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Bottom channel isolation in nanosheet transistors Grant 10,930,793 - Chao , et al. February 23, 2 | 2021-02-23 |
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Self-aligned inner-spacer replacement process using implantation Grant 10,411,120 - Chao , et al. Sept | 2019-09-10 |
Prevention of extension narrowing in nanosheet field effect transistors Grant 10,396,177 - Yamashita , et al. A | 2019-08-27 |
Forming bottom isolation layer for nanosheet technology Grant 10,361,269 - Yeung , et al. | 2019-07-23 |
Reduced resistance source and drain extensions in vertical field effect transistors Grant 10,332,995 - Xu , et al. | 2019-06-25 |
Vertical transport fin field effect transistors having different channel lengths Grant 10,325,815 - Bao , et al. | 2019-06-18 |
Self-limited inner spacer formation for gate-all-around field effect transistors Grant 10,326,001 - Chao , et al. | 2019-06-18 |
Reduced Resistance Source And Drain Extensions In Vertical Field Effect Transistors App 20190181263 - Xu; Peng ;   et al. | 2019-06-13 |
Gate Fill Utilizing Replacement Spacer App 20190157391 - Yeung; Chun W. ;   et al. | 2019-05-23 |
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Gate fill utilizing replacement spacer Grant 10,297,663 - Yeung , et al. | 2019-05-21 |
Self-aligned inner-spacer replacement process using implantation Grant 10,276,695 - Chao , et al. | 2019-04-30 |
Reduced resistance source and drain extensions in vertical field effect transistors Grant 10,269,957 - Xu , et al. | 2019-04-23 |
Semiconductor device including enhanced low-k spacer Grant 10,256,321 - Cheng , et al. | 2019-04-09 |
Silicon Residue Removal In Nanosheet Transistors App 20190096669 - Bi; Zhenxing ;   et al. | 2019-03-28 |
Vertical transport fin field effect transistors having different channel lengths Grant 10,242,919 - Bao , et al. | 2019-03-26 |
Uniform low-k inner spacer module in gate-all-around (GAA) transistors Grant 10,243,060 - Chao , et al. | 2019-03-26 |
Airgap spacers Grant 10,217,868 - Cheng , et al. Feb | 2019-02-26 |
Vertical Transport Fin Field Effect Transistors Having Different Channel Lengths App 20180358268 - Bao; Ruqiang ;   et al. | 2018-12-13 |
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Forming Bottom Isolation Layer For Nanosheet Technology App 20180261670 - Yeung; Chun W. ;   et al. | 2018-09-13 |
Self-limited Inner Spacer Formation For Gate-all-around Field Effect Transistors App 20180212038 - Chao; Robinhsinku ;   et al. | 2018-07-26 |
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Forming bottom isolation layer for nanosheet technology Grant 10,032,867 - Yeung , et al. July 24, 2 | 2018-07-24 |
Reduced Resistance Source And Drain Extensions In Vertical Field Effect Transistors App 20180197989 - Xu; Peng ;   et al. | 2018-07-12 |
Reduced Resistance Source And Drain Extensions In Vertical Field Effect Transistors App 20180197990 - Xu; Peng ;   et al. | 2018-07-12 |
Airgap spacers Grant 10,020,400 - Cheng , et al. July 10, 2 | 2018-07-10 |
Vertical transport fin field effect transistors having different channel lengths Grant 10,008,417 - Bao , et al. June 26, 2 | 2018-06-26 |
Self-limited inner spacer formation for gate-all-around field effect transistors Grant 9,947,767 - Chao , et al. April 17, 2 | 2018-04-17 |
Reduced resistance source and drain extensions in vertical field effect transistors Grant 9,935,195 - Xu , et al. April 3, 2 | 2018-04-03 |
Sacrificial Cap For Forming Semiconductor Contact App 20180082909 - Adusumilli; Praneet ;   et al. | 2018-03-22 |
Semiconductor Device Including Enhanced Low-k Spacer App 20180053830 - Cheng; Kangguo ;   et al. | 2018-02-22 |
Self-aligned Inner-spacer Replacement Process Using Implantation App 20180047835 - Chao; Robin Hsin-Kuo ;   et al. | 2018-02-15 |
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Airgap Spacers App 20170358673 - Cheng; Kangguo ;   et al. | 2017-12-14 |
Nanosheet FET with wrap-around inner spacer Grant 9,842,914 - Yeung , et al. December 12, 2 | 2017-12-12 |
Self-aligned inner-spacer replacement process using implantation Grant 9,831,324 - Chao , et al. November 28, 2 | 2017-11-28 |
Sacrificial cap for forming semiconductor contact Grant 9,805,989 - Adusumilli , et al. October 31, 2 | 2017-10-31 |
Airgap Spacers App 20170243968 - Cheng; Kangguo ;   et al. | 2017-08-24 |
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