Patent | Date |
---|
Stacked upper fin and lower fin transistor with separate gate Grant 11,164,870 - Wu , et al. November 2, 2 | 2021-11-02 |
Replacement-channel Fabrication Of Iii-v Nanosheet Devices App 20210305407 - Zhang; Jingyun ;   et al. | 2021-09-30 |
Replacement-channel fabrication of III-V nanosheet devices Grant 11,081,567 - Zhang , et al. August 3, 2 | 2021-08-03 |
Self-aligned Two-dimensional Material Transistors App 20210233996 - ZHANG; Chen ;   et al. | 2021-07-29 |
Measurement of top contact resistance in vertical field-effect transistor devices Grant 11,024,738 - Liu , et al. June 1, 2 | 2021-06-01 |
Nanosheet FET including encapsulated all-around source/drain contact Grant 11,011,643 - Xu , et al. May 18, 2 | 2021-05-18 |
Self-aligned two-dimensional material transistors Grant 10,991,797 - Zhang , et al. April 27, 2 | 2021-04-27 |
Vertical field-effect transistor including a fin having sidewalls with a tapered bottom profile Grant 10,985,273 - Yeung , et al. April 20, 2 | 2021-04-20 |
Techniques for vertical FET gate length control Grant 10,978,576 - Liu , et al. April 13, 2 | 2021-04-13 |
Stacked Transistor With Separate Gate App 20210091079 - Wu; Heng ;   et al. | 2021-03-25 |
Maskless epitaxial growth of phosphorus-doped Si and boron-doped SiGe (Ge) for advanced source/drain contact Grant 10,930,567 - Lee , et al. February 23, 2 | 2021-02-23 |
Approach to high-k dielectric feature uniformity Grant 10,916,640 - Yamashita , et al. February 9, 2 | 2021-02-09 |
Vertically stacked transistors Grant 10,896,851 - Cheng , et al. January 19, 2 | 2021-01-19 |
Self-aligned Two-dimensional Material Transistors App 20200295132 - ZHANG; Chen ;   et al. | 2020-09-17 |
Measurement Of Top Contact Resistance In Vertical Field-effect Transistor Devices App 20200295175 - Liu; Zuoguang ;   et al. | 2020-09-17 |
Double gate two-dimensional material transistor Grant 10,756,205 - Xu , et al. A | 2020-08-25 |
Double Gate Two-dimensional Material Transistor App 20200259009 - A1 | 2020-08-13 |
Increased source and drain contact edge width in two-dimensional material field effect transistors by directed self-assembly Grant 10,741,681 - Liu , et al. A | 2020-08-11 |
Approach To High-k Dielectric Feature Uniformity App 20200161452 - Yamashita; Tenko ;   et al. | 2020-05-21 |
Replacement metal gate processes for vertical transport field-effect transistor Grant 10,658,299 - Lee , et al. | 2020-05-19 |
Increased Source And Drain Contact Edge Width In Two-dimensional Material Field Effect Transistors By Directed Self-assembly App 20200144406 - Liu; Chi-Chun ;   et al. | 2020-05-07 |
Vertical tunnel FET with self-aligned heterojunction Grant 10,622,489 - Yeung , et al. | 2020-04-14 |
Preventing strained fin relaxation Grant 10,615,278 - Cheng , et al. | 2020-04-07 |
Approach to high-k dielectric feature uniformity Grant 10,600,887 - Yamashita , et al. | 2020-03-24 |
Nanosheet Fet Including All-around Source/drain Contact App 20200075772 - Xu; Peng ;   et al. | 2020-03-05 |
Increased source and drain contact edge width in two-dimensional material field effect transistors by directed self-assembly Grant 10,580,886 - Liu , et al. | 2020-03-03 |
Techniques for Vertical FET Gate Length Control App 20200044055 - Liu; Chi-Chun ;   et al. | 2020-02-06 |
Nanosheet FET including all-around source/drain contact Grant 10,546,957 - Xu , et al. Ja | 2020-01-28 |
Vertical Field-effect Transistor Including A Fin Having Sidewalls With A Tapered Bottom Profile App 20200027984 - Yeung; Chun Wing ;   et al. | 2020-01-23 |
Semiconductor device and method of forming the semiconductor device Grant 10,541,239 - Chao , et al. Ja | 2020-01-21 |
Vertically Stacked Transistors App 20200020587 - Cheng; Kangguo ;   et al. | 2020-01-16 |
Vertical field-effect transistor including a fin having sidewalls with a tapered bottom profile Grant 10,529,850 - Yeung , et al. J | 2020-01-07 |
Fin field-effect transistor for input/output device integrated with nanosheet field-effect transistor Grant 10,522,636 - Yeung , et al. Dec | 2019-12-31 |
Increased Source And Drain Contact Edge Width In Two-dimensional Material Field Effect Transistors By Directed Self-assembly App 20190371925 - Liu; Chi-Chun ;   et al. | 2019-12-05 |
Vertically stacked transistors Grant 10,483,166 - Cheng , et al. Nov | 2019-11-19 |
Structure And Method To Form Nanosheet Devices With Bottom Isolation App 20190348403 - Mochizuki; Shogo ;   et al. | 2019-11-14 |
Techniques for vertical FET gate length control Grant 10,475,905 - Liu , et al. Nov | 2019-11-12 |
Vertical Field-effect Transistor Including A Fin Having Sidewalls With A Tapered Bottom Profile App 20190326435 - Yeung; Chun Wing ;   et al. | 2019-10-24 |
Structure and method to form nanosheet devices with bottom isolation Grant 10,453,824 - Mochizuki , et al. Oc | 2019-10-22 |
MASKLESS EPITAXIAL GROWTH OF PHOSPHORUS-DOPED Si AND BORON-DOPED SiGe (Ge) FOR ADVANCED SOURCE/DRAIN CONTACT App 20190318970 - Lee; Choonghyun ;   et al. | 2019-10-17 |
MASKLESS EPITAXIAL GROWTH OF PHOSPHORUS-DOPED Si AND BORON-DOPED SiGe (Ge) FOR ADVANCED SOURCE/DRAIN CONTACT App 20190318969 - Lee; Choonghyun ;   et al. | 2019-10-17 |
Maskless epitaxial growth of phosphorus-doped Si and boron-doped SiGe (Ge) for advanced source/drain contact Grant 10,431,502 - Lee , et al. O | 2019-10-01 |
Techniques for forming different gate length vertical transistors with dual gate oxide Grant 10,418,288 - Bao , et al. Sept | 2019-09-17 |
Replacement-channel Fabrication Of Iii-v Nanosheet Devices App 20190280102 - Zhang; Jingyun ;   et al. | 2019-09-12 |
Replacement Metal Gate Processes For Vertical Transport Field-effect Transistor App 20190267325 - Lee; Choonghyun ;   et al. | 2019-08-29 |
Low-k Dielectric Inner Spacer For Gate All Around Transistors App 20190267463 - Chao; Robin Hsin Kuo ;   et al. | 2019-08-29 |
Long Channels For Transistors App 20190252520 - CHAO; ROBIN HSIN KUO ;   et al. | 2019-08-15 |
Long Channels For Transistors App 20190252497 - CHAO; ROBIN HSIN KUO ;   et al. | 2019-08-15 |
Undercut control in isotropic wet etch processes Grant 10,374,034 - Liu , et al. | 2019-08-06 |
Replacement metal gate processes for vertical transport field-effect transistor Grant 10,373,912 - Lee , et al. | 2019-08-06 |
Techniques for Vertical FET Gate Length Control App 20190237562 - Liu; Chi-Chun ;   et al. | 2019-08-01 |
Long channels for transistors Grant 10,355,103 - Chao , et al. July 16, 2 | 2019-07-16 |
Replacement Metal Gate Processes For Vertical Transport Field-effect Transistor App 20190214343 - Lee; Choonghyun ;   et al. | 2019-07-11 |
Nanosheet Fet Including All-around Source/drain Contact App 20190214502 - Xu; Peng ;   et al. | 2019-07-11 |
Techniques for Forming Different Gate Length Vertical Transistors with Dual Gate Oxide App 20190214305 - Bao; Ruqiang ;   et al. | 2019-07-11 |
Fin Field-effect Transistor For Input/output Device Integrated With Nanosheet Field-effect Transistor App 20190198629 - YEUNG; CHUN WING ;   et al. | 2019-06-27 |
Long Channels For Transistors App 20190189748 - CHAO; ROBIN HSIN KUO ;   et al. | 2019-06-20 |
Long Channels For Transistors App 20190189776 - CHAO; ROBIN HSIN KUO ;   et al. | 2019-06-20 |
Long channels for transistors Grant 10,312,326 - Chao , et al. | 2019-06-04 |
Fin field-effect transistor for input/output device integrated with nanosheet field-effect transistor Grant 10,297,667 - Yeung , et al. | 2019-05-21 |
Approach To High-k Dielectric Feature Uniformity App 20190131435 - Yamashita; Tenko ;   et al. | 2019-05-02 |
Vertical Tunnel FET with Self-Aligned Heterojunction App 20190115479 - Yeung; Chun Wing ;   et al. | 2019-04-18 |
Method of forming vertical transport fin field effect transistor with high-K dielectric feature uniformity Grant 10,170,588 - Yamashita , et al. J | 2019-01-01 |
Semiconductor Device And Method Of Forming The Semiconductor Device App 20180286862 - Chao; Robin Hsin-Ku ;   et al. | 2018-10-04 |
Semiconductor device and method of forming the semiconductor device Grant 10,079,233 - Chao , et al. September 18, 2 | 2018-09-18 |
Methods, apparatus and system for providing adjustable fin height for a FinFET device Grant 10,068,804 - Xie , et al. September 4, 2 | 2018-09-04 |
Methods, Apparatus And System For Providing Adjustable Fin Height For A Finfet Device App 20180218947 - Xie; Ruilong ;   et al. | 2018-08-02 |
Semiconductor Device And Method Of Forming The Semiconductor Device App 20180090494 - CHAO; Robin Hsin-Ku ;   et al. | 2018-03-29 |
Preventing Strained Fin Relaxation App 20180069027 - Cheng; Kangguo ;   et al. | 2018-03-08 |
Preventing strained fin relaxation Grant 9,881,937 - Cheng , et al. January 30, 2 | 2018-01-30 |
Preventing Strained Fin Relaxation App 20170117300 - Cheng; Kangguo ;   et al. | 2017-04-27 |
Preventing strained fin relaxation by sealing fin ends Grant 9,576,979 - Cheng , et al. February 21, 2 | 2017-02-21 |
Strained Silicon Germanium Fin With Controlled Junction For Finfet Devices App 20170025509 - Cheng; Kangguo ;   et al. | 2017-01-26 |
Preventing Strained Fin Relaxation App 20160351590 - Cheng; Kangguo ;   et al. | 2016-12-01 |