Yoo, Ming-Hwa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yoo, Ming-Hwa.The latest application filed is for "novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (fsg) film".
- Yoo, Ming-Hwa - Yung Hu City TW
- Yoo; Ming-Hwa - Hsiu-Chu TW
- Yoo; Ming-Hwa - Ilan TW
- Yoo; Ming-Hwa - Yung hu TW
- Yoo; Ming-Hwa - Shin-Chu TW
- Yoo; Ming-Hwa - I-Lan TW
| Patent | Date |
|---|---|
| Novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (FSG) film App 20050009367 - Cheng, Yi-Lung ; et al. | 2005-01-13 |
| Method to solve particle performance of FSG layer by using UFU season film for FSG process Grant 6,815,072 - Yoo , et al. November 9, 2 | 2004-11-09 |
| Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film Grant 6,815,007 - Yoo , et al. November 9, 2 | 2004-11-09 |
| Method of forming in-situ SRO HDP-CVD barrier film Grant 6,759,347 - Cheng , et al. July 6, 2 | 2004-07-06 |
| Method to neutralize charge imbalance following a wafer cleaning process Grant 6,703,317 - Cheng , et al. March 9, 2 | 2004-03-09 |
| Method for removing residual fluorine in HDP-CVD chamber Grant 6,602,560 - Cheng , et al. August 5, 2 | 2003-08-05 |
| Method for reducing contaminants in a CVD chamber App 20030068448 - Cheng, Yi-Lung ; et al. | 2003-04-10 |
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