YE; Rubin
Patent Applications and Registrations
Patent applications and USPTO patent grants for YE; Rubin.The latest application filed is for "lower electrode assembly and plasma processing device".
- YE; Rubin - Shanghai CN
| Patent | Date |
|---|---|
| Lower Electrode Assembly And Plasma Processing Device App 20220246406 - ZHANG; Yichuan ; et al. | 2022-08-04 |
| Plasma Reactor App 20220208521 - TU; Leyi ; et al. | 2022-06-30 |
| Electrostatic Chuck, Method Of Manufacturing Electrostatic Chuck, And Plasma Processing Apparatus App 20210118716 - YE; Rubin ; et al. | 2021-04-22 |
| Method And Device For Matching Impedance Of Pulse Radio Frequency Plasma App 20200185196 - YE; Rubin ; et al. | 2020-06-11 |
| Temperature adjusting apparatus and method for a focus ring Grant 10,593,520 - Wu , et al. | 2020-03-17 |
| Lift Pin Assembly, An Electrostatic Chuck And A Processing Apparatus Where The Electrostatic Chuck Is Located App 20200083087 - Ni; Tuqiang ; et al. | 2020-03-12 |
| Temperature Adjusting Apparatus And Method For A Focus Ring App 20170186590 - Wu; Lei ; et al. | 2017-06-29 |
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