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Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same
Grant 10,352,964 - Lee , et al. July 16, 2 | 2019-07-16 |
Block copolymer and method of manufacturing integrated circuit device using the same
Grant 10,138,318 - Kwon , et al. Nov | 2018-11-27 |
Methods of forming patterns of semiconductor devices
Grant 10,101,660 - Park , et al. October 16, 2 | 2018-10-16 |
Method of forming pattern of semiconductor device
Grant 9,892,918 - Kim , et al. February 13, 2 | 2018-02-13 |
Cantilever Set For Atomic Force Microscopes, Substrate Surface Inspection Apparatus Including The Same, Method Of Analyzing Surface Of Semiconductor Substrate By Using The Same, And Method Of Forming Micropattern By Using The Same
App 20170212145 - LEE; Kyeong-mi ; et al. | 2017-07-27 |
Method of forming fine pattern and method of manufacturing integrated circuit device using the method
Grant 9,704,722 - Park , et al. July 11, 2 | 2017-07-11 |
Methods of forming fine patterns and methods of manufacturing integrated circuit devices using the methods
Grant 9,653,294 - Kim , et al. May 16, 2 | 2017-05-16 |
Methods Of Forming Patterns Of Semiconductor Devices
App 20170129972 - PARK; Jeong-Ju ; et al. | 2017-05-11 |
Method Of Forming Pattern Of Semiconductor Device
App 20170125247 - KIM; EUN-SUNG ; et al. | 2017-05-04 |
Block Copolymer And Method Of Manufacturing Integrated Circuit Device Using The Same
App 20170107317 - KWON; SEUNGCHUL ; et al. | 2017-04-20 |
Method Of Forming Fine Pattern And Method Of Manufacturing Integrated Circuit Device Using The Method
App 20160172187 - PARK; Jeong-ju ; et al. | 2016-06-16 |
Methods Of Forming Fine Patterns And Methods Of Manufacturing Integrated Circuit Devices Using The Methods
App 20160163547 - Kim; Eun-sung ; et al. | 2016-06-09 |
Methods of forming contact holes
Grant 8,946,089 - Kim , et al. February 3, 2 | 2015-02-03 |
Methods of forming a pattern
Grant 8,900,468 - Kim , et al. December 2, 2 | 2014-12-02 |
Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusion
Grant 8,778,598 - Kang , et al. July 15, 2 | 2014-07-15 |
Methods Of Forming Contact Holes
App 20140193976 - KIM; Eun-Sung ; et al. | 2014-07-10 |
Methods Of Forming A Pattern
App 20140061154 - KIM; Eun-Sung ; et al. | 2014-03-06 |
Method Of Forming Fine Patterns Of Semiconductor Device By Using Double Patterning Process Which Uses Acid Diffusion
App 20140004705 - Kang; Yool ; et al. | 2014-01-02 |
Methods Of Forming A Pattern
App 20130288482 - Nam; Jae-Woo ; et al. | 2013-10-31 |
Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusion
Grant 8,431,331 - Kang , et al. April 30, 2 | 2013-04-30 |
Method of forming fine patterns using a block copolymer
Grant 8,399,174 - Kim , et al. March 19, 2 | 2013-03-19 |
Method of fine patterning semiconductor device
Grant 8,349,200 - Yi , et al. January 8, 2 | 2013-01-08 |
Method of fine patterning semiconductor device
Grant 8,334,089 - Yi , et al. December 18, 2 | 2012-12-18 |
Method of forming patterns of semiconductor device
Grant 8,263,487 - Yoon , et al. September 11, 2 | 2012-09-11 |
Method of forming fine pattern using block copolymer
Grant 8,263,323 - Yoon , et al. September 11, 2 | 2012-09-11 |
Method of Fine Patterning Semiconductor Device
App 20120015527 - Yi; SHI-YONG ; et al. | 2012-01-19 |
Method Of Forming Fine Patterns Using A Block Copolymer
App 20120003587 - KIM; Kyoung Taek ; et al. | 2012-01-05 |
Method of Fine Patterning Semiconductor Device
App 20110312183 - Yi; Shi-Yong ; et al. | 2011-12-22 |
Method of fine patterning semiconductor device
Grant 8,053,163 - Yi , et al. November 8, 2 | 2011-11-08 |
Method of forming fine patterns using a block copolymer
Grant 8,039,196 - Kim , et al. October 18, 2 | 2011-10-18 |
Method of fine patterning semiconductor device
Grant 8,029,688 - Yi , et al. October 4, 2 | 2011-10-04 |
Method of fine patterning semiconductor device
Grant 7,998,357 - Cho , et al. August 16, 2 | 2011-08-16 |
Thinner composition and method of removing photoresist using the same
Grant 7,863,231 - Ahn , et al. January 4, 2 | 2011-01-04 |
Method of forming patterns of semiconductor device
App 20100248492 - Yoon; Dong-ki ; et al. | 2010-09-30 |
Method of forming fine pattern using block copolymer
App 20100167214 - Yoon; Dong Ki ; et al. | 2010-07-01 |
Method Of Forming Fine Patterns Of Semiconductor Device By Using Double Patterning Process Which Uses Acid Diffusion
App 20090274980 - Kang; Yool ; et al. | 2009-11-05 |
Method of fine patterning semiconductor device
App 20090246966 - Cho; Nam-Myun ; et al. | 2009-10-01 |
Method Of Forming Fine Pattern Using Block Copolymer
App 20090191713 - YOON; Dong-Ki ; et al. | 2009-07-30 |
Method of fine patterning semiconductor device
App 20090176376 - Yi; Shi-Yong ; et al. | 2009-07-09 |
Method of fine patterning semiconductor device
App 20090155725 - Yi; Shi-Yong ; et al. | 2009-06-18 |
Method of forming fine patterns using a block copolymer
App 20090042146 - Kim; Kyoung Taek ; et al. | 2009-02-12 |
Thinner Composition And Method Of Removing Photoresist Using The Same
App 20080214422 - AHN; Seung-Hyun ; et al. | 2008-09-04 |
Thinner composition and method of removing photoresist using the same
Grant 7,387,988 - Ahn , et al. June 17, 2 | 2008-06-17 |
Silazane compound amd methods for using the same
Grant 7,070,910 - Kim , et al. July 4, 2 | 2006-07-04 |
Polymeric tetrahedral carbon films, methods of forming the same and methods of forming fine patterns using the same
App 20060115772 - Hah; Jung-Hwan ; et al. | 2006-06-01 |
Thinner composition and method of removing photoresist using the same
App 20050176607 - Ahn, Seung-Hyun ; et al. | 2005-08-11 |
Silazane compound and methods for using the same
App 20050164126 - Kim, Kyoung-Mi ; et al. | 2005-07-28 |
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