Yokogawa, Ken?apos;etsu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yokogawa, Ken?apos;etsu.The latest application filed is for "dry etching method".
- Yokogawa, Ken?apos;etsu - Tsurugashima-shi JP
| Patent | Date |
|---|---|
| Dry etching method App 20040058554 - Izawa, Masaru ; et al. | 2004-03-25 |
| Dry Etching Apparatus And A Method Of Manufacturing A Semiconductor Device App 20020084034 - KOFUJI, NAOYUKI ; et al. | 2002-07-04 |
| Plasma Processing Apparatus And A Plasma Processing Method App 20020040766 - TAKAHASHI, KAZUE ; et al. | 2002-04-11 |
| Plasma Processing System And Method App 20020020494 - YOKOGAWA, KEN?apos;ETSU ; et al. | 2002-02-21 |
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