Yoshihara; Kousuke

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yoshihara; Kousuke.The latest application filed is for "liquid processing device and liquid processing method".

Company Profile

11.108.113

Yoshihara; Kousuke - Kumamoto JP
Yoshihara; Kousuke - Koshi JP
Yoshihara; Kousuke - Koshi City Kumamoto
Yoshihara; Kousuke - Koshi-Shi JP
Yoshihara; Kousuke - Tokyo JP
Yoshihara; Kousuke - Koshi-Machi JP
Yoshihara; Kousuke - Kikuchi-gun JP
Yoshihara; Kousuke - Kumamoto-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Processing liquid supplying apparatus and processing liquid supplying method Grant 11,342,198 - Terashita , et al. May 24, 2	2022-05-24
Solution treatment apparatus and cleaning method for solution treatment apparatus Grant 11,235,350 - Shimmura , et al. February 1, 2	2022-02-01
Film forming method, storage medium, and film forming system Grant 11,141,758 - Yoshihara , et al. October 12, 2	2021-10-12
Liquid Processing Device And Liquid Processing Method App 20210008588 - Ide; Hiroyuki ; et al.	2021-01-14
Liquid processing apparatus, liquid processing method, and storage medium for liquid process Grant 10,734,251 - Takayanagi , et al.	2020-08-04
Processing Liquid Supplying Apparatus And Processing Liquid Supplying Method App 20200227286 - Terashita; Yuichi ; et al.	2020-07-16
Coating film forming method, coating film forming apparatus, and storage medium Grant 10,672,606 - Yoshihara , et al.	2020-06-02
Developing Treatment Method, Computer Storage Medium And Developing Treatment Apparatus App 20200064742 - KAI; Akiko ; et al.	2020-02-27
Substrate Processing Apparatus And Method Of Adjusting Substrate Processing Apparatus App 20200066559 - Shigetomi; Kenichi ; et al.	2020-02-27
Substrate processing apparatus and method of adjusting substrate processing apparatus Grant 10,504,757 - Shigetomi , et al. Dec	2019-12-10
Solution Treatment Apparatus And Cleaning Method For Solution Treatment Apparatus App 20190255561 - SHIMMURA; Satoshi ; et al.	2019-08-22
Developing apparatus, developing method and storage medium Grant 10,289,004 - Yoshihara , et al.	2019-05-14
Processing liquid supplying apparatus and method of supplying processing liquid Grant 10,268,116 - Yoshihara , et al.	2019-04-23
Cover plate for wind mark control in spin coating process Grant 10,262,880 - Bassett , et al.	2019-04-16
Film Forming Method, Storage Medium, And Film Forming System App 20180361428 - YOSHIHARA; Kentaro ; et al.	2018-12-20
Coating Film Forming Method, Coating Film Forming Apparatus, and Storage Medium App 20180350594 - YOSHIHARA; Kousuke ; et al.	2018-12-06
Developing method, developing apparatus and storage medium Grant 10,120,285 - Yoshihara , et al. November 6, 2	2018-11-06
Exposure apparatus, resist pattern forming method, and storage medium Grant 10,101,669 - Nagahara , et al. October 16, 2	2018-10-16
Processing liquid supplying apparatus and processing liquid supplying method Grant 10,074,546 - Terashita , et al. September 11, 2	2018-09-11
Coating film forming method, coating film forming apparatus, and storage medium Grant 10,068,763 - Yoshihara , et al. September 4, 2	2018-09-04
Coating method, computer storage medium and coating apparatus Grant 10,048,664 - Hasimoto , et al. August 14, 2	2018-08-14
Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus Grant 10,035,173 - Furusho , et al. July 31, 2	2018-07-31
Substrate treatment system Grant 10,025,190 - Nagahara , et al. July 17, 2	2018-07-17
Solution treatment apparatus and solution treatment method Grant 10,022,652 - Yoshihara , et al. July 17, 2	2018-07-17
Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control Grant 9,947,534 - Yoshihara , et al. April 17, 2	2018-04-17
Solution Treatment Apparatus And Solution Treatment Method App 20180093205 - Yoshihara; Kousuke ; et al.	2018-04-05
Processing Liquid Supplying Apparatus And Method Of Supplying Processing Liquid App 20180074407 - YOSHIHARA; Kousuke ; et al.	2018-03-15
Solution treatment apparatus and solution treatment method Grant 9,878,267 - Yoshihara , et al. January 30, 2	2018-01-30
Coating Treatment Method, Computer Storage Medium, And Coating Treatment Apparatus App 20180021804 - HASHIMOTO; Takafumi ; et al.	2018-01-25
Processing liquid supplying apparatus and method of supplying processing liquid Grant 9,846,363 - Yoshihara , et al. December 19, 2	2017-12-19
Liquid treatment apparatus and method and non-transitory storage medium Grant 9,817,323 - Yoshida , et al. November 14, 2	2017-11-14
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium Grant 9,805,958 - Ookouchi , et al. October 31, 2	2017-10-31
Solution Treatment Apparatus And Solution Treatment Method App 20170296944 - YOSHIHARA; Kousuke ; et al.	2017-10-19
Substrate Cleaning Apparatus, Substrate Cleaning Method And Non-transitory Storage Medium App 20170256427 - OOKOUCHI; Atsushi ; et al.	2017-09-07
Film forming method, computer storage medium, and film forming system Grant 9,741,559 - Shimura , et al. August 22, 2	2017-08-22
Solution treatment apparatus and solution treatment method Grant 9,731,226 - Yoshihara , et al. August 15, 2	2017-08-15
Processing-liquid supply apparatus and processing-liquid supply method Grant 9,732,910 - Takayanagi , et al. August 15, 2	2017-08-15
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium Grant 9,704,730 - Ookouchi , et al. July 11, 2	2017-07-11
Developing method, developing apparatus and storage medium Grant 9,690,202 - Terashita , et al. June 27, 2	2017-06-27
Substrate Processing Apparatus And Method Of Adjusting Substrate Processing Apparatus App 20170170040 - SHIGETOMI; Kenichi ; et al.	2017-06-15
Coating Film Forming Method, Coating Film Forming Apparatus, And Storage Medium App 20170140929 - YOSHIHARA; Kousuke ; et al.	2017-05-18
Substrate processing method, substrate processing apparatus and non-transitory storage medium Grant 9,627,232 - Tanaka , et al. April 18, 2	2017-04-18
Coating film forming apparatus, coating film forming method, and recording medium Grant 9,613,836 - Ichino , et al. April 4, 2	2017-04-04
Developing Method, Developing Apparatus And Storage Medium App 20170090291 - YOSHIHARA; Kousuke ; et al.	2017-03-30
Developing apparatus, developing method and storage medium Grant 9,575,411 - Yoshihara , et al. February 21, 2	2017-02-21
Developing Apparatus, Developing Method And Storage Medium App 20170045821 - YOSHIHARA; Kousuke ; et al.	2017-02-16
Developing method, developing apparatus and storage medium Grant 9,568,829 - Yoshihara , et al. February 14, 2	2017-02-14
Substrate Treatment System App 20170031245 - NAGAHARA; Seiji ; et al.	2017-02-02
Exposure Apparatus, Resist Pattern Forming Method, And Storage Medium App 20160327869 - NAGAHARA; Seiji ; et al.	2016-11-10
Coating Method, Computer Storage Medium And Coating Apparatus App 20160167079 - HASIMOTO; Takafumi ; et al.	2016-06-16
Liquid Treatment Apparatus And Method And Non-transitory Storage Medium App 20160161867 - YOSHIDA; Yuichi ; et al.	2016-06-09
Substrate cleaning method, substrate cleaning apparatus and storage medium for cleaning substrate Grant 9,307,653 - Yoshihara , et al. April 5, 2	2016-04-05
Liquid treatment apparatus and method and non-transitory storage medium Grant 9,293,320 - Yoshida , et al. March 22, 2	2016-03-22
Developing Method, Developing Apparatus And Storage Medium App 20160070171 - TERASHITA; Yuichi ; et al.	2016-03-10
Developing method for developing apparatus Grant 9,256,131 - Takeguchi , et al. February 9, 2	2016-02-09
Coating Treatment Method With Airflow Control, And Non-transitory Recording Medium Having Program Recorded Thereon For Executing Coating Treatment With Airflow Control App 20150371853 - YOSHIHARA; Kousuke ; et al.	2015-12-24
Liquid processing apparatus, liquid processing method and storage medium for liquid processing Grant 9,217,922 - Kubota , et al. December 22, 2	2015-12-22
Film Forming Method, Computer Storage Medium, And Film Forming System App 20150357188 - SHIMURA; Satoru ; et al.	2015-12-10
Coating and development treatment system with airflow control including control unit and movable airflow control plate Grant 9,162,247 - Yoshihara , et al. October 20, 2	2015-10-20
Liquid processing apparatus, liquid processing method, and storage medium Grant 9,165,797 - Yoshihara , et al. October 20, 2	2015-10-20
Chemical Supply System, Substrate Treatment Apparatus Incorporating The Same, And Coating And Developing System Incorporating The Same Apparatus App 20150279702 - FURUSHO; Toshinobu ; et al.	2015-10-01
Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus Grant 9,086,190 - Furusho , et al. July 21, 2	2015-07-21
Filter Device App 20150151227 - TAKAYANAGI; Koji ; et al.	2015-06-04
Processing Liquid Supplying Apparatus And Method Of Supplying Processing Liquid App 20150125793 - YOSHIHARA; Kousuke ; et al.	2015-05-07
Processing-liquid Supply Apparatus And Processing-liquid Supply Method App 20150090340 - Takayanagi; Koji ; et al.	2015-04-02
Processing Liquid Supplying Apparatus And Processing Liquid Supplying Method App 20150092167 - Terashita; Yuichi ; et al.	2015-04-02
Substrate cleaning method and substrate cleaning apparatus Grant 8,980,013 - Yoshihara , et al. March 17, 2	2015-03-17
Developing apparatus, developing method and storage medium Grant 8,956,694 - Takeguchi , et al. February 17, 2	2015-02-17
Developing Method, Developing Apparatus And Storage Medium App 20150036109 - YOSHIHARA; Kousuke ; et al.	2015-02-05
Developing Apparatus, Developing Method And Storage Medium App 20150036110 - YOSHIHARA; Kousuke ; et al.	2015-02-05
Coating treatment method, non-transitory computer storage medium and coating treatment apparatus Grant 8,940,649 - Yoshihara , et al. January 27, 2	2015-01-27
Coating Film Forming Apparatus, Coating Film Forming Method, And Recording Medium App 20150004311 - ICHINO; Katsunori ; et al.	2015-01-01
Solution Treatment Apparatus And Solution Treatment Method App 20150000517 - Yoshihara; Kousuke ; et al.	2015-01-01
Substrate Cleaning Apparatus, Substrate Cleaning Method And Non-transitory Storage Medium App 20140352737 - OOKOUCHI; Atsushi ; et al.	2014-12-04
Developing Method For Developing Apparatus App 20140347639 - TAKEGUCHI; Hirofumi ; et al.	2014-11-27
Developing method and developing apparatus Grant 8,865,396 - Takeguchi , et al. October 21, 2	2014-10-21
Substrate Processing Method, Substrate Processing Apparatus And Non-transitory Storage Medium App 20140299161 - TANAKA; Keiichi ; et al.	2014-10-09
Coating treatment method, coating treatment apparatus, and computer-readable storage medium Grant 8,851,011 - Yoshihara , et al. October 7, 2	2014-10-07
Cover Plate For Wind Mark Control In Spin Coating Process App 20140235070 - Bassett; Derek W. ; et al.	2014-08-21
Coating treatment method and coating treatment apparatus Grant 8,791,030 - Iwao , et al. July 29, 2	2014-07-29
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium For Liquid Process App 20140174475 - TAKAYANAGI; Koji ; et al.	2014-06-26
Coating treatment method, non-transitory computer storage medium and coating treatment apparatus Grant 8,691,336 - Yoshihara , et al. April 8, 2	2014-04-08
Developing method Grant 8,678,684 - Yamamoto , et al. March 25, 2	2014-03-25
Coating Treatment Method And Coating Treatment Apparatus App 20140038423 - IWAO; Fumiko ; et al.	2014-02-06
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium For Liquid Processing App 20140030423 - KUBOTA; Minoru ; et al.	2014-01-30
Liquid Treatment Apparatus And Method And Non-transitory Storage Medium App 20130280425 - YOSHIDA; Yuichi ; et al.	2013-10-24
Coating Treatment Method, Coating Treatment Apparatus, And Computer-readable Storage Medium App 20130239887 - Yoshihara; Kousuke ; et al.	2013-09-19
Coating and developing apparatus, coating and developing method and non-transitory tangible medium Grant 8,506,186 - Hayashi , et al. August 13, 2	2013-08-13
Resist coating apparatus Grant 8,505,479 - Yoshihara , et al. August 13, 2	2013-08-13
Developing Method App 20130194557 - YAMAMOTO; Taro ; et al.	2013-08-01
Coating treatment method Grant 8,496,991 - Yoshihara , et al. July 30, 2	2013-07-30
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20130189852 - Yoshihara; Kousuke ; et al.	2013-07-25
Substrate Cleaning Method, Substrate Cleaning Apparatus And Storage Medium For Cleaning Substrate App 20130174873 - Yoshihara; Kousuke ; et al.	2013-07-11
Coating and developing apparatus, coating and developing method and non-transitory tangible medium Grant 8,480,319 - Hayashi , et al. July 9, 2	2013-07-09
Developing device and developing method Grant 8,445,189 - Yamamoto , et al. May 21, 2	2013-05-21
Treatment Solution Supply Method, Non-transitory Computer Storage Medium And Treatment Solution Supply Apparatus App 20130112628 - Yoshihara; Kousuke ; et al.	2013-05-09
Coating treatment method, coating treatment apparatus, and computer-readable storage medium Grant 8,414,972 - Yoshihara , et al. April 9, 2	2013-04-09
Chemical Supply System, Substrate Treatment Apparatus Incorporating The Same, And Coating And Developing System Incorporating The Same Apparatus App 20130068324 - Furusho; Toshinobu ; et al.	2013-03-21
Developing apparatus, developing method, and storage medium Grant 8,398,319 - Arima , et al. March 19, 2	2013-03-19
Developing method Grant 8,393,808 - Yamamoto , et al. March 12, 2	2013-03-12
Protective film removing device, mixed chemical solution recovering method and program storage medium Grant 8,387,630 - Yamamoto , et al. March 5, 2	2013-03-05
Heat Treatment Apparatus And Heat Treatment Method App 20120328273 - KAWANO; Hisashi ; et al.	2012-12-27
Developing apparatus, developing method and storage medium Grant 8,337,104 - Takiguchi , et al. December 25, 2	2012-12-25
Developing apparatus, developing method and storage medium Grant 8,333,522 - Arima , et al. December 18, 2	2012-12-18
Coating treatment method, coating treatment apparatus, and computer-readable storage medium Grant 8,318,247 - Yoshihara , et al. November 27, 2	2012-11-27
Coating method Grant 8,304,018 - Takayanagi , et al. November 6, 2	2012-11-06
Coating Treatment Apparatus, Coating And Developing Treatment System, Coating Treatment Method, And Non-transitory Recording Medium Having Program Recorded Thereon For Executing Coating Treatment Method App 20120276753 - YOSHIHARA; Kousuke ; et al.	2012-11-01
Apparatus and method of forming an applied film Grant 8,287,954 - Yoshihara , et al. October 16, 2	2012-10-16
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20120234362 - Yoshihara; Kousuke ; et al.	2012-09-20
Coating and developing apparatus, developing method and non-transitory medium Grant 8,262,300 - Takiguchi , et al. September 11, 2	2012-09-11
Developing Method And Apparatus Using Organic-solvent Containing Developer App 20120218531 - Hontake; Kouichi ; et al.	2012-08-30
Resist coating method and resist coating apparatus Grant 8,225,738 - Yoshihara , et al. July 24, 2	2012-07-24
Substrate cleaning method and substrate cleaning apparatus Grant 8,216,389 - Yoshihara , et al. July 10, 2	2012-07-10
Substrate Cleaning Method, Substrate Cleaning Apparatus And Storage Medium For Substrate Cleaning App 20120111373 - ARIMA; Hiroshi ; et al.	2012-05-10
Rinsing method, developing method, developing system and computer-read storage medium Grant 8,147,153 - Takeguchi , et al. April 3, 2	2012-04-03
Coating And Developing Apparatus, Coating And Developing Method And Non-transitory Tangible Medium App 20120063765 - HAYASHI; Shinichi ; et al.	2012-03-15
Coating And Developing Apparatus, Coating And Developing Method And Non-transitory Tangible Medium App 20120057862 - HAYASHI; Shinichi ; et al.	2012-03-08
Coating Treatment Method App 20120034792 - YOSHIHARA; Kousuke ; et al.	2012-02-09
Developing method Grant 8,105,738 - Yoshihara January 31, 2	2012-01-31
Coating Treatment Method, Non-transitory Computer Storage Medium And Coating Treatment Apparatus App 20120021611 - Yoshihara; Kousuke ; et al.	2012-01-26
Coating Method And Coating Apparatus App 20110312190 - Ichino; Katsunori ; et al.	2011-12-22
Coating film processing method and apparatus Grant 8,069,816 - Yamamoto , et al. December 6, 2	2011-12-06
Developing Method App 20110269061 - YOSHIHARA; Kousuke	2011-11-03
Coating treatment method Grant 8,043,657 - Yoshihara , et al. October 25, 2	2011-10-25
Coating Treatment Method, Non-transitory Computer Storage Medium And Coating Treatment Apparatus App 20110250765 - YOSHIHARA; Kousuke ; et al.	2011-10-13
Rinse method and developing apparatus Grant 8,029,624 - Yoshihara , et al. October 4, 2	2011-10-04
Developing apparatus and developing method Grant 8,026,048 - Ookouchi , et al. September 27, 2	2011-09-27
Coating And Developing Apparatus, Developing Method And Non-transitory Medium App 20110200321 - Takiguchi; Yasushi ; et al.	2011-08-18
Developing Apparatus, Developing Method And Storage Medium App 20110200952 - Takiguchi; Yasushi ; et al.	2011-08-18
Developing Apparatus, Developing Method And Storage Medium App 20110200953 - ARIMA; Hiroshi ; et al.	2011-08-18
Resist Coating Method And Resist Coating Apparatus App 20110146572 - YOSHIHARA; Kousuke ; et al.	2011-06-23
Developing Device And Developing Method App 20110127236 - YAMAMOTO; Taro ; et al.	2011-06-02
Developing Apparatus, Developing Method And Storage Medium App 20110096304 - TAKEGUCHI; Hirofumi ; et al.	2011-04-28
Developing device and developing method Grant 7,918,182 - Yamamoto , et al. April 5, 2	2011-04-05
Resist coating method and resist coating apparatus Grant 7,906,173 - Yoshihara , et al. March 15, 2	2011-03-15
Substrate cleaning method and developing apparatus Grant 7,901,514 - Nakamura , et al. March 8, 2	2011-03-08
Developing method, developing apparatus and storage medium Grant 7,896,562 - Yamamoto , et al. March 1, 2	2011-03-01
Rinsing Method, Developing Method, Developing System And Computer-read Storage Medium App 20110045414 - TAKEGUCHI; Hirofumi ; et al.	2011-02-24
Apparatus And Method Of Forming An Applied Film App 20110008538 - Yoshihara; Kousuke ; et al.	2011-01-13
Resist Coating Apparatus App 20110005459 - YOSHIHARA; Kousuke ; et al.	2011-01-13
Developing Apparatus And Developing Method App 20100330508 - OOKOUCHI; Atsushi ; et al.	2010-12-30
Developing Apparatus And Method App 20100323307 - Yamamoto; Taro ; et al.	2010-12-23
Rinsing method, developing method, developing system and computer-read storage medium Grant 7,841,787 - Takeguchi , et al. November 30, 2	2010-11-30
Development device and development method Grant 7,823,534 - Ookouchi , et al. November 2, 2	2010-11-02
Resist coating method and resist coating apparatus Grant 7,820,243 - Yoshihara , et al. October 26, 2	2010-10-26
Developing apparatus and method Grant 7,806,076 - Yamamoto , et al. October 5, 2	2010-10-05
Apparatus and method of forming an applied film Grant 7,802,536 - Yoshihara , et al. September 28, 2	2010-09-28
Developing Apparatus, Developing Method, And Storage Medium App 20100233637 - ARIMA; Hiroshi ; et al.	2010-09-16
Substrate Treatment Apparatus, Substrate Treatment Method, Coating And Developing Apparatus, Coating And Developing Method, And Storage Medium App 20100233638 - YOSHIDA; Yuichi ; et al.	2010-09-16
Developing Method App 20100216078 - YAMAMOTO; Taro ; et al.	2010-08-26
Coating Method App 20100209607 - Takayanagi; Koji ; et al.	2010-08-19
Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program Grant 7,775,729 - Yoshihara August 17, 2	2010-08-17
Coating and developing method, coating and developing system and storage medium Grant 7,742,146 - Kyouda , et al. June 22, 2	2010-06-22
Substrate Coating Method And Substrate Coating Apparatus App 20100151126 - ISEKI; Tomohiro ; et al.	2010-06-17
Coating Treatment Method, Coating Treatment Apparatus, And Computer-readable Storage Medium App 20100112209 - Yoshihara; Kousuke ; et al.	2010-05-06
Developing Method And Developing Apparatus App 20090311632 - TAKEGUCHI; Hirofumi ; et al.	2009-12-17
Coating Treatment Method, Computer-readable Storage Medium, And Coating Treatment Apparatus App 20090291198 - Yoshihara; Kousuke ; et al.	2009-11-26
Substrate Cleaning Method And Developing Apparatus App 20090272407 - NAKAMURA; Junji ; et al.	2009-11-05
Substrate cleaning method and developing apparatus Grant 7,604,013 - Nakamura , et al. October 20, 2	2009-10-20
Heat processing apparatus and heat processing method Grant 7,601,933 - Yoshihara , et al. October 13, 2	2009-10-13
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20090250079 - YOSHIHARA; Kousuke ; et al.	2009-10-08
Resist Solution Supply Apparatus, Resist Solution Supply Method, And Computer Storage Medium App 20090246397 - Yoshihara; Kousuke ; et al.	2009-10-01
Method Of Treating Substrate And Computer Storage Medium App 20090181174 - YOSHIHARA; Kousuke ; et al.	2009-07-16
Development device and development method App 20090130614 - Ookouchi; Atsushi ; et al.	2009-05-21
Coating Treatment Method, Coating Treatment Apparatus, And Computer-readable Storage Medium App 20090087559 - Yoshihara; Kousuke ; et al.	2009-04-02
Developing Method, Developing Apparatus And Storage Medium App 20090035021 - YAMAMOTO; Taro ; et al.	2009-02-05
Coating Film Processing Method And Apparatus App 20080142043 - YAMAMOTO; Taro ; et al.	2008-06-19
Heat-treating apparatus and heat-treating method Grant 7,384,595 - Ooshima , et al. June 10, 2	2008-06-10
Coating Treatment Method App 20080069948 - YOSHIHARA; Kousuke ; et al.	2008-03-20
Developing Apparatus, Developing Processing Method, Developing Processing Program, And Computer Readable Recording Medium Recording The Program App 20070253709 - YOSHIHARA; Kousuke	2007-11-01
Resist coating method, resist coating apparatus and storage medium App 20070254099 - Yoshihara; Kousuke ; et al.	2007-11-01
Protective Film Removing Device, Mixed Chemical Solution Recovering Method And Program Storage Medium App 20070215178 - Yamamoto; Taro ; et al.	2007-09-20
Developing device and developing method App 20070184178 - Yamamoto; Taro ; et al.	2007-08-09
Coating And Developing Method, Coating And Developing System And Storage Medium App 20070184392 - Kyouda; Hideharu ; et al.	2007-08-09
Substrate Processing Apparatus And Substrate Processing Method App 20070127916 - Kitano; Junichi ; et al.	2007-06-07
Substrate Processing Apparatus And Substrate Processing Method App 20070128356 - Matsuyama; Yuji ; et al.	2007-06-07
Rinse method and developing apparatus App 20070119479 - Yoshihara; Kousuke ; et al.	2007-05-31
Rinsing Method, Developing Method, Developing System And Computer-read Storage Medium App 20070116459 - TAKEGUCHI; Hirofumi ; et al.	2007-05-24
Resist Coating Method And Resist Coating Apparatus App 20070092642 - YOSHIHARA; Kousuke ; et al.	2007-04-26
Resist Coating Method And Resist Coating Apparatus App 20070092643 - YOSHIHARA; Kousuke ; et al.	2007-04-26
Substrate processing apparatus and substrate processing method Grant 7,208,066 - Kitano , et al. April 24, 2	2007-04-24
Apparatus and method of forming an applied film App 20070071890 - Yoshihara; Kousuke ; et al.	2007-03-29
Heat processing apparatus and heat processing method App 20060193986 - Yoshihara; Kousuke ; et al.	2006-08-31
Substrate cleaning method and developing apparatus App 20060048792 - Nakamura; Junji ; et al.	2006-03-09
Developing apparatus and method App 20060040051 - Yamamoto; Taro ; et al.	2006-02-23
Method for developing processing and apparatus for supplying developing solution Grant 6,991,385 - Yoshihara , et al. January 31, 2	2006-01-31
Heat-treating apparatus and heat-treating method App 20050173396 - Ooshima, Kazuhiko ; et al.	2005-08-11
Coating film forming method and coating film forming apparatus App 20050126474 - Yoshihara, Kousuke ; et al.	2005-06-16
Coating film forming method and coating film forming apparatus Grant 6,869,640 - Yoshihara , et al. March 22, 2	2005-03-22
Method for developing processing and apparatus for supplying developing solution App 20050053874 - Yoshihara, Kousuke ; et al.	2005-03-10
Process liquid supply mechanism and process liquid supply method Grant 6,848,625 - Takekuma , et al. February 1, 2	2005-02-01
Method for developing processing and apparatus for supplying developing solution Grant 6,811,962 - Yoshihara , et al. November 2, 2	2004-11-02
Apparatus and method for development Grant 6,709,174 - Yamamoto , et al. March 23, 2	2004-03-23
Substrate processing apparatus and substrate processing method App 20040050321 - Kitano, Junichi ; et al.	2004-03-18
Substrate processing apparatus Grant 6,673,151 - Yoshihara , et al. January 6, 2	2004-01-06
Process liquid supply mechanism and process liquid supply method App 20030180471 - Takekuma, Takashi ; et al.	2003-09-25
Treatment solution supply apparatus and treatment solution supply method Grant 6,578,772 - Fujimoto , et al. June 17, 2	2003-06-17
Substrate processing apparatus App 20030101929 - Yoshihara, Kousuke ; et al.	2003-06-05
Apparatus and method for development App 20030077083 - Yamamoto, Taro ; et al.	2003-04-24
Method for developing processing and apparatus for supplying developing solution App 20030044731 - Yoshihara, Kousuke ; et al.	2003-03-06
Substrate processing apparatus Grant 6,527,860 - Yoshihara , et al. March 4, 2	2003-03-04
Coating film forming method and coating film forming apparatus App 20030008066 - Yoshihara, Kousuke ; et al.	2003-01-09
Treatment solution supply apparatus and treatment solution supply method App 20010025890 - Fujimoto, Akihiro ; et al.	2001-10-04
Substrate processing apparatus and substrate processing method App 20010013161 - Kitano, Junichi ; et al.	2001-08-16