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Substrate processing apparatus Grant 11,361,984 - Shin , et al. June 14, 2 | 2022-06-14 |
Substrate Processing Apparatus App 20200335387 - SHIN; Seung Chul ;   et al. | 2020-10-22 |
Semiconductor device and method of manufacturing the same Grant 10,797,051 - Kim , et al. October 6, 2 | 2020-10-06 |
Substrate Processing Apparatus and Rotating Electrical Connector for Vacuum App 20200126836 - YOON; Ho Bin ;   et al. | 2020-04-23 |
Semiconductor Device And Method Of Manufacturing The Same App 20200119009 - KIM; YOONJAE ;   et al. | 2020-04-16 |
Semiconductor device and method of manufacturing the same Grant 10,553,582 - Kim , et al. Fe | 2020-02-04 |
Gas Sprayer For Substrate Treatment Device, And Substrate App 20190333743 - YOON; Ho Bin ;   et al. | 2019-10-31 |
Substrate processing method Grant 10,373,821 - Shin , et al. | 2019-08-06 |
Motor frame Grant 10,291,094 - Park , et al. | 2019-05-14 |
Substrate Processing Apparatus App 20190035607 - KIM; Se Young ;   et al. | 2019-01-31 |
Substrate Treatment Device And Substrate Treatment Method App 20180269078 - CHEON; Min Ho ;   et al. | 2018-09-20 |
Semiconductor devices utilizing capping layers with multiple widths and methods of manufacturing the same Grant 10,043,879 - Kim , et al. August 7, 2 | 2018-08-07 |
Semiconductor device Grant 9,899,404 - Yoo , et al. February 20, 2 | 2018-02-20 |
Substrate Processing Method App 20170345647 - SHIN; Seung Chul ;   et al. | 2017-11-30 |
Semiconductor Device And Method Of Manufacturing The Same App 20170317079 - KIM; YOONJAE ;   et al. | 2017-11-02 |
Motor Frame App 20170179785 - Park; Yun Bum ;   et al. | 2017-06-22 |
Semiconductor Device App 20160111431 - Yoo; Jin-Hyuk ;   et al. | 2016-04-21 |
Semiconductor device Grant 9,214,409 - Yoo , et al. December 15, 2 | 2015-12-15 |
Semiconductor Device App 20130320486 - YOO; Jin-Hyuk ;   et al. | 2013-12-05 |
Hybrid Solar Cell and Method for Manufacturing the Same App 20120255601 - Yoo; Jin Hyuk | 2012-10-11 |
Hybrid Solar Cell and Method for Manufacturing the Same App 20120204943 - Yoo; Jin Hyuk | 2012-08-16 |
Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same Grant 8,039,406 - Han , et al. October 18, 2 | 2011-10-18 |
Methods of fabricating a semiconductor device Grant 8,017,485 - Cho , et al. September 13, 2 | 2011-09-13 |
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same Grant 7,866,341 - Kim , et al. January 11, 2 | 2011-01-11 |
Vacuum Pumping System, Driving Method Thereof, Apparatus Having The Same, And Method Of Transferring Substrate Using The Same App 20100215513 - KIM; Hong-Seub ;   et al. | 2010-08-26 |
Methods of fabricating a semiconductor device App 20100099248 - Cho; Du-Hyun ;   et al. | 2010-04-22 |
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same Grant 7,695,231 - Kim , et al. April 13, 2 | 2010-04-13 |
Method Of Gap-filling Using Amplitude Modulation Radiofrequency Power And Apparatus For The Same App 20100031886 - Han; Jeong Hoon ;   et al. | 2010-02-11 |
Method of gap-filling using amplitude modulation radio frequency power Grant 7,605,084 - Han , et al. October 20, 2 | 2009-10-20 |
Method Of Gap-filling Using Amplitude Modulation Radiofrequency Power And Apparatus For The Same App 20070264791 - Han; Jeong Hoon ;   et al. | 2007-11-15 |
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same App 20050196254 - Kim, Hong-Seub ;   et al. | 2005-09-08 |
Apparatus having high gas conductance App 20040237894 - Han, Jung-Hun ;   et al. | 2004-12-02 |