Yokoshima; Shigenobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yokoshima; Shigenobu.The latest application filed is for "plasma processing apparatus and method".
- Yokoshima; Shigenobu - Tochigi JP
- Yokoshima, Shigenobu - Saitama JP
- Yokoshima; Shigenobu - Ohta-ku JP
- YOKOSHIMA, SHIGENOBU - TOCHIGI-KEN JP
| Patent | Date |
|---|---|
| Microwave applicator, plasma processing apparatus having same, and plasma processing method Grant 6,870,123 - Suzuki , et al. March 22, 2 | 2005-03-22 |
| Plasma processing apparatus and method App 20050029954 - Yokoshima, Shigenobu ; et al. | 2005-02-10 |
| Plasma processing apparatus having circular waveguide, and plasma processing method Grant 6,652,709 - Suzuki , et al. November 25, 2 | 2003-11-25 |
| Method Of Processing Residue Of Ion Implanted Photoresist, And Method Of Producing Semiconductor Device App 20020090827 - YOKOSHIMA, SHIGENOBU | 2002-07-11 |
| Microwave applicator, plasma processing apparatus having the same, and plasma processing method App 20010054605 - Suzuki, Nobumasa ; et al. | 2001-12-27 |
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