YEN; Bi-Ming
Patent Applications and Registrations
Patent applications and USPTO patent grants for YEN; Bi-Ming.The latest application filed is for "wafer cleaning apparatus and method".
Company Profile
3.30.28
- YEN; Bi-Ming - Hsinchu TW
- Yen; Bi-Ming - Hsin-chu TW
- Yen; Bi-Ming - Hsin-chu City TW
- YEN; Bi-Ming - Hsinchu City TW
- Yen; Bi-Ming - Fremont CA
Patent Activity
| Patent | Date |
|---|---|
| Wafer Cleaning Apparatus And Method App 20210313200 - HUANG; Jieh-Chau ; et al. | 2021-10-07 |
| Wafer cleaning apparatus and method Grant 11,056,358 - Huang , et al. July 6, 2 | 2021-07-06 |
| Method of Removing an Etch Mask App 20200259017 - A1 | 2020-08-13 |
| Method of removing an etch mask Grant 10,636,908 - Chu , et al. | 2020-04-28 |
| Method of removing an etch mask Grant 10,553,720 - Chu , et al. Fe | 2020-02-04 |
| Wafer Cleaning Apparatus And Method App 20190148181 - HUANG; Jieh-Chau ; et al. | 2019-05-16 |
| Method of Removing an Etch Mask App 20190097052 - Chu; Chun-Han ; et al. | 2019-03-28 |
| Method of Removing an Etch Mask App 20180151735 - Chu; Chun-Han ; et al. | 2018-05-31 |
| Multi-line width pattern created using photolithography Grant 9,733,570 - Tai , et al. August 15, 2 | 2017-08-15 |
| Etching process Grant 9,601,333 - Yeh , et al. March 21, 2 | 2017-03-21 |
| Method of making a semiconductor device using a barrier and antireflective coating (BARC) layer Grant 9,589,798 - Li , et al. March 7, 2 | 2017-03-07 |
| Method of making a semiconductor device using multiple layer sets Grant 9,455,156 - Yen , et al. September 27, 2 | 2016-09-27 |
| Etching Process App 20160099151 - Yeh; Ming-Hsi ; et al. | 2016-04-07 |
| Multi-line Width Pattern Created Using Photolithography App 20160033871 - TAI; CHUN-LIANG ; et al. | 2016-02-04 |
| Method Of Making A Semiconductor Device Using A Barrier And Antireflective Coating (barc) Layer App 20160020088 - LI; Tsai-Chun ; et al. | 2016-01-21 |
| Method Of Making A Semiconductor Device Using Multiple Layer Sets App 20160013071 - YEN; Bi-Ming ; et al. | 2016-01-14 |
| Multi-line width pattern created using photolithography Grant 9,176,388 - Tai , et al. November 3, 2 | 2015-11-03 |
| Method of making a semiconductor device using a bottom antireflective coating (BARC) layer Grant 9,159,581 - Li , et al. October 13, 2 | 2015-10-13 |
| Method of making a semiconductor device using multiple layer sets Grant 9,159,580 - Yen , et al. October 13, 2 | 2015-10-13 |
| Multi-line Width Pattern Created Using Photolithography App 20150125788 - TAI; CHUN-LIANG ; et al. | 2015-05-07 |
| In-situ photoresist strip during plasma etching of active hard mask Grant 8,912,633 - Cho , et al. December 16, 2 | 2014-12-16 |
| Uniform etch system Grant 8,801,892 - Larson , et al. August 12, 2 | 2014-08-12 |
| Method Of Making A Semiconductor Device Using Multiple Layer Sets App 20140167227 - YEN; Bi-Ming ; et al. | 2014-06-19 |
| Method Of Making A Semiconductor Device Using A Bottom Antireflective Coating (barc) Layer App 20140145313 - LI; Tsai-Chun ; et al. | 2014-05-29 |
| Triode reactor design with multiple radiofrequency powers Grant 8,652,298 - Dhindsa , et al. February 18, 2 | 2014-02-18 |
| Triode Reactor Design With Multiple Radiofrequency Powers App 20130126475 - Dhindsa; Rajinder ; et al. | 2013-05-23 |
| In-situ Photoresist Strip During Plasma Etching Of Active Hard Mask App 20130001754 - Cho; Sangjun ; et al. | 2013-01-03 |
| In-situ photoresist strip during plasma etching of active hard mask Grant 8,283,255 - Cho , et al. October 9, 2 | 2012-10-09 |
| Method for low-K dielectric etch with reduced damage Grant 8,236,188 - Ji , et al. August 7, 2 | 2012-08-07 |
| Process for wafer temperature verification in etch tools Grant 7,951,616 - Kanarik , et al. May 31, 2 | 2011-05-31 |
| Method For Low-k Dielectric Etch With Reduced Damage App 20100261352 - Ji; Bing ; et al. | 2010-10-14 |
| Lag control Grant 7,789,991 - Worsham , et al. September 7, 2 | 2010-09-07 |
| Process For Wafer Temperature Verification In Etch Tools App 20100022033 - KANARIK; Keren J. ; et al. | 2010-01-28 |
| Methods of sputtering a protective coating on a semiconductor substrate App 20090020417 - Kim; Jisoo ; et al. | 2009-01-22 |
| In-situ photoresist strip during plasma etching of active hard mask App 20080293249 - Cho; Sangjun ; et al. | 2008-11-27 |
| Methods for silicon electrode assembly etch rate and etch uniformity recovery Grant 7,442,114 - Huang , et al. October 28, 2 | 2008-10-28 |
| Uniform Etch System App 20080210377 - Larson; Dean J. ; et al. | 2008-09-04 |
| Uniform etch system Grant 7,371,332 - Larson , et al. May 13, 2 | 2008-05-13 |
| Lag control Grant 7,307,025 - Worsham , et al. December 11, 2 | 2007-12-11 |
| Waferless Automatic Cleaning After Barrier Removal App 20070128849 - YAO; Xiaoqiang Sean ; et al. | 2007-06-07 |
| Waferless automatic cleaning after barrier removal Grant 7,211,518 - Yao , et al. May 1, 2 | 2007-05-01 |
| Gas distribution system with tuning gas Grant 7,169,231 - Larson , et al. January 30, 2 | 2007-01-30 |
| Methods for the optimization of substrate etching in a plasma processing system Grant 7,078,350 - Kim , et al. July 18, 2 | 2006-07-18 |
| Methods for silicon electrode assembly etch rate and etch uniformity recovery App 20060138081 - Huang; Tuochuan ; et al. | 2006-06-29 |
| Method for selectively etching organosilicate glass with respect to a doped silicon carbide Grant 7,041,230 - Su , et al. May 9, 2 | 2006-05-09 |
| Methods and apparatus for inspecting contact openings in a plasma processing system Grant 6,979,579 - Kim , et al. December 27, 2 | 2005-12-27 |
| Waferless automatic cleaning after barrier removal App 20050233590 - Yao, Xiaoqiang Sean ; et al. | 2005-10-20 |
| Methods for the optimization of substrate etching in a plasma processing system App 20050205519 - Kim, Jisoo ; et al. | 2005-09-22 |
| Etching a metal hard mask for an integrated circuit structure Grant 6,930,048 - Li , et al. August 16, 2 | 2005-08-16 |
| Method for selectively etching organosilicate glass with respect to a doped silicon carbide App 20040140289 - Su, Xingcai ; et al. | 2004-07-22 |
| Uniform etch system App 20040112540 - Larson, Dean J. ; et al. | 2004-06-17 |
| Gas distribution system with tuning gas App 20040112538 - Larson, Dean J. ; et al. | 2004-06-17 |
| Uniform etch system App 20040112539 - Larson, Dean J. ; et al. | 2004-06-17 |
| Configurable plasma volume etch chamber Grant 6,527,911 - Yen , et al. March 4, 2 | 2003-03-04 |
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