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Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same App 20110269294 - Koh; Cha-won ;   et al. | 2011-11-03 |
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Semiconductor memory devices including diagonal bit lines Grant 8,013,375 - Goo , et al. September 6, 2 | 2011-09-06 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same Grant 8,003,543 - Koh , et al. August 23, 2 | 2011-08-23 |
Semiconductor device having sufficient process margin and method of forming same App 20110156159 - Ryoo; Man-Hyoung ;   et al. | 2011-06-30 |
Method of manufacturing a mask Grant 7,873,935 - Jung , et al. January 18, 2 | 2011-01-18 |
Method for forming patterns of semiconductor device Grant 7,862,988 - Koh , et al. January 4, 2 | 2011-01-04 |
Method of forming pattern Grant 7,842,451 - Koh , et al. November 30, 2 | 2010-11-30 |
Flash Memory Device Using Double Patterning Technology and Method of Manufacturing the Same App 20100290285 - Lee; Doo-youl ;   et al. | 2010-11-18 |
Semiconductor devices having Fin-type active areas and methods of manufacturing the same Grant 7,795,099 - Kang , et al. September 14, 2 | 2010-09-14 |
Flash memory device using double patterning technology and method of manufacturing the same Grant 7,787,301 - Lee , et al. August 31, 2 | 2010-08-31 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same App 20100197139 - Koh; Cha-won ;   et al. | 2010-08-05 |
Semiconductor device having sufficient process margin and method of forming same App 20100190303 - Ryoo; Man-Hyoung ;   et al. | 2010-07-29 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same Grant 7,732,341 - Koh , et al. June 8, 2 | 2010-06-08 |
E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same Grant 7,723,702 - Yoon , et al. May 25, 2 | 2010-05-25 |
Method of forming fine metal patterns for a semiconductor device using a damascene process Grant 7,687,369 - Koh , et al. March 30, 2 | 2010-03-30 |
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Method of forming pattern Grant 7,575,855 - Koh , et al. August 18, 2 | 2009-08-18 |
Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same Grant 7,550,383 - Park , et al. June 23, 2 | 2009-06-23 |
Semiconductor memory devices including offset active regions Grant 7,547,936 - Goo , et al. June 16, 2 | 2009-06-16 |
Methods of fabricating a semiconductor device Grant 7,540,970 - Koh , et al. June 2, 2 | 2009-06-02 |
Method of manufacturing mask Grant 7,539,970 - Jung , et al. May 26, 2 | 2009-05-26 |
Multiple exposure apparatus and multiple exposure method using the same Grant 7,518,704 - Kim , et al. April 14, 2 | 2009-04-14 |
Method of forming a mask structure and method of forming a minute pattern using the same Grant 7,452,825 - Lee , et al. November 18, 2 | 2008-11-18 |
Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key App 20080280381 - Lee; Doo-youl ;   et al. | 2008-11-13 |
Method Of Forming Fine Patterns Of Semiconductor Device App 20080206686 - LEE; Doo-youl ;   et al. | 2008-08-28 |
Method of forming fine metal patterns for a semiconductor device using a damascene process App 20080200026 - Koh; Cha-won ;   et al. | 2008-08-21 |
Semiconductor Device And Methods For Controlling Its Patterns App 20080169862 - PARK; Joon-Soo ;   et al. | 2008-07-17 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness Grant 7,375,390 - Lee , et al. May 20, 2 | 2008-05-20 |
Semiconductor devices having Fin-type active areas and methods of manufacturing the same App 20080105931 - Kang; Hyun-jae ;   et al. | 2008-05-08 |
Method of manufacturing mask App 20080097729 - Jung; Sung-Gon ;   et al. | 2008-04-24 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same App 20080090419 - Koh; Cha-won ;   et al. | 2008-04-17 |
Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Layer Deposition App 20080076070 - Koh; Cha-won ;   et al. | 2008-03-27 |
Flash memory device using double patterning technology and method of manufacturing the same App 20080067550 - Lee; Doo-youl ;   et al. | 2008-03-20 |
Method of forming a mask structure and method of forming a minute pattern using the same App 20080057610 - Lee; Doo-Youl ;   et al. | 2008-03-06 |
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Method of fabricating semiconductor device App 20070197014 - Jeon; Jin-ho ;   et al. | 2007-08-23 |
Method of forming trench in semiconductor device Grant 7,259,065 - Goo , et al. August 21, 2 | 2007-08-21 |
Semiconductor Device Having Sufficient Process Margin And Method Of Forming Same App 20070190812 - RYOO; Man-Hyoung ;   et al. | 2007-08-16 |
E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same App 20070181828 - Yoon; Je-bum ;   et al. | 2007-08-09 |
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Semiconductor device having sufficient process margin and method of forming same Grant 7,221,031 - Ryoo , et al. May 22, 2 | 2007-05-22 |
Semiconductor Memory Device Having High Electrical Performance And Mask And Photolithography Friendliness App 20070108491 - Lee; Jung-Hyeon ;   et al. | 2007-05-17 |
Method for forming patterns of semiconductor device App 20070077524 - Koh; Cha-Won ;   et al. | 2007-04-05 |
Method and system for measuring overlay of semiconductor device App 20070064232 - Yang; Duck-Sun ;   et al. | 2007-03-22 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness Grant 7,176,512 - Lee , et al. February 13, 2 | 2007-02-13 |
Methods of fabricating a semiconductor device App 20070020565 - Koh; Cha-Won ;   et al. | 2007-01-25 |
Multiple exposure apparatus and multiple exposure method using the same App 20060192933 - Kim; Sang-jin ;   et al. | 2006-08-31 |
Semiconductor device having overlay measurement mark and method of fabricating the same App 20060131576 - Koh; Cha-Won ;   et al. | 2006-06-22 |
Method of forming self-aligned contact pads of non-straight type semiconductor memory device Grant 7,064,051 - Lee , et al. June 20, 2 | 2006-06-20 |
Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same App 20060099538 - Park; Joon-Soo ;   et al. | 2006-05-11 |
Semiconductor memory devices including offset active regions App 20060076599 - Goo; Doo-Hoon ;   et al. | 2006-04-13 |
Multi-exposure semiconductor fabrication mask sets and methods of fabricating such multi-exposure mask sets App 20060073396 - Lee; Doo-Youl ;   et al. | 2006-04-06 |
Photomask having a transparency-adjusting layer, method of manufacturing the photomask, and exposure method using the photomask Grant 7,001,697 - Park , et al. February 21, 2 | 2006-02-21 |
Method of forming pattern App 20050282092 - Koh, Cha-Won ;   et al. | 2005-12-22 |
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Method of forming trench in semiconductor device App 20050266646 - Goo, Doo-hoon ;   et al. | 2005-12-01 |
Resist reflow measurement key and method of forming a fine pattern of a semiconductor device using the same App 20050089776 - Lee, Doo-youl ;   et al. | 2005-04-28 |
Method of forming self-aligned contact pads of non-straight type semiconductor memory device App 20050070080 - Lee, Eun-Mi ;   et al. | 2005-03-31 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness App 20050035387 - Lee, Jung-Hyeon ;   et al. | 2005-02-17 |
Semiconductor device having sufficient process margin and method of forming same App 20050012157 - Ryoo, Man-Hyoung ;   et al. | 2005-01-20 |
Beam delivery methods, and systems, and wafer edge exposure apparatus delivering a plurality of laser beams App 20040212809 - Shim, Woo-Seok ;   et al. | 2004-10-28 |
Photomask having a transparency-adjusting layer, method of manufacturing the photomask, and exposure method using the photomask App 20040067422 - Park, Jong-Rak ;   et al. | 2004-04-08 |
Multilayer alignment keys and alignment method using the same App 20010014531 - Yeo, Gi-Sung | 2001-08-16 |
Anti-reflective layer and method for manufacturing semiconductor device using the same Grant 5,593,725 - Park , et al. January 14, 1 | 1997-01-14 |