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Patent applications and USPTO patent grants for Yi; Champion.The latest application filed is for "polishing tool used for cmp".
Patent | Date |
---|---|
Polishing tool used for CMP Grant 6,780,092 - Yi August 24, 2 | 2004-08-24 |
Polishing tool used for CMP App 20030068965 - Yi, Champion | 2003-04-10 |
Method of depositing thin film App 20030044529 - Wu, Hsiao-Che ;   et al. | 2003-03-06 |
Method for integration optimization by chemical mechanical planarization end-pointing technique Grant 6,432,728 - Tai , et al. August 13, 2 | 2002-08-13 |
Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation Grant 6,153,116 - Yang , et al. November 28, 2 | 2000-11-28 |
Polishing machine Grant 6,146,260 - Yi November 14, 2 | 2000-11-14 |
Method for forming metal plug Grant 5,776,833 - Chen , et al. July 7, 1 | 1998-07-07 |
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