YIN; Wensheng

Patent Applications and Registrations

Patent applications and USPTO patent grants for YIN; Wensheng.The latest application filed is for "high-resolution phase detection method and system based on plane grating laser interferometer".

Company Profile

2.28.29

YIN; Wensheng - Beijing CN
Yin; Wensheng - Haidian District Beijing CN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
High-resolution Phase Detection Method And System Based On Plane Grating Laser Interferometer App 20220196383 - ZHU; Yu ; et al.	2022-06-23
Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system Grant 11,022,423 - Zhu , et al. June 1, 2	2021-06-01
A Method For Calibrating An Error Of Installation Of An Interferometer In A Multi-axis Laser Displacement Measurement System App 20210033383 - ZHU; Yu ; et al.	2021-02-04
Coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,904,183 - Zhu , et al. February 27, 2	2018-02-27
Three-DOF heterodyne grating interferometer displacement measurement system Grant 9,903,704 - Zhu , et al. February 27, 2	2018-02-27
Dual-frequency grating interferometer displacement measurement system Grant 9,885,556 - Zhu , et al. February 6, 2	2018-02-06
Heterodyne grating interferometer displacement measurement system Grant 9,879,979 - Zhang , et al. January 30, 2	2018-01-30
Optical grating phase modulator for laser interference photoetching system Grant 9,869,857 - Zhu , et al. January 16, 2	2018-01-16
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,791,789 - Zhang , et al. October 17, 2	2017-10-17
Planar motor rotor displacement measuring device and its measuring method Grant 9,766,054 - Hu , et al. September 19, 2	2017-09-19
Negative stiffness system for gravity compensation of micropositioner Grant 9,752,643 - Zhu , et al. September 5, 2	2017-09-05
Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170115580 - ZHU; Yu ; et al.	2017-04-27
Magnetically Suspended Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170052461 - ZHANG; Ming ; et al.	2017-02-23
Two-dimensional locating method of motion platform based on magnetic steel array Grant 9,455,650 - Hu , et al. September 27, 2	2016-09-27
Three-dof Heterodyne Grating Interferometer Displacement Measurement System App 20160153764 - ZHU; Yu ; et al.	2016-06-02
Two-dof Heterodyne Grating Interferometer Displacement Measurement System App 20160138903 - ZHANG; Ming ; et al.	2016-05-19
Single degree of freedom vibration isolating device of linear motor and motion control method thereof Grant 9,310,797 - Yang , et al. April 12, 2	2016-04-12
Method for measuring displacement of planar motor rotor Grant 9,310,782 - Zhu , et al. April 12, 2	2016-04-12
Negative Stiffness System For Gravity Compensation Of Micropositioner App 20150369331 - ZHU; Yu ; et al.	2015-12-24
Optical Grating Phase Modulator For Laser Interference Photoetching System App 20150362723 - Zhu; Yu ; et al.	2015-12-17
Heterodyne Grating Interferometer Displacement Measurement System App 20150338205 - ZHANG; Ming ; et al.	2015-11-26
Maglev Workpiece Table With Six Degrees Of Freedom App 20150326150 - ZHU; Yu ; et al.	2015-11-12
Method for measuring displacement of large-range moving platform Grant 9,182,217 - Zhang , et al. November 10, 2	2015-11-10
Wafer Stage Having Function of Anti-Collision App 20150311099 - Zhu; Yu ; et al.	2015-10-29
Dual-frequency Grating Interferometer Displacement Measurement System App 20150268031 - Zhu; Yu ; et al.	2015-09-24
Dual wafer stage exchanging system for lithographic device Grant 9,030,648 - Zhu , et al. May 12, 2	2015-05-12
Method For Measuring Displacement Of Planar Motor Rotor App 20150097508 - Zhu; Yu ; et al.	2015-04-09
Method For Measuring Displacement Of Large-range Moving Platform App 20150085302 - Zhang; Ming ; et al.	2015-03-26
Single Degree Of Freedom Vibration Isolating Device Of Linear Motor And Motion Control Method Thereof App 20150077032 - Yang; Kaiming ; et al.	2015-03-19
Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space Grant 8,958,078 - Zhang , et al. February 17, 2	2015-02-17
Planar Motor Rotor Displacement Measuring Device And Its Measuring Method App 20150012242 - Hu; Jinchun ; et al.	2015-01-08
Dual-stage exchange system for lithographic apparatus Grant 8,860,927 - Zhu , et al. October 14, 2	2014-10-14
Dual-stage exchange system for lithographic apparatus Grant 8,836,918 - Zhu , et al. September 16, 2	2014-09-16
Two-dimensional, Position-sensitive Sensor-based System For Positioning Object Having Six Degrees Of Freedom In Space App 20140160495 - Zhang; Ming ; et al.	2014-06-12
Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof Grant 8,599,361 - Zhu , et al. December 3, 2	2013-12-03
Nanometer-precision Six-degree-of-freedom Magnetic Suspension Micro-motion Table And Application Thereof App 20130038853 - Zhu; Yu ; et al.	2013-02-14
Two-dimensional Locating Method Of Motion Platform Based On Magnetic Steel Array App 20130024157 - Hu; Jinchun ; et al.	2013-01-24
Dual-stage switching system for lithographic machine Grant 8,284,380 - Zhu , et al. October 9, 2	2012-10-09
Dual Wafer Stage Exchanging System For Lithographic Device App 20120127448 - Zhu; Yu ; et al.	2012-05-24
Dual-stage Exchange System For Lithographic Apparatus App 20120099094 - Zhu; Yu ; et al.	2012-04-26
Dual-stage Exchange System For Lithographic Apparatus App 20120099095 - Zhu; Yu ; et al.	2012-04-26
Micro stage with 6 degrees of freedom Grant 8,084,897 - Zhu , et al. December 27, 2	2011-12-27
Dual-stage Switching System For Lithographic Machine App 20100208227 - Zhu; Yu ; et al.	2010-08-19
Micro Stage With 6 Degrees Of Freedom App 20100187917 - Zhu; Yu ; et al.	2010-07-29
Synchronous permanent magnet planar motor Grant 7,339,289 - Wang , et al. March 4, 2	2008-03-04
Scanning mechanism of an ion implanter Grant 7,259,380 - Wang , et al. August 21, 2	2007-08-21
Synchronous permanent magnet planar motor App 20060049699 - Wang; Jinsong ; et al.	2006-03-09
Scanning mechanism of an ion implanter App 20050285052 - Wang, Jinsong ; et al.	2005-12-29

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