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Patent applications and USPTO patent grants for Yokohara; Hiroyuki.The latest application filed is for "film forming apparatus and film forming method".
Patent | Date |
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Stage device and processing apparatus Grant 11,417,504 - Nakagawasai , et al. August 16, 2 | 2022-08-16 |
Film Forming Apparatus And Film Forming Method App 20220098717 - IMAKITA; Kenichi ;   et al. | 2022-03-31 |
PVD processing method and PVD processing apparatus Grant 11,193,200 - Maeda , et al. December 7, 2 | 2021-12-07 |
Film Forming Apparatus App 20200381226 - IMAKITA; Kenichi ;   et al. | 2020-12-03 |
Temperature Measuring Mechanism, Temperature Measuring Method, And Stage Device App 20200303223 - Nakagawasai; Manabu ;   et al. | 2020-09-24 |
Stage Device And Processing Apparatus App 20200135434 - NAKAGAWASAI; Manabu ;   et al. | 2020-04-30 |
Pvd Processing Method And Pvd Processing Apparatus App 20190169737 - Maeda; Koji ;   et al. | 2019-06-06 |
Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member Grant 10,254,693 - Yokohara , et al. | 2019-04-09 |
Mounting table structure and plasma film forming apparatus Grant 9,324,600 - Fujisato , et al. April 26, 2 | 2016-04-26 |
Fixing Unit Of Plate-shaped Member, Pvd Processing Apparatus And Fixing Method Of Plate-shaped Member App 20150370204 - YOKOHARA; Hiroyuki ;   et al. | 2015-12-24 |
Mounting Table Structure And Plasma Film Forming Apparatus App 20130001076 - Fujisato; Toshiaki ;   et al. | 2013-01-03 |
Film Forming Method, Resputtering Method, And Film Forming Apparatus App 20120247949 - SAKUMA; Takashi ;   et al. | 2012-10-04 |
Phase synchronization circuit Grant 5,148,334 - Takeuchi , et al. September 15, 1 | 1992-09-15 |
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