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Methods of forming conductive patterns and methods of manufacturing semiconductor devices using the same using an etchant composition that includes phosphoric acid, nitric acid, and an assistant oxidant
Grant 9,530,670 - Han , et al. December 27, 2 | 2016-12-27 |
Systems For Removing Photoresists And Methods Of Removing Photoresists Using The Same
App 20150355551 - KIM; Young-Ok ; et al. | 2015-12-10 |
Method Of Manufacturing Semiconductor Device
App 20150255302 - YOON; BYOUNG-MOON ; et al. | 2015-09-10 |
Methods Of Forming Conductive Patterns And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20150200112 - Han; Hoon ; et al. | 2015-07-16 |
Methods of manufacturing semiconductor devices
Grant 8,822,287 - Kim , et al. September 2, 2 | 2014-09-02 |
Non-volatile memory device having vertical structure and method of manufacturing the same
Grant 8,765,551 - Yang , et al. July 1, 2 | 2014-07-01 |
Multiple mold structure methods of manufacturing vertical memory devices
Grant 8,664,101 - Kim , et al. March 4, 2 | 2014-03-04 |
Non-volatile Memory Device Having Vertical Structure And Method Of Manufacturing The Same
App 20130171788 - YANG; Jun-youl ; et al. | 2013-07-04 |
Multiple Mold Structure Methods Of Manufacturing Vertical Memory Devices
App 20130065386 - Kim; Hyo-Jung ; et al. | 2013-03-14 |
Methods Of Manufacturing Semiconductor Devices
App 20120149185 - Kim; Hyo-Jung ; et al. | 2012-06-14 |
Etching methods and methods of manufacturing a CMOS image sensor using the same
Grant 8,168,509 - Ko , et al. May 1, 2 | 2012-05-01 |
Methods of manufacturing variable resistance non-volatile memory devices including a uniformly narrow contact layer
Grant 8,039,372 - Min , et al. October 18, 2 | 2011-10-18 |
Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus
Grant 8,033,401 - Lee , et al. October 11, 2 | 2011-10-11 |
Etching Methods And Methods Of Manufacturing A Cmos Image Sensor Using The Same
App 20110136290 - KO; Ki-Hyung ; et al. | 2011-06-09 |
Methods of forming patterns and capacitors for semiconductor devices using the same
Grant 7,781,346 - Park , et al. August 24, 2 | 2010-08-24 |
Method of forming phase change memory device
App 20100210068 - Lee; Won-jun ; et al. | 2010-08-19 |
Method Of Manufacturing Cmos Transistor
App 20100178754 - Yang; Jun-youl ; et al. | 2010-07-15 |
Method of manufacturing a semiconductor device having voids in a polysilicon layer
Grant 7,582,559 - Yeo , et al. September 1, 2 | 2009-09-01 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
Grant 7,579,284 - Yoon , et al. August 25, 2 | 2009-08-25 |
Wafer Guide For Preventing Wafer Breakage In Semiconductor Cleaning Apparatus
App 20090067960 - LEE; Hea-Woong ; et al. | 2009-03-12 |
Methods of forming non-volatile memory devices having floating gate electrodes
Grant 7,445,997 - Lee , et al. November 4, 2 | 2008-11-04 |
Methods Of Using Corrosion-inhibiting Cleaning Compositions For Metal Layers And Patterns On Semiconductor Substrates
App 20080214006 - Lee; Kwang-Wook ; et al. | 2008-09-04 |
Etching Method For Manufacturing Semiconductor Device
App 20080102595 - LEE; Won-Jun ; et al. | 2008-05-01 |
Etching method for manufacturing semiconductor device
Grant 7,338,610 - Lee , et al. March 4, 2 | 2008-03-04 |
Variable Resistance Non-volatile Memory Devices Including A Uniformly Narrow Contact Layer And Methods Of Manufacturing Same
App 20080029754 - Min; Chung-Ki ; et al. | 2008-02-07 |
Methods of forming patterns and capacitors for semiconductor devices using the same
App 20070059941 - Park; Cheol-Woo ; et al. | 2007-03-15 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
App 20070015372 - Yoon; Byoung-Moon ; et al. | 2007-01-18 |
Methods of processing semiconductor structures and methods of forming capacitors for semiconductor devices using the same
App 20060292817 - Park; Cheol-Woo ; et al. | 2006-12-28 |
Method of manufacturing a semiconductor device
Grant 7,151,043 - Kim , et al. December 19, 2 | 2006-12-19 |
Semiconductor device and method thereof
App 20060263971 - Lee; Kwang-Wook ; et al. | 2006-11-23 |
Organic stripping composition and method of etching oxide using the same
Grant 7,105,474 - Kim , et al. September 12, 2 | 2006-09-12 |
Apparatus and method for cleaning a semiconductor wafer
Grant 7,089,947 - Yeo , et al. August 15, 2 | 2006-08-15 |
Method of manufacturing a semiconductor device
App 20060088987 - Yeo; In-Joon ; et al. | 2006-04-27 |
Megasonic cleaning apparatus for fabricating semiconductor device
Grant 7,017,597 - Yoon , et al. March 28, 2 | 2006-03-28 |
Method of manufacturing a semiconductor device
App 20050266647 - Kim, Tae-hyun ; et al. | 2005-12-01 |
Methods of forming non-volatile memory devices having floating gate electrodes
App 20050255654 - Lee, Won-Jun ; et al. | 2005-11-17 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same
Grant 6,946,431 - Yeo , et al. September 20, 2 | 2005-09-20 |
Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
App 20050176604 - Lee, Kwang-Wook ; et al. | 2005-08-11 |
Method of manufacturing void-free shallow trench isolation layer
App 20050079682 - Lee, Mi-Jin ; et al. | 2005-04-14 |
Etching method for manufacturing semiconductor device
App 20050064674 - Lee, Won-Jun ; et al. | 2005-03-24 |
Method of cleaning a substrate and an apparatus thereof
App 20050028842 - Kim, Tae-Hyun ; et al. | 2005-02-10 |
Method of fabricating shallow trench isolation structure and microelectronic device having the structure
App 20050023634 - Yoon, Byoung-Moon ; et al. | 2005-02-03 |
Etching method for manufacturing semiconductor device
App 20050026452 - Lee, Won-Jun ; et al. | 2005-02-03 |
Wafer cleaning system
Grant 6,843,257 - Yeo , et al. January 18, 2 | 2005-01-18 |
Method for forming a silicide film of a semiconductor device
Grant 6,831,012 - Kang , et al. December 14, 2 | 2004-12-14 |
Etching compositions for silicon germanium and etching methods using the same
App 20040242015 - Kim, Kyoung-Chul ; et al. | 2004-12-02 |
Spin chuck for wafer or LCD processing
App 20040231711 - Park, Cheol-woo ; et al. | 2004-11-25 |
Semiconductor device having a metal silicide layer and method for manufacturing the same
App 20040198007 - Song, Wong-Sang ; et al. | 2004-10-07 |
Semiconductor device having a metal silicide layer and method for manufacturing the same
Grant 6,740,587 - Song , et al. May 25, 2 | 2004-05-25 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integratedd circuit devices using the same
App 20040097389 - Yeo, In-Joon ; et al. | 2004-05-20 |
Organic stripping composition and method of etching oxide using the same
App 20040038839 - Kim, Tae-Hyun ; et al. | 2004-02-26 |
Apparatus for cleaning a semiconductor substrate by vibrating cleaning solution supplied onto the substrate
App 20040025911 - Yeo, In-Ju ; et al. | 2004-02-12 |
Method for forming a silicide film of a semiconductor device
App 20040029378 - Kang, Dae-Keun ; et al. | 2004-02-12 |
Wafer cleaning system
App 20030200986 - Yeo, In-Jun ; et al. | 2003-10-30 |
Apparatus and method for cleaning a semiconductor wafer
App 20030192571 - Yeo, In-Jun ; et al. | 2003-10-16 |
Megasonic cleaning apparatus for fabricating semiconductor device
App 20030178049 - Yoon, Byoung-moon ; et al. | 2003-09-25 |
Methods and compositions for removal of anti-reflective layers using fluorine containing compounds, oxidants, and water
App 20030160208 - Yeo, In-Jun ; et al. | 2003-08-28 |
Method for manufacturing a semiconductor device
App 20020090784 - Yoon, Byoung-Moon | 2002-07-11 |
Method for self-aligned shallow trench isolation and method of manufacturing non-volatile memory device using the same
App 20020072197 - Kang, Man-Sug ; et al. | 2002-06-13 |
Methods and compositions for removal of anti-reflective layers using fluorine containing compounds, oxidants, and water
App 20020042207 - Yeo, In-jun ; et al. | 2002-04-11 |
Semiconductor device having a metal silicide layer and method for manufacturing the same
App 20020036353 - Song, Won-Sang ; et al. | 2002-03-28 |
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