loadpatents
Patent applications and USPTO patent grants for Yin; Heyun.The latest application filed is for "sputter etch material selectivity".
Patent | Date |
---|---|
Sputter Etch Material Selectivity App 20180174843 - Anglin; Kevin ;   et al. | 2018-06-21 |
Sputter etch material selectivity Grant 10,002,764 - Anglin , et al. June 19, 2 | 2018-06-19 |
Technique for processing a substrate having a non-planar surface Grant 8,679,960 - Papasouliotis , et al. March 25, 2 | 2014-03-25 |
Method for processing a substrate having a non-planar substrate surface Grant 8,507,372 - Papasouliotis , et al. August 13, 2 | 2013-08-13 |
Method For Processing A Substrate Having A Non-planar Substrate Surface App 20120295430 - Papasouliotis; George D. ;   et al. | 2012-11-22 |
Method of processing a substrate having a non-planar surface Grant 8,202,792 - Papasouliotis , et al. June 19, 2 | 2012-06-19 |
Technique for Processing a Substrate Having a Non-Planar Surface App 20110086501 - Papasouliotis; George D. ;   et al. | 2011-04-14 |
Implantation of multiple species to address copper reliability Grant 7,863,194 - Yin , et al. January 4, 2 | 2011-01-04 |
Method Of Processing A Substrate Having A Non-planar Surface App 20100273322 - Papasouliotis; George D. ;   et al. | 2010-10-28 |
Implantation Of Multiple Species To Address Copper Reliability App 20100240201 - YIN; Heyun ;   et al. | 2010-09-23 |
Implantation of multiple species to address copper reliability Grant 7,737,013 - Yin , et al. June 15, 2 | 2010-06-15 |
Doped Layers for Reducing Electromigration App 20100048018 - Gupta; Atul ;   et al. | 2010-02-25 |
Implantation Of Multiple Species To Address Copper Reliability App 20090117735 - YIN; Heyun ;   et al. | 2009-05-07 |
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