Yoneda; Ikuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yoneda; Ikuo.The latest application filed is for "imprint apparatus, imprint method, and article manufacturing method".

Company Profile

2.52.49

Yoneda; Ikuo - Mie-ken JP
Yoneda; Ikuo - Yokkaichi JP
Yoneda; Ikuo - Yokohama JP
YONEDA; Ikuo - Yokohama-shi JP
Yoneda; Ikuo - Kanagawa-ken JP
Yoneda; Ikuo - Kanagawa N/A JP
Yoneda; Ikuo - Tokyo JP
Yoneda; Ikuo - Kawasaki JP
Yoneda, Ikuo - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imprint apparatus, imprint method, and article manufacturing method Grant 11,333,969 - Yamashita , et al. May 17, 2	2022-05-17
Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method Grant 11,282,723 - Tamura , et al. March 22, 2	2022-03-22
Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device Grant RE48,815 - Inanami , et al. November 9, 2	2021-11-09
Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20190101824 - Yamashita; Keiji ; et al.	2019-04-04
Imprint apparatus and imprint method Grant 10,241,397 - Takakuwa , et al.	2019-03-26
Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device Grant 10,192,741 - Nishimura , et al. Ja	2019-01-29
Imprint apparatus, imprint method, and article manufacturing method Grant 10,168,615 - Yamashita , et al. J	2019-01-01
Imprint pattern forming method Grant RE47,093 - Tokue , et al. October 23, 2	2018-10-23
Pattern forming method Grant 10,018,908 - Shida , et al. July 10, 2	2018-07-10
Pattern forming method and pattern forming apparatus Grant 9,944,014 - Yoneda April 17, 2	2018-04-17
Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device Grant 9,793,120 - Nishimura , et al. October 17, 2	2017-10-17
Pattern forming method Grant 9,588,418 - Shida , et al. March 7, 2	2017-03-07
Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method Grant 9,550,322 - Shida , et al. January 24, 2	2017-01-24
Device Substrate, Method Of Manufacturing Device Substrate, And Method Of Manufacturing Semiconductor Device App 20160372333 - NISHIMURA; Takahito ; et al.	2016-12-22
Pattern Forming Method And Pattern Forming Apparatus App 20160318234 - YONEDA; Ikuo	2016-11-03
Pattern forming method and pattern forming apparatus Grant 9,403,316 - Yoneda August 2, 2	2016-08-02
Pattern forming method Grant 9,381,540 - Koshiba , et al. July 5, 2	2016-07-05
Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon Grant 9,377,777 - Nakagawa , et al. June 28, 2	2016-06-28
Imprint Apparatus And Imprint Method App 20160009020 - Takakuwa; Manabu ; et al.	2016-01-14
Near-field Exposure Mask, Resist Pattern Forming Method, Device Manufacturing Method, Near-field Exposure Method, Pattern Forming Method, Near-field Optical Lithography Member, And Near-field Nanoimprint Method App 20150246478 - Shida; Naomi ; et al.	2015-09-03
Pattern Forming Method App 20150224536 - KOSHIBA; Takeshi ; et al.	2015-08-13
Near-field Exposure Mask And Pattern Forming Method App 20150168825 - Shida; Naomi ; et al.	2015-06-18
Pattern forming method Grant 9,046,763 - Koshiba , et al. June 2, 2	2015-06-02
Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method Grant 9,029,047 - Shida , et al. May 12, 2	2015-05-12
Imprint method and imprint apparatus Grant 8,973,494 - Hatano , et al. March 10, 2	2015-03-10
Pattern transfer method Grant 8,946,080 - Yoneda February 3, 2	2015-02-03
Near-field exposure mask and pattern forming method Grant 8,945,798 - Shida , et al. February 3, 2	2015-02-03
Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20150014877 - YAMASHITA; Keiji ; et al.	2015-01-15
Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20150014876 - Yamashita; Keiji ; et al.	2015-01-15
Pattern Forming Method And Pattern Forming Apparatus App 20140300018 - Yoneda; Ikuo	2014-10-09
Fine Processing Method, Fine Processing Apparatus, And Recording Medium With Fine Processing Program Recorded Thereon App 20140200704 - NAKAGAWA; Yasutada ; et al.	2014-07-17
Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon Grant 8,691,123 - Nakagawa , et al. April 8, 2	2014-04-08
Mold And Mold Blank Substrate App 20140072668 - YONEDA; Ikuo ; et al.	2014-03-13
Near-field Exposure Mask And Pattern Forming Method App 20130260290 - Shida; Naomi ; et al.	2013-10-03
Pattern Formation Apparatus, Pattern Formation Method And A Method For Producing Semiconductor Devices App 20130221581 - YONEDA; Ikuo	2013-08-29
Droplet dispensing control method, droplet dispensing control device, and method of manufacturing semiconductor devices Grant 8,485,624 - Mikami , et al. July 16, 2	2013-07-16
Imprint method and template for imprinting Grant 8,480,946 - Mikami , et al. July 9, 2	2013-07-09
Method of designing a template pattern, method of manufacturing a template and method of manufacturing a semiconductor device Grant 8,468,480 - Inanami , et al. June 18, 2	2013-06-18
Imprint pattern forming method Grant 8,444,889 - Tokue , et al. May 21, 2	2013-05-21
Imprint method Grant 8,419,995 - Yoneda , et al. April 16, 2	2013-04-16
Pattern Transfer Method App 20120295435 - Yoneda; Ikuo	2012-11-22
Semiconductor device fabrication method and pattern formation mold Grant 8,282,868 - Yoneda , et al. October 9, 2	2012-10-09
Near-field Exposure Mask, Resist Pattern Forming Method, Device Manufacturing Method, Near-field Exposure Method, Pattern Forming Method, Near-field Optical Lithography Member, And Near-field Nanoimprint Method App 20120228804 - Shida; Naomi ; et al.	2012-09-13
Method Of Manufacturing Organic Thin Film Solar Cell App 20120214272 - Azuma; Tsukasa ; et al.	2012-08-23
Template inspection method and manufacturing method for semiconductor device Grant 8,227,267 - Yoneda , et al. July 24, 2	2012-07-24
Patterning method Grant 8,221,827 - Tokue , et al. July 17, 2	2012-07-17
Method And Device For Forming Pattern App 20120164346 - Yoneda; Ikuo ; et al.	2012-06-28
Method for forming pattern and method for manufacturing semiconductor device Grant 8,206,895 - Yoneda , et al. June 26, 2	2012-06-26
Imprint method Grant 8,202,463 - Yoneda , et al. June 19, 2	2012-06-19
Fine Processing Method, Fine Processing Apparatus, And Recording Medium With Fine Processing Program Recorded Thereon App 20120074605 - NAKAGAWA; Yasutada ; et al.	2012-03-29
Droplet Dispensing Control Method, Droplet Dispensing Control Device, And Method Of Manufacturing Semiconductor Devices App 20120075368 - MIKAMI; Shinji ; et al.	2012-03-29
Template And Method Of Manufacturing The Same, And Semiconductor Device Manufacturing Method Using The Template App 20110237086 - YONEDA; Ikuo	2011-09-29
Imprint system and imprint method Grant 8,019,462 - Yoneda , et al. September 13, 2	2011-09-13
Imprint Method And Imprint Apparatus App 20110192300 - Hatano; Masayuki ; et al.	2011-08-11
Imprint system and imprint method App 20110066273 - Yoneda; Ikuo ; et al.	2011-03-17
Semiconductor device fabrication method and pattern formation mold App 20110065254 - Yoneda; Ikuo ; et al.	2011-03-17
Semiconductor device fabrication method and pattern formation mold Grant 7,854,604 - Yoneda , et al. December 21, 2	2010-12-21
Imprint system and imprint method Grant 7,856,288 - Yoneda , et al. December 21, 2	2010-12-21
Template, Method Of Manufacturing The Same, And Method Of Forming Pattern App 20100264113 - YONEDA; Ikuo ; et al.	2010-10-21
Imprint Pattern Forming Method App 20100244326 - Tokue; Hiroshi ; et al.	2010-09-30
Method Of Designing A Template Pattern, Method Of Manufacturing A Template And Method Of Manufacturing A Semiconductor Device App 20100237540 - INANAMI; Ryoichi ; et al.	2010-09-23
Pattern Forming Method App 20100237045 - KOSHIBA; Takeshi ; et al.	2010-09-23
Pattern Formation Method And Computer Program Product App 20100124601 - OTA; Takumi ; et al.	2010-05-20
Imprint Method App 20100078860 - Yoneda; Ikuo ; et al.	2010-04-01
Template Inspection Method And Manufacturing Method For Semiconductor Device App 20100075443 - YONEDA; Ikuo ; et al.	2010-03-25
Patterning Method App 20100072647 - TOKUE; Hiroshi ; et al.	2010-03-25
Method For Forming Pattern And Method For Manufacturing Semiconductor Device App 20100021848 - Yoneda; Ikuo ; et al.	2010-01-28
Method For Forming Pattern, And Template App 20100022036 - YONEDA; Ikuo ; et al.	2010-01-28
Template And Pattern Forming Method App 20090315223 - Yoneda; Ikuo ; et al.	2009-12-24
Imprint Method App 20090267267 - Yoneda; Ikuo ; et al.	2009-10-29
Imprint System And Imprint Method App 20090267268 - YONEDA; Ikuo ; et al.	2009-10-29
Imprint Method And Template For Imprinting App 20090224436 - MIKAMI; Shinji ; et al.	2009-09-10
Microfabrication Apparatus And Device Manufacturing Method App 20090095711 - Koshiba; Takeshi ; et al.	2009-04-16
Pattern Forming Method And Pattern Forming Apparatus App 20090045539 - YONEDA; Ikuo	2009-02-19
Semiconductor Device Fabrication Method And Pattern Formation Mold App 20080214010 - YONEDA; Ikuo ; et al.	2008-09-04
Developing method, substrate treating method, and substrate treating apparatus Grant 7,390,365 - Itoh , et al. June 24, 2	2008-06-24
Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method Grant 7,368,735 - Yoneda May 6, 2	2008-05-06
Pattern Forming Template And Pattern Forming Method App 20080090170 - YONEDA; Ikuo	2008-04-17
Developing method, substrate treating method, and substrate treating apparatus Grant 7,094,522 - Itoh , et al. August 22, 2	2006-08-22
Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method App 20060118734 - Yoneda; Ikuo	2006-06-08
Developing method, substrate treating method, and substrate treating apparatus Grant 7,001,086 - Itoh , et al. February 21, 2	2006-02-21
Developing method, substrate treating method, and substrate treating apparatus Grant 6,929,903 - Itoh , et al. August 16, 2	2005-08-16
Developing method, substrate treating method, and substrate treating apparatus App 20050106511 - Itoh, Masamitsu ; et al.	2005-05-19
Developing method, substrate treating method, and substrate treating apparartus App 20050081996 - Itoh, Masamitsu ; et al.	2005-04-21
Developing method, substrate treating method, and substrate treating apparatus App 20050079639 - Itoh, Masamitsu ; et al.	2005-04-14
Developing method, substrate treating method, and substrate treating apparatus App 20040106072 - Itoh, Masamitsu ; et al.	2004-06-03
Plasma etching method and plasma etching apparatus Grant 6,165,907 - Yoneda , et al. December 26, 2	2000-12-26
Exposure mask and method of manufacturing thereof, and pattern data generating method for an exposure mask Grant 6,159,642 - Kawano , et al. December 12, 2	2000-12-12
Plasma processing apparatus and plasma processing method Grant 5,792,376 - Kanai , et al. August 11, 1	1998-08-11

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