Yoon; Chang Ro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yoon; Chang Ro.The latest application filed is for "substrate supporting unit and single type substrate polishing apparatus using the same".
- Yoon; Chang Ro - Chungcheongnam-do KR
- Yoon; Chang-Ro - Gyeonggi-do KR
- Yoon; Chang-Ro - Osan-si KR
| Patent | Date |
|---|---|
| Apparatus and method for treating substrates Grant 8,398,812 - Kim , et al. March 19, 2 | 2013-03-19 |
| Substrate supporting unit and single type substrate polishing apparatus using the same Grant 8,113,918 - Koo , et al. February 14, 2 | 2012-02-14 |
| Substrate Supporting Unit And Single Type Substrate Polishing Apparatus Using The Same App 20090325469 - KOO; Gyo-Woog ; et al. | 2009-12-31 |
| Method and apparatus for cleaning and drying substrates Grant 7,637,272 - Cho , et al. December 29, 2 | 2009-12-29 |
| Apparatus and method for treating substrates App 20080047580 - Kim; Yi Jung ; et al. | 2008-02-28 |
| Method and apparatus for cleaning and drying substrates App 20060266386 - Cho; Jung-Keun ; et al. | 2006-11-30 |
| Wafer drying method Grant 6,784,106 - Bae , et al. August 31, 2 | 2004-08-31 |
| Wafer drying apparatus Grant 6,757,989 - Bae , et al. July 6, 2 | 2004-07-06 |
| Wafer drying apparatus App 20030121173 - Bae, Jeong Yong ; et al. | 2003-07-03 |
| Wafer drying method App 20030124878 - Bae, Jeong-Yong ; et al. | 2003-07-03 |
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