Patent | Date |
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Semiconductor device with damascene bit line and method for manufacturing the same Grant 9,871,045 - Yeom , et al. January 16, 2 | 2018-01-16 |
Semiconductor device with air gap and method for fabricating the same Grant 9,698,097 - Lee , et al. July 4, 2 | 2017-07-04 |
Semiconductor device with air gap and method for fabricating the same Grant 9,514,980 - Lee , et al. December 6, 2 | 2016-12-06 |
Semiconductor device with air gap and method for fabricating the same Grant 9,466,603 - Yeom , et al. October 11, 2 | 2016-10-11 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20160247760 - LEE; Nam-Yeal ;   et al. | 2016-08-25 |
Method for fabricating capacitor of semiconductor device Grant 9,373,681 - Lim , et al. June 21, 2 | 2016-06-21 |
Semiconductor Device Including Air Gaps And Method Of Fabricating The Same App 20160172304 - LEE; Nam-Yeal ;   et al. | 2016-06-16 |
Semiconductor device with air gap and method for fabricating the same Grant 9,355,903 - Lee , et al. May 31, 2 | 2016-05-31 |
Semiconductor device with air gap and method for fabricating the same Grant 9,337,202 - Lim , et al. May 10, 2 | 2016-05-10 |
Method For Fabricating Capacitor Of Semiconductor Device App 20160104764 - LIM; Sung-Won ;   et al. | 2016-04-14 |
Semiconductor device with air gap and method for fabricating the same Grant 9,312,210 - Lee , et al. April 12, 2 | 2016-04-12 |
Semiconductor device including air gaps and method of fabricating the same Grant 9,293,362 - Lee , et al. March 22, 2 | 2016-03-22 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20160049409 - YEOM; Seung-Jin ;   et al. | 2016-02-18 |
Semiconductor device and method of fabricating the same Grant 9,245,946 - Lee , et al. January 26, 2 | 2016-01-26 |
Method for fabricating capacitor of semiconductor device Grant 9,240,442 - Lim , et al. January 19, 2 | 2016-01-19 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20160005743 - LIM; Sung-Won ;   et al. | 2016-01-07 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20150371891 - LEE; Hyo-Seok ;   et al. | 2015-12-24 |
Method for fabricating capacitor Grant 9,214,467 - Kim , et al. December 15, 2 | 2015-12-15 |
Semiconductor device with air gap and method for fabricating the same Grant 9,202,774 - Yeom , et al. December 1, 2 | 2015-12-01 |
Semiconductor device with air gap and method for fabricating the same Grant 9,165,859 - Lim , et al. October 20, 2 | 2015-10-20 |
Semiconductor device with air gap spacer and capping barrier layer and method for fabricating the same Grant 9,159,609 - Lee , et al. October 13, 2 | 2015-10-13 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20150206800 - LEE; Nam-Yeal ;   et al. | 2015-07-23 |
Method For Fabricating Capacitor App 20150132916 - KIM; Jin-Hyock ;   et al. | 2015-05-14 |
Semiconductor device with air gap and method for fabricating the same Grant 9,024,371 - Lee , et al. May 5, 2 | 2015-05-05 |
Semiconductor Device And Method Of Fabricating The Same App 20150084155 - LEE; Hyo-Seok ;   et al. | 2015-03-26 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20150035050 - YEOM; Seung-Jin ;   et al. | 2015-02-05 |
Method for fabricating capacitor Grant 8,946,047 - Kim , et al. February 3, 2 | 2015-02-03 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20150014759 - LEE; Nam-Yeal ;   et al. | 2015-01-15 |
Semiconductor device and method of fabricating the same Grant 8,921,216 - Lee , et al. December 30, 2 | 2014-12-30 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20140308794 - LEE; Hyo-Seok ;   et al. | 2014-10-16 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20140299989 - LIM; Sung-Won ;   et al. | 2014-10-09 |
Semiconductor device with air gap and method for fabricating the same Grant 8,822,335 - Lee , et al. September 2, 2 | 2014-09-02 |
Semiconductor Device Including Air Gaps And Method Of Fabricating The Same App 20140175659 - LEE; Nam-Yeal ;   et al. | 2014-06-26 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20140179101 - LEE; Nam-Yeal ;   et al. | 2014-06-26 |
Semiconductor Device And Method Of Fabricating The Same App 20140021553 - LEE; Hyo-Seok ;   et al. | 2014-01-23 |
Method For Fabricating Capacitor Of Semiconductor Device App 20140004678 - LIM; Sung-Won ;   et al. | 2014-01-02 |
Semiconductor Device With Air Gap And Method For Fabricating The Same App 20130320549 - LEE; Hyo-Seok ;   et al. | 2013-12-05 |
Semiconductor Device With Damascene Bit Line And Method For Manufacturing The Same App 20130049209 - YEOM; Seung-Jin ;   et al. | 2013-02-28 |
Metal line of semiconductor device having a diffusion barrier with an amorphous TaBN layer and method for forming the same Grant 8,338,951 - Jung , et al. December 25, 2 | 2012-12-25 |
Method for fabricating semiconductor device with buried gates Grant 8,314,021 - Cho , et al. November 20, 2 | 2012-11-20 |
Electrical conductor line having a multilayer diffusion barrier for use in a semiconductor device and method for forming the same Grant 8,278,218 - Oh , et al. October 2, 2 | 2012-10-02 |
Method for forming copper wiring in a semiconductor device Grant 8,252,686 - Park , et al. August 28, 2 | 2012-08-28 |
Metal line of semiconductor device without production of high resistance compound due to metal diffusion and method for forming the same Grant 8,159,069 - Kim , et al. April 17, 2 | 2012-04-17 |
Copper Line Having Self-assembled Monolayer For Ulsi Semiconductor Devices, And A Method Of Forming Same App 20120074575 - YEOM; Seung Jin ;   et al. | 2012-03-29 |
Semiconductor device including ruthenium electrode and method for fabricating the same Grant 8,120,180 - Kim , et al. February 21, 2 | 2012-02-21 |
Electrical Conductor Line Having A Multilayer Diffusion Barrier For Use In A Semiconductor Device And Method For Forming The Same App 20120015516 - OH; Joon Seok ;   et al. | 2012-01-19 |
Method for forming dielectric film and method for forming capacitor in semiconductor device using the same Grant 8,092,862 - Kil , et al. January 10, 2 | 2012-01-10 |
Method for forming copper line having self-assembled monolayer for ULSI semiconductor devices Grant 8,088,687 - Yeom , et al. January 3, 2 | 2012-01-03 |
Metal line having a Mo.sub.xSi.sub.y/Mo diffusion barrier of semiconductor device and method for forming the same Grant 8,080,472 - Oh , et al. December 20, 2 | 2011-12-20 |
Metal line of semiconductor device having a multilayer molybdenum diffusion barrier and method for forming the same Grant 8,053,895 - Jung , et al. November 8, 2 | 2011-11-08 |
Method for fabricating capacitor utilizes a sacrificial pattern enclosing the upper outer walls of the storage nodes Grant 8,048,757 - Roh , et al. November 1, 2 | 2011-11-01 |
Method for fabricating a capacitor utilizes the sacrificial pattern covering the cell region Grant 8,048,758 - Roh , et al. November 1, 2 | 2011-11-01 |
Method For Fabricating Semiconductor Device With Buried Gates App 20110244673 - CHO; Jik-Ho ;   et al. | 2011-10-06 |
METAL LINE OF SEMICONDUCTOR DEVICE HAVING A DIFFUSION BARRIER WITH AN AMORPHOUS TaBN LAYER AND METHOD FOR FORMING THE SAME App 20110233781 - JUNG; Dong Ha ;   et al. | 2011-09-29 |
Method for fabricating capacitor Grant 8,017,491 - Lee , et al. September 13, 2 | 2011-09-13 |
Metal line of semiconductor device having a diffusion barrier and method for forming the same Grant 8,008,708 - Lee , et al. August 30, 2 | 2011-08-30 |
Metal line of semiconductor device having a diffusion barrier and method for forming the same Grant 7,981,781 - Oh , et al. July 19, 2 | 2011-07-19 |
Method For Fabricating A Capacitor App 20110171808 - ROH; Jae-Sung ;   et al. | 2011-07-14 |
Method For Fabricating Capacitor App 20110171807 - Roh; Jae-Sung ;   et al. | 2011-07-14 |
Metal line of semiconductor device having a diffusion barrier with an amorphous TaBN layer and method for forming the same Grant 7,977,793 - Jung , et al. July 12, 2 | 2011-07-12 |
Method for fabricating a cylinder-type capacitor utilizing a connected ring structure Grant 7,910,452 - Roh , et al. March 22, 2 | 2011-03-22 |
Multi-layered metal line having an improved diffusion barrier of a semiconductor device and method for forming the same Grant 7,902,065 - Kim , et al. March 8, 2 | 2011-03-08 |
Metal Line Of Semiconductor Device Without Production Of High Resistance Compound Due To Metal Diffusion And Method For Forming The Same App 20110053370 - KIM; Baek Mann ;   et al. | 2011-03-03 |
Method For Forming Dielectric Film And Method For Forming Capacitor In Semiconductor Device Using The Same App 20110027465 - KIL; Deok-Sin ;   et al. | 2011-02-03 |
Metal line of semiconductor device having a diffusion barrier including CRxBy and method for forming the same Grant 7,875,979 - Jung , et al. January 25, 2 | 2011-01-25 |
Metal line having a multi-layered diffusion layer in a semiconductor device and method for forming the same Grant 7,875,978 - Jung , et al. January 25, 2 | 2011-01-25 |
Metal line of semiconductor device without production of high resistance compound due to metal diffusion and method for forming the same Grant 7,855,456 - Kim , et al. December 21, 2 | 2010-12-21 |
Capacitor and method for fabricating the same Grant 7,835,134 - Kil , et al. November 16, 2 | 2010-11-16 |
Semiconductor Device Including Ruthenium Electrode And Method For Fabricating The Same App 20100276804 - KIM; Jin-Hyock ;   et al. | 2010-11-04 |
Method for manufacturing semiconductor device preventing loss of junction region Grant 7,820,546 - Jung , et al. October 26, 2 | 2010-10-26 |
Copper Line Having Self-assembled Monolayer For Ulsi Semiconductor Devices, And A Method Of Forming Same App 20100244253 - YEOM; Seung Jin ;   et al. | 2010-09-30 |
Method For Fabricating Capacitor App 20100240188 - KIM; Jin-Hyock ;   et al. | 2010-09-23 |
Semiconductor device including ruthenium electrode and method for fabricating the same Grant 7,781,336 - Kim , et al. August 24, 2 | 2010-08-24 |
Method For Forming Copper Wiring In A Semiconductor Device App 20100210104 - Park; Hyung Soon ;   et al. | 2010-08-19 |
Metal line of semiconductor device and method for forming the same Grant 7,777,336 - Kim , et al. August 17, 2 | 2010-08-17 |
Method for forming tetragonal zirconium oxide layer and method for fabricating capacitor having the same Grant 7,772,132 - Kil , et al. August 10, 2 | 2010-08-10 |
Method for fabricating capacitor Grant 7,754,577 - Kim , et al. July 13, 2 | 2010-07-13 |
Method For Fabricating Semiconductor Device Including Metal Contact App 20100164118 - Kim; Baek-Mann ;   et al. | 2010-07-01 |
Metal Line Of Semiconductor Device Having A Diffusion Barrier And Method For Forming The Same App 20100166982 - OH; Joon Seok ;   et al. | 2010-07-01 |
Metal line of semiconductor device and method for forming the same Grant 7,741,216 - Kim , et al. June 22, 2 | 2010-06-22 |
METAL LINE OF SEMICONDUCTOR DEVICE HAVING A DIFFUSION BARRIER INCLUDING CRxBy AND METHOD FOR FORMING THE SAME App 20100059890 - JUNG; Dong Ha ;   et al. | 2010-03-11 |
Metal Line Of Semiconductor Device Having A Diffusion Barrier And Method For Forming The Same App 20100052169 - LEE; Nam Yeal ;   et al. | 2010-03-04 |
Metal Line Having A Multi-layered Diffusion Layer In A Semiconductor Device And Method For Forming The Same App 20100052168 - JUNG; Dong Ha ;   et al. | 2010-03-04 |
Metal Line Of Semiconductor Device Having A Diffusion Barrier And Method For Forming The Same App 20100052170 - Jung; Dong Ha ;   et al. | 2010-03-04 |
METAL LINE HAVING A MOxSiy/Mo DIFFUSION BARRIER OF SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME App 20100052167 - OH; Joon Seok ;   et al. | 2010-03-04 |
Method for fabricating a cylindrical capacitor using amorphous carbon-based layer Grant 7,670,903 - Park , et al. March 2, 2 | 2010-03-02 |
Electrical Conductor Line Having A Multilayer Diffusion Barrier For Use In A Semiconductor Device And Method For Forming The Same App 20100019386 - OH; Joon Seok ;   et al. | 2010-01-28 |
Capacitor And Method For Fabricating The Same App 20100014212 - Kil; Deok-Sin ;   et al. | 2010-01-21 |
Metal line of semiconductor device having a diffusion barrier including CR.sub.xB.sub.y and method for forming the same Grant 7,638,425 - Jung , et al. December 29, 2 | 2009-12-29 |
Metal Line Of Semiconductor Device And Method For Forming The Same App 20090283908 - KIM; Jeong Tae ;   et al. | 2009-11-19 |
Capacitor and method for fabricating the same Grant 7,616,426 - Kil , et al. November 10, 2 | 2009-11-10 |
Method For Manufacturing Semiconductor Device Preventing Loss Of Junction Region App 20090269915 - JUNG; Dong Ha ;   et al. | 2009-10-29 |
Method For Manufacturing Semiconductor Device Having Decreased Contact Resistance App 20090209096 - LEE; Nam Yeal ;   et al. | 2009-08-20 |
Metal Line Of Semiconductor Device Without Production Of High Resistance Compound Due To Metal Diffusion And Method For Forming The Same App 20090166871 - KIM; Baek Mann ;   et al. | 2009-07-02 |
Metal Line Of Semiconductor Device And Method For Forming The Same App 20090166870 - KIM; Jeong Tae ;   et al. | 2009-07-02 |
Method For Forming Thin Film App 20090148625 - Yeom; Seung-Jin ;   et al. | 2009-06-11 |
Multi-layered Metal Line Having An Improved Diffusion Barrier Of A Semiconductor Device And Method For Forming The Same App 20090001579 - KIM; Baek Mann ;   et al. | 2009-01-01 |
Metal Line Of Semiconductor Device With A Triple Layer Diffusion Barrier And Method For Forming The Same App 20090001577 - KIM; Jeong Tae ;   et al. | 2009-01-01 |
METAL LINE OF SEMICONDUCTOR DEVICE HAVING A DIFFUSION BARRIER INCLUDING CRxBy AND METHOD FOR FORMING THE SAME App 20090001580 - JUNG; Dong Ha ;   et al. | 2009-01-01 |
METAL LINE OF SEMICONDUCTOR DEVICE HAVING A DIFFUSION BARRIER WITH AN AMORPHOUS TaBN LAYER AND METHOD FOR FORMING THE SAME App 20090001578 - JUNG; Dong Ha ;   et al. | 2009-01-01 |
Method For Fabricating Semiconductor Device App 20090004808 - LEE; Kee-Jeung ;   et al. | 2009-01-01 |
Semiconductor device including ruthenium electrode and method for fabricating the same App 20080272490 - Kim; Jin-Hyock ;   et al. | 2008-11-06 |
Capacitor with nano-composite dielectric layer and method for fabricating the same Grant 7,446,053 - Kil , et al. November 4, 2 | 2008-11-04 |
Method For Forming Dielectric Film And Method For Forming Capacitor In Semiconductor Device Using The Same App 20080138503 - Kil; Deok-Sin ;   et al. | 2008-06-12 |
Method for fabricating capacitor in semiconductor device Grant 7,361,544 - Yeom , et al. April 22, 2 | 2008-04-22 |
Method For Fabricating A Capacitor App 20080081431 - ROH; Jae-Sung ;   et al. | 2008-04-03 |
Method for fabricating a cylindrical capacitor using amorphous carbon-based layer App 20080003741 - Park; Ki-Seon ;   et al. | 2008-01-03 |
Method for forming tetragonal zirconium oxide layer and method for fabricating capacitor having the same App 20070232081 - Kil; Deok-Sin ;   et al. | 2007-10-04 |
Method for fabricating capacitor in semiconductor device App 20070148897 - Yeom; Seung-Jin ;   et al. | 2007-06-28 |
Capacitor and method for fabricating the same App 20070102742 - Kil; Deok-Sin ;   et al. | 2007-05-10 |
Method for fabricating capacitor App 20070099375 - Kim; Jin-Hyock ;   et al. | 2007-05-03 |
Semiconductor memory device with dielectric structure and method for fabricating the same App 20070051998 - Kil; Deok-Sin ;   et al. | 2007-03-08 |
Ferroelectric memory device with merged-top-plate structure and method for fabricating the same Grant 7,173,301 - Choi , et al. February 6, 2 | 2007-02-06 |
Capacitor with nano-composite dielectric layer and method for fabricating the same App 20070001201 - Kil; Deok-Sin ;   et al. | 2007-01-04 |
Method for forming thin film App 20060183301 - Yeom; Seung-Jin ;   et al. | 2006-08-17 |
Method for depositing titanium oxide layer and method for fabricating capacitor by using the same App 20060141702 - Woo; Hyun-Kyung ;   et al. | 2006-06-29 |
Method for fabricating ferroelectric random access memory device Grant 7,045,071 - Kweon , et al. May 16, 2 | 2006-05-16 |
Ferroelectric memory device with merged-top-plate structure and method for fabricating the same App 20050205912 - Choi, Eun-Seok ;   et al. | 2005-09-22 |
Ferroelectric memory device with merged-top plate structure and method for fabricating the same Grant 6,913,967 - Choi , et al. July 5, 2 | 2005-07-05 |
Semiconductor device having a capacitor and method for the manufacture thereof App 20050098812 - Yang, Woo-Seok ;   et al. | 2005-05-12 |
Ferroelectric random access memory device and method for fabricating the same Grant 6,891,211 - Yeom , et al. May 10, 2 | 2005-05-10 |
Capacitor and method for fabricating ferroelectric memory device with the same App 20050006683 - Kim, Nam-Kyeong ;   et al. | 2005-01-13 |
Semiconductor device and method for fabricating the same Grant 6,818,935 - Kweon , et al. November 16, 2 | 2004-11-16 |
Capacitor and method for fabricating ferroelectric memory device with the same Grant 6,812,042 - Kim , et al. November 2, 2 | 2004-11-02 |
Method for fabricating ferroelectric random access memory device App 20040129670 - Kweon, Soon-Yong ;   et al. | 2004-07-08 |
Capacitor and method for fabricating ferroelectric memory device with the same App 20040124453 - Kim, Nam-Kyeong ;   et al. | 2004-07-01 |
Ferroelectric memory device with merged-top-plate structure and method for fabricating the same App 20040124454 - Choi, Eun-Seok ;   et al. | 2004-07-01 |
FeRAM having BLT ferroelectric layer and method for forming the same Grant 6,747,302 - Kim , et al. June 8, 2 | 2004-06-08 |
Ferroelectric random access memory device and method for fabricating the same App 20040013014 - Yeom, Seung-Jin ;   et al. | 2004-01-22 |
Semiconductor device having a capacitor and method for the manufacture thereof Grant 6,627,462 - Yang , et al. September 30, 2 | 2003-09-30 |
Method for fabricating semiconductor memory device App 20030096469 - Choi, Eun-Seok ;   et al. | 2003-05-22 |
Semiconductor device and method for fabricating the same App 20030057445 - Kweon, Soon-Yong ;   et al. | 2003-03-27 |
Semiconductor device and method for fabricating the same App 20030047771 - Kweon, Soon-Yong ;   et al. | 2003-03-13 |
Method for fabricating semiconductor memory device Grant 6,524,868 - Choi , et al. February 25, 2 | 2003-02-25 |
FeRAM having BLT ferroelectric layer and method for forming the same App 20020160542 - Kim, Nam-Kyeong ;   et al. | 2002-10-31 |
Method for fabricating a capacitor in a semiconductor device Grant 6,455,329 - Kim , et al. September 24, 2 | 2002-09-24 |
Semiconductor device and method for manufacturing the same App 20020079588 - Kim, Nam-Kyeong ;   et al. | 2002-06-27 |
Method for fabricating a capacitor in a semiconductor device App 20020081752 - Kim, Nam Kyeong ;   et al. | 2002-06-27 |
Method of forming ferroelectric capacitor in semiconductor device App 20020072192 - Kim, Nam-Kyeong ;   et al. | 2002-06-13 |
Method of manufacturing ferroelectric memory device Grant 6,379,977 - Sun , et al. April 30, 2 | 2002-04-30 |
Method for fabricating semicondutor memory device App 20020000594 - Choi, Eun-Seok ;   et al. | 2002-01-03 |
Method for fabricating semiconductor memory device App 20020001860 - Kweon, Soon-Yong ;   et al. | 2002-01-03 |
Method for manufacturing a capacitor of a semiconductor device Grant 6,066,540 - Yeom , et al. May 23, 2 | 2000-05-23 |