Yonemitsu, Shuji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yonemitsu, Shuji.The latest application filed is for "substrate processing apparatus and a method for fabricating a semiconductor device by using same".
- Yonemitsu, Shuji - Tokyo JP
| Patent | Date |
|---|---|
| Substrate processing apparatus and a method for fabricating a semiconductor device by using same App 20020197145 - Yamamoto, Tetsuo ; et al. | 2002-12-26 |
| Substrate transferring mechanism Grant 6,143,083 - Yonemitsu , et al. November 7, 2 | 2000-11-07 |
| Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section Grant 6,066,210 - Yonemitsu , et al. May 23, 2 | 2000-05-23 |
| Substrate processing apparatus Grant 5,788,447 - Yonemitsu , et al. August 4, 1 | 1998-08-04 |
| Thermal treatment furnace in a system for manufacturing semiconductors Grant 5,632,820 - Taniyama , et al. May 27, 1 | 1997-05-27 |
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