Method App 20150243542 - YOSHIHARA; Naohiko ;   et al. | 2015-08-27 |
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