loadpatents
Patent applications and USPTO patent grants for Yoshida; Fumika.The latest application filed is for "polarization purity control device and gas laser apparatus provided with the same".
Patent | Date |
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Polarization purity control device and gas laser apparatus provided with the same Grant 8,902,948 - Nagai , et al. December 2, 2 | 2014-12-02 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,891,574 - Nagai , et al. November 18, 2 | 2014-11-18 |
Gas discharge chamber Grant 8,855,167 - Nagai , et al. October 7, 2 | 2014-10-07 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20140050239 - NAGAI; Shinji ;   et al. | 2014-02-20 |
Extreme ultraviolet light source device Grant 8,610,095 - Yabu , et al. December 17, 2 | 2013-12-17 |
Gas Discharge Chamber App 20130322483 - NAGAI; Shinji ;   et al. | 2013-12-05 |
Gas discharge chamber Grant 8,503,499 - Nagai , et al. August 6, 2 | 2013-08-06 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20120177072 - NAGAI; Shinji ;   et al. | 2012-07-12 |
Polarization purity control device and gas laser apparatus provided with the same Grant 8,165,181 - Nagai , et al. April 24, 2 | 2012-04-24 |
Gas Discharge Chamber App 20110158281 - NAGAI; Shinji ;   et al. | 2011-06-30 |
Extreme Ultraviolet Light Source Device App 20100200776 - Yabu; Takayuki ;   et al. | 2010-08-12 |
Polarization Purity Control Device And Gas Laser Apparatus Provided With The Same App 20100128747 - NAGAI; Shinji ;   et al. | 2010-05-27 |
Casing for laser device, production method and cleaning method of the same Grant 6,627,843 - Itakura , et al. September 30, 2 | 2003-09-30 |
Casing for laser device, production method and cleaning method of the same App 20020041617 - Itakura, Yasuo ;   et al. | 2002-04-11 |
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