Patent | Date |
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Photoelectronic device, photodiode, and phototransistor Grant 11,424,375 - Yeom , et al. August 23, 2 | 2022-08-23 |
Semiconductor Light Emitting Device And Method For Manufacturing The Same App 20210384374 - YEOM; Geun Young ;   et al. | 2021-12-09 |
Plasma source and plasma generation apparatus using the same Grant 11,127,570 - Yeom , et al. September 21, 2 | 2021-09-21 |
Ion beam etching apparatus Grant 11,120,975 - Yeom , et al. September 14, 2 | 2021-09-14 |
Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film Grant 10,916,670 - Yeom , et al. February 9, 2 | 2021-02-09 |
Apparatus for generating plasma and apparatus for treating substrate having the same Grant 10,784,082 - Yeom , et al. Sept | 2020-09-22 |
Photoelectronic Device, Photodiode, And Phototransistor App 20200274010 - YEOM; Geun Young ;   et al. | 2020-08-27 |
Semiconductor Device, Photoelectronic Device, And Method For Manufacturing Transistion-metal Dichalcogenide Thin Film App 20200176620 - YEOM; Geun Young ;   et al. | 2020-06-04 |
Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film Grant 10,593,819 - Yeom , et al. | 2020-03-17 |
Apparatus For Generating Plasma And Apparatus For Treating Substrate Having The Same App 20190252153 - YEOM; Geun Young ;   et al. | 2019-08-15 |
Plasma Source And Plasma Generation Apparatus Using The Same App 20190221404 - YEOM; Geun Young ;   et al. | 2019-07-18 |
Semiconductor Device, Photoelectronic Device, And Method For Manufacturing Transistion-metal Dichalcogenide Thin Film App 20190044009 - YEOM; Geun Young ;   et al. | 2019-02-07 |
Ion Beam Etching Apparatus App 20190035610 - YEOM; Geun Young ;   et al. | 2019-01-31 |
Method for etching atomic layer of graphene Grant 9,245,752 - Yeom , et al. January 26, 2 | 2016-01-26 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing Grant 8,974,630 - Yeom , et al. March 10, 2 | 2015-03-10 |
Method For Etching Atomic Layer Of Graphine App 20140206192 - YEOM; Geun Young ;   et al. | 2014-07-24 |
Method For Controlling Synchronization Of Pulsed Plasma By Applying Dc Power App 20130049592 - YEOM; Geun Young ;   et al. | 2013-02-28 |
Inductively coupled plasma apparatus Grant 8,293,069 - Yeom , et al. October 23, 2 | 2012-10-23 |
Apparatus and Method For Incorporating Composition Into Substrate Using Neutral Beams App 20120129347 - Yeom; Geun-Young ;   et al. | 2012-05-24 |
Atomic Layer Etching Apparatus And Etching Method Using The Same App 20110192820 - Yeom; Geun-Young ;   et al. | 2011-08-11 |
Atomic Layer Deposition Apparatus Using Neutral Beam And Method Of Depositing Atomic Layer Using The Same App 20110162581 - Yeom; Geun-Young ;   et al. | 2011-07-07 |
Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same Grant 7,919,142 - Yeom , et al. April 5, 2 | 2011-04-05 |
Inductively coupled plasma processing apparatus for very large area using dual frequency Grant 7,842,159 - Yeom , et al. November 30, 2 | 2010-11-30 |
Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same Grant 7,799,706 - Yeom , et al. September 21, 2 | 2010-09-21 |
Plasma generating apparatus and method using neutral beam Grant 7,777,178 - Yeom , et al. August 17, 2 | 2010-08-17 |
Vertical Structure Semiconductor Devices With Improved Light Output App 20100117096 - Yoo; Myung Cheol ;   et al. | 2010-05-13 |
Apparatus And Method For Incorporating Composition Into Substrate Using Neutral Beams App 20090203221 - YEOM; Geun-young ;   et al. | 2009-08-13 |
Neutral Beam-assisted Atomic Layer Chemical Vapor Deposition Apparatus And Method Of Processing Substrate Using The Same App 20090203226 - Yeom; Geun-young ;   et al. | 2009-08-13 |
Inductively Coupled Plasma Processing Apparatus Having Internal Linear Antenna For Large Are Processing App 20090173445 - Yeom; Geun-Young ;   et al. | 2009-07-09 |
Inductively Coupled Plasma Apparatus App 20090133840 - Yeom; Geun-Young ;   et al. | 2009-05-28 |
Apparatus and method for depositing thin film App 20080315188 - Hwang; Tae-Hyung ;   et al. | 2008-12-25 |
Method of forming nano-sized MTJ cell without contact hole Grant 7,397,099 - Hwang , et al. July 8, 2 | 2008-07-08 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing Grant 7,338,577 - Yeom , et al. March 4, 2 | 2008-03-04 |
Plasma Generating Apparatus And Method Using Neutral Beam App 20070221833 - YEOM; Geun-Young ;   et al. | 2007-09-27 |
Method of forming nano-sized MTJ cell without contact hole App 20070164338 - Hwang; Soon-won ;   et al. | 2007-07-19 |
Method of forming nano-sized MTJ cell without contact hole Grant 7,220,601 - Hwang , et al. May 22, 2 | 2007-05-22 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing App 20070101938 - Yeom; Geun-Young ;   et al. | 2007-05-10 |
Inductively Coupled Plasma Processing Apparatus For Very Large Area Using Dual Frequency App 20070012250 - Yeom; Geun-Young ;   et al. | 2007-01-18 |
Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same App 20060213443 - Yeom; Geun-Young ;   et al. | 2006-09-28 |
Layer-by-layer etching apparatus using neutral beam and method of etching using the same Grant 7,094,702 - Yeom , et al. August 22, 2 | 2006-08-22 |
Neutral beam source having electromagnet used for etching semiconductor device Grant 7,060,931 - Yeom , et al. June 13, 2 | 2006-06-13 |
Method of etching substrates Grant 7,012,012 - Yeom , et al. March 14, 2 | 2006-03-14 |
Vertical structure semiconductor devices with improved light output App 20060006554 - Yoo; Myung Cheol ;   et al. | 2006-01-12 |
Inductively coupled plasma apparatus using magnetic field App 20050199186 - Yeom, Geun-Young ;   et al. | 2005-09-15 |
Neutral beam source having electromagnet used for etching semiconductor device App 20050194361 - Yeom, Geun-Young ;   et al. | 2005-09-08 |
3-grid Neutral Beam Source Used For Etching Semiconductor Device App 20050189482 - Yeom, Geun-Young ;   et al. | 2005-09-01 |
3-grid neutral beam source used for etching semiconductor device Grant 6,933,495 - Yeom , et al. August 23, 2 | 2005-08-23 |
Etching apparatus using neutral beam Grant 6,926,799 - Yeom , et al. August 9, 2 | 2005-08-09 |
Method of forming nano-sized MTJ cell without contact hole App 20050158882 - Hwang, Soon-won ;   et al. | 2005-07-21 |
Layer-by-layer etching apparatus using neutral beam and etching method using the same Grant 6,874,443 - Yeom , et al. April 5, 2 | 2005-04-05 |
Method of etching substrates App 20050026396 - Yeom, Geun-young ;   et al. | 2005-02-03 |
Method of etching substrates Grant 6,818,532 - Yeom , et al. November 16, 2 | 2004-11-16 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing App 20040221814 - Yeom, Geun-Young ;   et al. | 2004-11-11 |
Cleaning method of apparatus for manufacturing semiconductor device App 20040182415 - Yoon, Soo Sik ;   et al. | 2004-09-23 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing App 20040060662 - Yeom, Geun-Young ;   et al. | 2004-04-01 |
Method of fabricating capillary discharge plasma display panel using lift-off process Grant 6,685,523 - Kim , et al. February 3, 2 | 2004-02-03 |
Method of etching semiconductor device using neutral beam and apparatus for etching the same App 20040016876 - Yeom, Geun-Young ;   et al. | 2004-01-29 |
Layer-by-layer etching apparatus using neutral beam and method of etching using the same App 20030209519 - Yeom, Geun-Young ;   et al. | 2003-11-13 |
Method of etching substrates App 20030190770 - Yeom, Geun-young ;   et al. | 2003-10-09 |
Layer-by-layer etching apparatus using neutral beam and etching method using the same App 20030098291 - Yeom, Geun-Young ;   et al. | 2003-05-29 |
Etching apparatus using neutral beam App 20030098126 - Yeom, Geun-young ;   et al. | 2003-05-29 |
Method of fabricating capillary discharge plasma display panel using combination of laser and wet etchings App 20020127942 - Kim, Steven ;   et al. | 2002-09-12 |
Method of etching semiconductor device using neutral beam and apparatus for etching the same App 20020060201 - Yeom, Geun-Young ;   et al. | 2002-05-23 |
Method of fabricating capillary discharge plasma display panel using lift-off process App 20020058209 - Kim, Steven ;   et al. | 2002-05-16 |
Thin film type field emission display and method of fabricating the same App 20020011770 - Kim, Steven ;   et al. | 2002-01-31 |