| Patent | Date |
|---|
Lithography process window enhancement for photoresist patterning
Grant 11,429,026 - Dai , et al. August 30, 2 | 2022-08-30 |
Methods For Graphene Formation
App 20220172948 - Zhou; Jie ; et al. | 2022-06-02 |
Substrate vacuum transport and storage apparatus
Grant 11,302,549 - Thirunavukarasu , et al. April 12, 2 | 2022-04-12 |
Methods for graphene formation using microwave surface-wave plasma on dielectric materials
Grant 11,289,331 - Zhou , et al. March 29, 2 | 2022-03-29 |
Film Structure For Electric Field Assisted Bake Process
App 20220091513 - BANGAR; Mangesh Ashok ; et al. | 2022-03-24 |
Vertical transistor fabrication for memory applications
Grant 11,264,460 - Kumar , et al. March 1, 2 | 2022-03-01 |
Methods For Depositing Dielectric Material
App 20210384040 - CITLA; Bhargav S. ; et al. | 2021-12-09 |
Methods for etching a structure for MRAM applications
Grant 11,145,808 - Kim , et al. October 12, 2 | 2021-10-12 |
Additive Patterning Of Semiconductor Film Stacks
App 20210305501 - DUKOVIC; John O. ; et al. | 2021-09-30 |
Lithography Process Window Enhancement For Photoresist Patterning
App 20210294216 - Dai; Huixiong ; et al. | 2021-09-23 |
Photoresist Patterning Process
App 20210294215 - DAI; Huixiong ; et al. | 2021-09-23 |
Method for depositing and reflow of a high quality etch resistant gapfill dielectric film
Grant 11,114,333 - Nemani , et al. September 7, 2 | 2021-09-07 |
Methods for depositing dielectric material
Grant 11,114,306 - Citla , et al. September 7, 2 | 2021-09-07 |
High Pressure Annealing Process For Metal Containing Materials
App 20210257221 - SINGH; Kaushal K. ; et al. | 2021-08-19 |
Magnetic Memory And Method Of Fabrication
App 20210234091 - Kim; Jong Mun ; et al. | 2021-07-29 |
Methods And Apparatus For Carbon Compound Film Deposition
App 20210217585 - LIANG; Qiwei ; et al. | 2021-07-15 |
Additive patterning of semiconductor film stacks
Grant 11,049,537 - Dukovic , et al. June 29, 2 | 2021-06-29 |
Silicon Carbonitride Gapfill With Tunable Carbon Content
App 20210189555 - Shek; Mei-Yee ; et al. | 2021-06-24 |
Methods for etching a structure for MRAM Applications
App 20210143323 - KIM; Jong Mun ; et al. | 2021-05-13 |
High pressure annealing process for metal containing materials
Grant 10,998,200 - Singh , et al. May 4, 2 | 2021-05-04 |
Lithography Simulation And Optical Proximity Correction
App 20210088896 - DAI; Huixiong ; et al. | 2021-03-25 |
Process Control Of Electric Field Guided Photoresist Baking Process
App 20210041785 - DAI; Huixiong ; et al. | 2021-02-11 |
Formation of crystalline, layered transition metal dichalcogenides
Grant 10,916,426 - Wong , et al. February 9, 2 | 2021-02-09 |
Additive Patterning Of Semiconductor Film Stacks
App 20210035619 - DUKOVIC; John O. ; et al. | 2021-02-04 |
Vertical Transistor Fabrication For Memory Applications
App 20210028282 - KUMAR; Arvind ; et al. | 2021-01-28 |
High pressure treatment of silicon nitride film
Grant 10,847,360 - Wong , et al. November 24, 2 | 2020-11-24 |
Gas Delivery System For High Pressure Processing Chamber
App 20200350183 - LIANG; Qiwei ; et al. | 2020-11-05 |
Directional treatment for multi-dimensional device processing
Grant 10,825,665 - Godet , et al. November 3, 2 | 2020-11-03 |
Silicon nitride films with high nitrogen content
Grant 10,811,250 - Basu , et al. October 20, 2 | 2020-10-20 |
Film Structure For Electric Field Guided Photoresist Patterning Process
App 20200233307 - DAI; Huixiong ; et al. | 2020-07-23 |
Gas delivery system for high pressure processing chamber
Grant 10,720,341 - Liang , et al. | 2020-07-21 |
Method to fabricate thermally stable low K-FinFET spacer
Grant 10,714,331 - Balseanu , et al. | 2020-07-14 |
Cluster processing system for forming a transition metal material
App 20200161176 - WONG; Keith Tatseun ; et al. | 2020-05-21 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient
Grant 10,636,704 - Mebarki , et al. | 2020-04-28 |
Tungsten defluorination by high pressure treatment
Grant 10,622,214 - Wong , et al. | 2020-04-14 |
Methods For Graphene Formation
App 20200105525 - Zhou; Jie ; et al. | 2020-04-02 |
Tungsten Defluorination By High Pressure Treatment
App 20200098574 - WONG; Keith Tatseun ; et al. | 2020-03-26 |
Methods For Depositing Dielectric Material
App 20200090946 - CITLA; Bhargav S. ; et al. | 2020-03-19 |
Gas control in process chamber
Grant 10,590,530 - Liang , et al. | 2020-03-17 |
Selective deposition of metal silicides
Grant 10,586,707 - Hung , et al. | 2020-03-10 |
Method to improve film quality for PVD carbon with reactive gas and bias power
Grant 10,570,506 - Citla , et al. Feb | 2020-02-25 |
Method to improve film stability
Grant 10,566,188 - Clemons , et al. Feb | 2020-02-18 |
Multi-cassette carrying case
Grant 10,566,226 - Thirunavukarasu , et al. Feb | 2020-02-18 |
Formation Of Crystalline, Layered Transition Metal Dichalcogenides
App 20190362971 - WONG; Keith Tatseun ; et al. | 2019-11-28 |
Methods Of Patterning A Wafer Substrate
App 20190362965 - WONG; Keith Tatseun ; et al. | 2019-11-28 |
Method To Improve Film Stability
App 20190355579 - CLEMONS; Maximillian ; et al. | 2019-11-21 |
Multi-cassette Carrying Case
App 20190326147 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
Substrate Transfer Chamber
App 20190326146 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
Method To Fabricate Thermally Stable Low K-finfet Spacer
App 20190311896 - BALSEANU; Mihaela ; et al. | 2019-10-10 |
Hybrid laser and implant treatment for overlay error correction
Grant 10,429,747 - Bangar , et al. O | 2019-10-01 |
High Pressure Annealing Process For Metal Containing Materials
App 20190279879 - SINGH; Kaushal K. ; et al. | 2019-09-12 |
Method For Depositing And Reflow Of A High Quality Etch Resistant Gapfill Dielectric Film
App 20190259625 - NEMANI; Srinivas D. ; et al. | 2019-08-22 |
Method For Processing A Mask Substrate To Enable Better Film Quality
App 20190258153 - NEMANI; Srinivas D. ; et al. | 2019-08-22 |
Substrate transfer chamber
Grant 10,347,516 - Thirunavukarasu , et al. July 9, 2 | 2019-07-09 |
Gas Control In Process Chamber
App 20190194805 - LIANG; Qiwei ; et al. | 2019-06-27 |
Low-temperature atomic layer deposition of boron nitride and BN structures
Grant 10,297,441 - Wolf , et al. | 2019-05-21 |
Gas Delivery System For High Pressure Processing Chamber
App 20190148178 - LIANG; Qiwei ; et al. | 2019-05-16 |
Methods for fabricating nanowire for semiconductor applications
Grant 10,269,571 - Wong , et al. | 2019-04-23 |
Selective Deposition Of Metal Silicides
App 20190103278 - HUNG; Raymond ; et al. | 2019-04-04 |
Gas control in process chamber
Grant 10,240,232 - Liang , et al. | 2019-03-26 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient
App 20190051557 - MEBARKI; Bencherki ; et al. | 2019-02-14 |
Methods For Fabricating Nanowire For Semiconductor Applications
App 20190019681 - WONG; Keith Tatseun ; et al. | 2019-01-17 |
Silicon Nitride Films With High Nitrogen Content
App 20190013197 - Basu; Atashi ; et al. | 2019-01-10 |
Methods and apparatus for transferring a substrate
Grant 10,153,187 - Thirunavukarasu , et al. Dec | 2018-12-11 |
Tungsten Defluorination By High Pressure Treatment
App 20180342396 - Wong; Keith Tatseun ; et al. | 2018-11-29 |
High Pressure Treatment Of Silicon Nitride Film
App 20180342384 - Wong; Keith Tatseun ; et al. | 2018-11-29 |
Methods for forming fin structures with desired profile for 3D structure semiconductor applications
Grant 10,128,337 - Zhou , et al. November 13, 2 | 2018-11-13 |
Gapfill film modification for advanced CMP and recess flow
Grant 10,096,512 - Chen , et al. October 9, 2 | 2018-10-09 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient
Grant 10,049,927 - Mebarki , et al. August 14, 2 | 2018-08-14 |
Method To Improve Film Quality For Pvd Carbon With Reactive Gas And Bias Power
App 20180209037 - CITLA; Bhargav ; et al. | 2018-07-26 |
Hybrid Laser And Implant Treatment For Overlay Error Correction
App 20180136569 - BANGAR; Mangesh ; et al. | 2018-05-17 |
Stress Balanced Electrostatic Substrate Carrier With Contacts
App 20180122679 - Roy; Shambhu N. ; et al. | 2018-05-03 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,911,594 - Nemani , et al. March 6, 2 | 2018-03-06 |
Processed Wafer As Top Plate Of A Workpiece Carrier In Semiconductor And Mechanical Processing
App 20180025931 - Nemani; Srinivas D. ; et al. | 2018-01-25 |
Silicide phase control by confinement
Grant 9,865,466 - Mebarki , et al. January 9, 2 | 2018-01-09 |
Single platform, multiple cycle spacer deposition and etch
Grant 9,852,916 - Chen , et al. December 26, 2 | 2017-12-26 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient
App 20170358490 - MEBARKI; Bencherki ; et al. | 2017-12-14 |
Methods For Forming Fin Structures With Desired Profile For 3d Structure Semiconductor Applications
App 20170352726 - ZHOU; Jie ; et al. | 2017-12-07 |
Roll to roll wafer backside particle and contamination removal
Grant 9,815,091 - Ngai , et al. November 14, 2 | 2017-11-14 |
Integrated Metrology And Process Tool To Enable Local Stress/overlay Correction
App 20170287752 - GODET; Ludovic ; et al. | 2017-10-05 |
Advanced process flow for high quality FCVD films
Grant 9,777,378 - Nemani , et al. October 3, 2 | 2017-10-03 |
3D material modification for advanced processing
Grant 9,773,675 - Godet , et al. September 26, 2 | 2017-09-26 |
Selective deposition utilizing masks and directional plasma treatment
Grant 9,754,791 - Godet , et al. September 5, 2 | 2017-09-05 |
Localized stress modulation for overlay and EPE
Grant 9,748,148 - Yieh , et al. August 29, 2 | 2017-08-29 |
Additive Manufacturing With Laser And Plasma
App 20170203364 - Ramaswamy; Kartik ; et al. | 2017-07-20 |
Additive Manufacturing With Laser And Gas Flow
App 20170182556 - Ramaswamy; Kartik ; et al. | 2017-06-29 |
3d Material Modification For Advanced Processing
App 20170154776 - GODET; Ludovic ; et al. | 2017-06-01 |
Gapfill Film Modification For Advanced Cmp And Recess Flow
App 20170117157 - CHEN; Erica ; et al. | 2017-04-27 |
3D material modification for advanced processing
Grant 9,620,407 - Godet , et al. April 11, 2 | 2017-04-11 |
Silicide Phase Control By Confinement
App 20170092502 - MEBARKI; Bencherki ; et al. | 2017-03-30 |
Air gap formation in interconnection structure by implantation process
Grant 9,595,467 - Xue , et al. March 14, 2 | 2017-03-14 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20170053797 - NEMANI; Srinivas D. ; et al. | 2017-02-23 |
Gas Control In Process Chamber
App 20160369395 - LIANG; Qiwei ; et al. | 2016-12-22 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,515,166 - Nemani , et al. December 6, 2 | 2016-12-06 |
Methods for reducing semiconductor substrate strain variation
Grant 9,484,274 - Bencher , et al. November 1, 2 | 2016-11-01 |
Apparatus and methods for spacer deposition and selective removal in an advanced patterning process
Grant 9,484,202 - Zhou , et al. November 1, 2 | 2016-11-01 |
Single Platform, Multiple Cycle Spacer Deposition And Etch
App 20160307768 - CHEN; Hao ; et al. | 2016-10-20 |
Selective Deposition Utilizing Masks And Directional Plasma Treatment
App 20160233100 - GODET; Ludovic ; et al. | 2016-08-11 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Single platform, multiple cycle spacer deposition and etch
Grant 9,406,522 - Chen , et al. August 2, 2 | 2016-08-02 |
Advanced Process Flow For High Quality Fcvd Films
App 20160194758 - NEMANI; Srinivas D. ; et al. | 2016-07-07 |
Method and apparatus for selective deposition
Grant 9,385,219 - Yieh , et al. July 5, 2 | 2016-07-05 |
Method to reduce K value of dielectric layer for advanced FinFET formation
Grant 9,379,021 - Yieh , et al. June 28, 2 | 2016-06-28 |
3d Material Modification For Advanced Processing
App 20160163546 - GODET; Ludovic ; et al. | 2016-06-09 |
Air Gap Formation In Interconnection Structure By Implantation Process
App 20160141202 - XUE; Jun ; et al. | 2016-05-19 |
Multi-cassette Carrying Case
App 20160133491 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Substrate Transfer Chamber
App 20160133494 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Methods And Apparatus For Transferring A Substrate
App 20160133490 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Flowable Film Properties Tuning Using Implantation
App 20160079034 - Yieh; Ellie Y. ; et al. | 2016-03-17 |
Single Platform, Multiple Cycle Spacer Deposition And Etch
App 20160027655 - Chen; Hao ; et al. | 2016-01-28 |
Localized Stress Modulation For Overlay And Epe
App 20160005662 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Method And Apparatus For Selective Deposition
App 20160005839 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Methods For Forming Fin Structures With Desired Dimensions For 3d Structure Semiconductor Applications
App 20150380526 - GODET; Ludovic ; et al. | 2015-12-31 |
Methods For Reducing Semiconductor Substrate Strain Variation
App 20150371908 - BENCHER; Christopher Dennis ; et al. | 2015-12-24 |
Roll To Roll Wafer Backside Particle And Contamination Removal
App 20150371879 - NGAI; Christopher S. ; et al. | 2015-12-24 |
Directional Treatment For Multi-dimensional Device Processing
App 20150325411 - GODET; Ludovic ; et al. | 2015-11-12 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20150294863 - NEMANI; Srinivas D. ; et al. | 2015-10-15 |
Grazing Angle Plasma Processing For Modifying A Substrate Surface
App 20150255243 - GODET; Ludovic ; et al. | 2015-09-10 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Method To Reduce K Value Of Dielectric Layer For Advanced Finfet Formation
App 20150099360 - YIEH; Ellie Y. ; et al. | 2015-04-09 |
Multiple Chamber Module And Platform In Semiconductor Process Equipment
App 20140261168 - Liang; Qiwei ; et al. | 2014-09-18 |
Methods For Improving Etching Resistance For An Amorphous Carbon Film
App 20140263173 - ROSSLEE; Craig ; et al. | 2014-09-18 |
Process sequence for formation of patterned hard mask film (RFP) without need for photoresist or dry etch
Grant 8,153,348 - Nemani , et al. April 10, 2 | 2012-04-10 |
Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer
Grant 8,101,525 - Shen , et al. January 24, 2 | 2012-01-24 |
Method and apparatus for excimer curing
Grant 8,022,377 - Lubomirsky , et al. September 20, 2 | 2011-09-20 |
Remote plasma clean process with cycled high and low pressure clean steps
Grant 7,967,913 - Hua , et al. June 28, 2 | 2011-06-28 |
Apparatus And Method For Low-k Dielectric Repair
App 20110151590 - Carducci; James D. ; et al. | 2011-06-23 |
Methods for forming a silicon oxide layer over a substrate
Grant 7,943,531 - Nemani , et al. May 17, 2 | 2011-05-17 |
Thermal management of inductively coupled plasma reactors
Grant 7,811,411 - Lu , et al. October 12, 2 | 2010-10-12 |
Internal balanced coil for inductively coupled high density plasma processing chamber
Grant 7,789,993 - Chen , et al. September 7, 2 | 2010-09-07 |
Method For Fabricating A Semiconductor Device Having A Lanthanum-family-based Oxide Layer
App 20100210112 - Shen; Meihua ; et al. | 2010-08-19 |
Dual top gas feed through distributor for high density plasma chamber
Grant 7,758,698 - Bang , et al. July 20, 2 | 2010-07-20 |
Remote Plasma Clean Process With Cycled High And Low Pressure Clean Steps
App 20100095979 - Hua; Zhong Qiang ; et al. | 2010-04-22 |
Two-piece dome with separate RF coils for inductively coupled plasma reactors
Grant 7,651,587 - Lu , et al. January 26, 2 | 2010-01-26 |
Method And Apparatus For Excimer Curing
App 20090261276 - LUBOMIRSKY; Dmitry ; et al. | 2009-10-22 |
Process Sequence For Formation Of Patterned Hard Mask Film (rfp) Without Need For Photoresist Or Dry Etch
App 20090208880 - NEMANI; SRINIVAS D. ; et al. | 2009-08-20 |
Internal balanced coil for inductively coupled high density plasma processing chamber
Grant 7,572,647 - Chen , et al. August 11, 2 | 2009-08-11 |
Method and system for improving dielectric film quality for void free gap fill
Grant 7,541,297 - Mallick , et al. June 2, 2 | 2009-06-02 |
Counter-balanced Substrate Support
App 20090120584 - Lubomirsky; Dmitry ; et al. | 2009-05-14 |
Method of inducing stresses in the channel region of a transistor
Grant 7,528,051 - Arghavani , et al. May 5, 2 | 2009-05-05 |
Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD
Grant 7,524,750 - Nemani , et al. April 28, 2 | 2009-04-28 |
Method And System For Improving Dielectric Film Quality For Void Free Gap Fill
App 20090104789 - Mallick; Abhijit Basu ; et al. | 2009-04-23 |
Methods for Forming a Silicon Oxide Layer Over a Substrate
App 20090104791 - Nemani; Srinivas D. ; et al. | 2009-04-23 |
Dual Top Gas Feed Through Distributor for High Density Plasma Chamber
App 20090042407 - Bang; Won B. ; et al. | 2009-02-12 |
Vacuum Chucking Heater Of Axisymmetrical And Uniform Thermal Profile
App 20090031955 - Lu; Siqing ; et al. | 2009-02-05 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080188090 - Chen; Robert ; et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080188087 - CHEN; ROBERT ; et al. | 2008-08-07 |
Internal Balanced Coil For Inductively Coupled High Density Plasma Processing Chamber
App 20080185284 - Chen; Robert ; et al. | 2008-08-07 |
Multi-step Dep-etch-dep High Density Plasma Chemical Vapor Deposition Processes For Dielectric Gapfills
App 20080142483 - Hua; Zhong Qiang ; et al. | 2008-06-19 |
Dual Top Gas Feed Through Distributor For High Density Plasma Chamber
App 20080121177 - Bang; Won B. ; et al. | 2008-05-29 |
Dual Top Gas Feed Through Distributor For High Density Plasma Chamber
App 20080121178 - Bang; Won B. ; et al. | 2008-05-29 |
Integrated Process Modulation (ipm) A Novel Solution For Gapfill With Hdp-cvd
App 20070243693 - Nemani; Srinivas D. ; et al. | 2007-10-18 |
Low stress STI films and methods
Grant 7,244,658 - Yieh , et al. July 17, 2 | 2007-07-17 |
Thermal management of inductively coupled plasma reactors
App 20070034153 - Lu; Siqing ; et al. | 2007-02-15 |
Two-piece dome with separate RF coils for inductively coupled plasma reactors
App 20070037397 - Lu; Siqing ; et al. | 2007-02-15 |
Dielectric materials to prevent photoresist poisoning
Grant 7,115,534 - Nguyen , et al. October 3, 2 | 2006-10-03 |
Inductive plasma system with sidewall magnet
App 20060177600 - Lu; Siqing ; et al. | 2006-08-10 |
Low-thermal-budget gapfill process
Grant 7,087,497 - Yuan , et al. August 8, 2 | 2006-08-08 |
Gap filling with a composite layer
Grant 7,033,945 - Byun , et al. April 25, 2 | 2006-04-25 |
Magnetic-field concentration in inductively coupled plasma reactors
App 20060075967 - Lu; Siqing ; et al. | 2006-04-13 |
Gap filling with a composite layer
App 20050277257 - Byun, Jeong Soo ; et al. | 2005-12-15 |
Method of inducing stresses in the channel region of a transistor
App 20050255667 - Arghavani, Reza ; et al. | 2005-11-17 |
Low-thermal-budget gapfill process
App 20050196929 - Yuan, Zheng ; et al. | 2005-09-08 |
Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI)
Grant 6,875,558 - Gaillard , et al. April 5, 2 | 2005-04-05 |
Dielectric materials to prevent photoresist poisoning
App 20050014361 - Nguyen, Son Van ; et al. | 2005-01-20 |
Method for curing low dielectric constant film by electron beam
App 20040101632 - Zhu, Wen H. ; et al. | 2004-05-27 |
Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric
App 20030211244 - Li, Lihua ; et al. | 2003-11-13 |
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