Patent | Date |
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Loaded Resonators For Adjusting Frequency Response Of Acoustic Wave Resonators App 20220216852 - Makkonen; Tapani ;   et al. | 2022-07-07 |
Lateral bulk acoustic wave filter Grant 11,381,220 - Makkonen , et al. July 5, 2 | 2022-07-05 |
Loaded resonators for adjusting frequency response of acoustic wave resonators Grant 11,290,083 - Makkonen , et al. March 29, 2 | 2022-03-29 |
Suppressing parasitic sidebands in lateral bulk acoustic wave resonators Grant 11,223,341 - Makkonen , et al. January 11, 2 | 2022-01-11 |
Two-stage Lateral Bulk Acoustic Wave Filter App 20210408996 - Ylilammi; Markku ;   et al. | 2021-12-30 |
Loaded Series Resonators For Adjusting Frequency Response Of Acoustic Wave Resonators App 20210359659 - Makkonen; Tapani ;   et al. | 2021-11-18 |
Particle sensor App 20210247288 - Koppinen; Panu ;   et al. | 2021-08-12 |
Loaded series resonators for adjusting frequency response of acoustic wave resonators Grant 11,088,670 - Makkonen , et al. August 10, 2 | 2021-08-10 |
Two-stage lateral bulk acoustic wave filter Grant 11,057,013 - Ylilammi , et al. July 6, 2 | 2021-07-06 |
Particle sensor App 20210148803 - Koppinen; Panu ;   et al. | 2021-05-20 |
Trapping and releasing particles carried by gas sample App 20210116332 - Koppinen; Panu ;   et al. | 2021-04-22 |
Suppressing Parasitic Sidebands In Lateral Bulk Acoustic Wave Resonators App 20210119600 - Makkonen; Tapani ;   et al. | 2021-04-22 |
Loaded Series Resonators For Adjusting Frequency Response Of Acoustic Wave Resonators App 20210075392 - Makkonen; Tapani ;   et al. | 2021-03-11 |
Loaded Resonators For Adjusting Frequency Response Of Acoustic Wave Resonators App 20210075401 - Makkonen; Tapani ;   et al. | 2021-03-11 |
Lateral Bulk Acoustic Wave Filter App 20210036677 - Makkonen; Tapani ;   et al. | 2021-02-04 |
Loaded resonators for adjusting frequency response of acoustic wave resonators Grant 10,790,801 - Makkonen , et al. September 29, 2 | 2020-09-29 |
Lateral bulk acoustic wave filter Grant 10,756,696 - Makkonen , et al. A | 2020-08-25 |
Two-stage Lateral Bulk Acoustic Wave Filter App 20200244245 - Ylilammi; Markku ;   et al. | 2020-07-30 |
Two-stage lateral bulk acoustic wave filter Grant 10,630,256 - Ylilammi , et al. | 2020-04-21 |
Lateral Bulk Acoustic Wave Filter App 20200083863 - Makkonen; Tapani ;   et al. | 2020-03-12 |
Loaded Resonators For Adjusting Frequency Response Of Acoustic Wave Resonators App 20200083862 - Makkonen; Tapani ;   et al. | 2020-03-12 |
Two-stage Lateral Bulk Acoustic Wave Filter App 20200083860 - Ylilammi; Markku ;   et al. | 2020-03-12 |
Method of manufacturing laterally coupled BAW thin films Grant 8,925,163 - Meltaus , et al. January 6, 2 | 2015-01-06 |
Method of manufacturing laterally coupled BAW thin films App 20120086523 - Meltaus; Johanna ;   et al. | 2012-04-12 |
Resonator structure and a filter comprising such a resonator structure Grant 6,812,619 - Kaitila , et al. November 2, 2 | 2004-11-02 |
Resonator structure having a dampening material and a filter having such a resonator structure Grant 6,788,170 - Kaitila , et al. September 7, 2 | 2004-09-07 |
Method for producing a piezoelectric thin film and a bulk acoustic wave resonator fabricated according to the method App 20020134669 - Molarius, Jyrki ;   et al. | 2002-09-26 |