Yoshibayashi; Kazutoshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yoshibayashi; Kazutoshi.The latest application filed is for "heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device".
- Yoshibayashi; Kazutoshi - Kawasaki JP
- YOSHIBAYASHI; Kazutoshi - Kawasaki-shi JP
| Patent | Date |
|---|---|
| Heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device Grant 10,056,273 - Sasaki , et al. August 21, 2 | 2018-08-21 |
| Heating Apparatus, Substrate Heating Apparatus, And Method Of Manufacturing Semiconductor Device App 20180082865 - SASAKI; Masao ; et al. | 2018-03-22 |
| Vacuum Processing Apparatus App 20140230728 - Kajihara; Yuji ; et al. | 2014-08-21 |
| Vacuum processing apparatus and substrate transfer method Grant 8,202,034 - Sone , et al. June 19, 2 | 2012-06-19 |
| Vacuum Processing Apparatus And Substrate Transfer Method App 20110052349 - SONE; Hiroshi ; et al. | 2011-03-03 |
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