loadpatents
Patent applications and USPTO patent grants for Yokhin; Boris.The latest application filed is for "x-ray inspection of bumps on a semiconductor substrate".
Patent | Date |
---|---|
X-ray inspection of bumps on a semiconductor substrate Grant 9,390,984 - Mazor , et al. July 12, 2 | 2016-07-12 |
High-resolution X-ray diffraction measurement with enhanced sensitivity Grant 8,731,138 - Yokhin , et al. May 20, 2 | 2014-05-20 |
Fast measurement of X-ray diffraction from tilted layers Grant 8,437,450 - Wall , et al. May 7, 2 | 2013-05-07 |
X-ray inspection of bumps on a semiconductor substrate App 20130089178 - Mazor; Isaac ;   et al. | 2013-04-11 |
High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity App 20120281814 - Yokhin; Boris ;   et al. | 2012-11-08 |
High-resolution X-ray diffraction measurement with enhanced sensitivity Grant 8,243,878 - Yokhin , et al. August 14, 2 | 2012-08-14 |
Fast Measurement Of X-ray Diffraction From Tilted Layers App 20120140889 - Wall; John ;   et al. | 2012-06-07 |
High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity App 20110164730 - Yokhin; Boris ;   et al. | 2011-07-07 |
Accurate measurement of layer dimensions using XRF Grant 7,804,934 - Agnihotri , et al. September 28, 2 | 2010-09-28 |
X-ray measurement of properties of nano-particles Grant 7,680,243 - Yokhin , et al. March 16, 2 | 2010-03-16 |
Inspection of small features using X-ray fluorescence Grant 7,653,174 - Mazor , et al. January 26, 2 | 2010-01-26 |
Automated selection of X-ray reflectometry measurement locations Grant 7,649,978 - Mazor , et al. January 19, 2 | 2010-01-19 |
Target alignment for X-ray scattering measurements Grant 7,600,916 - Yokhin , et al. October 13, 2 | 2009-10-13 |
Multifunction X-ray analysis system Grant 7,551,719 - Yokhin , et al. June 23, 2 | 2009-06-23 |
Automated selection of x-ray reflectometry measurement locations App 20090074141 - Mazor; Isaac ;   et al. | 2009-03-19 |
Accurate Measurement Of Layer Dimensions Using Xrf App 20090074137 - Agnihotri; Dileep ;   et al. | 2009-03-19 |
X-ray measurement of properties of nano-particles App 20090067573 - Yokhin; Boris ;   et al. | 2009-03-12 |
Overlay metrology using X-rays Grant 7,481,579 - Yokhin , et al. January 27, 2 | 2009-01-27 |
Measurement of properties of thin films on sidewalls Grant 7,483,513 - Mazor , et al. January 27, 2 | 2009-01-27 |
Calibration of X-ray reflectometry system Grant 7,474,732 - Berman , et al. January 6, 2 | 2009-01-06 |
Inspection of small features using X-Ray fluorescence App 20080159475 - Mazor; Isaac ;   et al. | 2008-07-03 |
Multi-detector EDXRD Grant 7,321,652 - Yokhin , et al. January 22, 2 | 2008-01-22 |
Target alignment for x-ray scattering measurements App 20070286344 - Yokhin; Boris ;   et al. | 2007-12-13 |
Automated selection of X-ray reflectometry measurement locations App 20070274447 - Mazor; Isaac ;   et al. | 2007-11-29 |
Overlay metrology using X-rays App 20070224518 - Yokhin; Boris ;   et al. | 2007-09-27 |
Detection of dishing and tilting using X-ray fluorescence Grant 7,245,695 - Mazor , et al. July 17, 2 | 2007-07-17 |
Efficient measurement of diffuse X-ray reflections Grant 7,231,016 - Berman , et al. June 12, 2 | 2007-06-12 |
Multi-detector Edxrd App 20070058779 - YOKHIN; Boris ;   et al. | 2007-03-15 |
Measurement of properties of thin films on sidewalls App 20060274886 - Mazor; Isaac ;   et al. | 2006-12-07 |
Detection of dishing and tilting using x-ray fluorescence App 20060227931 - Mazor; Isaac ;   et al. | 2006-10-12 |
Combined X-ray reflectometer and diffractometer Grant 7,120,228 - Yokhin , et al. October 10, 2 | 2006-10-10 |
Enhancing resolution of X-ray measurements by sample motion Grant 7,113,566 - Peled , et al. September 26, 2 | 2006-09-26 |
Measurement of critical dimensions using X-ray diffraction in reflection mode Grant 7,110,491 - Mazor , et al. September 19, 2 | 2006-09-19 |
Material analysis using multiple X-ray reflectometry models Grant 7,103,142 - Agnihotri , et al. September 5, 2 | 2006-09-05 |
Material Analysis Using Multiple X-ray Reflectometry Models App 20060188062 - Agnihotri; Dileep ;   et al. | 2006-08-24 |
Efficient measurement of diffuse X-ray reflections App 20060182220 - Berman; David ;   et al. | 2006-08-17 |
X-ray apparatus with dual monochromators Grant 7,076,024 - Yokhin July 11, 2 | 2006-07-11 |
Enhancement of X-ray reflectometry by measurement of diffuse reflections Grant 7,068,753 - Berman , et al. June 27, 2 | 2006-06-27 |
Measurement of critical dimensions using X-ray diffraction in reflection mode App 20060133570 - Mazor; Isaac ;   et al. | 2006-06-22 |
Calibration of X-ray reflectometry system App 20060115046 - Berman; David ;   et al. | 2006-06-01 |
X-ray Apparatus With Dual Monochromators App 20060115047 - Yokhin; Boris | 2006-06-01 |
X-ray scattering with a polychromatic source Grant 7,035,375 - Yokhin April 25, 2 | 2006-04-25 |
Multifunction X-ray analysis system App 20060062351 - Yokhin; Boris ;   et al. | 2006-03-23 |
Combined X-ray reflectometer and diffractometer App 20060062350 - Yokhin; Boris ;   et al. | 2006-03-23 |
Enhancement of X-ray reflectometry by measurement of diffuse reflections App 20060023836 - Berman; David ;   et al. | 2006-02-02 |
Beam centering and angle calibration for X-ray reflectometry Grant 6,947,520 - Yokhin , et al. September 20, 2 | 2005-09-20 |
Dual-wavelength x-ray monochromator Grant 6,907,108 - Yokhin , et al. June 14, 2 | 2005-06-14 |
X-ray reflectometry with small-angle scattering measurement Grant 6,895,075 - Yokhin , et al. May 17, 2 | 2005-05-17 |
XRR detector readout processing Grant 6,895,071 - Yokhin , et al. May 17, 2 | 2005-05-17 |
X-ray scattering with a polychromatic source App 20050094766 - Yokhin, Boris | 2005-05-05 |
X-ray reflectometry with small-angle scattering measurement App 20040156474 - Yokhin, Boris ;   et al. | 2004-08-12 |
Dual-wavelength x-ray monochromator App 20040151278 - Yokhin, Boris ;   et al. | 2004-08-05 |
Beam centering and angle calibration for X-ray reflectometry App 20040109531 - Yokhin, Boris ;   et al. | 2004-06-10 |
X-ray reflectometer App 20040028186 - Yokhin, Boris ;   et al. | 2004-02-12 |
Dual-wavelength X-ray reflectometry Grant 6,680,996 - Yokhin , et al. January 20, 2 | 2004-01-20 |
X-ray reflectometer Grant 6,639,968 - Yokhin , et al. October 28, 2 | 2003-10-28 |
Dual-wavelength X-ray reflectometry App 20030156682 - Yokhin, Boris ;   et al. | 2003-08-21 |
Measurement of critical dimensions using X-rays Grant 6,556,652 - Mazor , et al. April 29, 2 | 2003-04-29 |
X-ray reflectometer App 20030072413 - Yokhin, Boris ;   et al. | 2003-04-17 |
Pulsed X-ray reflectometer Grant 6,535,575 - Yokhin March 18, 2 | 2003-03-18 |
X-ray reflectometer Grant 6,512,814 - Yokhin , et al. January 28, 2 | 2003-01-28 |
Wafer With Overlay Test Pattern App 20030002620 - Mazor, Isaac ;   et al. | 2003-01-02 |
X-ray reflectometer App 20020150208 - Yokhin, Boris ;   et al. | 2002-10-17 |
Pulsed X-ray reflectometer App 20020150209 - Yokhin, Boris | 2002-10-17 |
Differential measurement of X-ray microfluorescence Grant 6,453,002 - Mazor , et al. September 17, 2 | 2002-09-17 |
X-ray microanalyzer for thin films Grant 6,381,303 - Vu , et al. April 30, 2 | 2002-04-30 |
X-ray Array Detector App 20020001365 - MAZOR, ISAAC ;   et al. | 2002-01-03 |
X-ray microfluorescence analyzer Grant 6,108,398 - Mazor , et al. August 22, 2 | 2000-08-22 |
X-ray fluorescence analyzer Grant 6,041,095 - Yokhin March 21, 2 | 2000-03-21 |
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