Yavelberg; Simon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yavelberg; Simon.The latest application filed is for "polishing pad with secondary window seal".
Company Profile
9.31.38
- Yavelberg; Simon - Cupertino CA
Patent Activity
| Patent | Date |
|---|---|
| Retaining ring having inner surfaces with features Grant 11,453,099 - Reedy , et al. September 27, 2 | 2022-09-27 |
| Multiple sequential linear powder dispensers for additive manufacturing Grant 11,446,740 - Rowland , et al. September 20, 2 | 2022-09-20 |
| Edge ring for a substrate processing chamber Grant 11,417,561 - Raj , et al. August 16, 2 | 2022-08-16 |
| Chemical mechanical polishing retaining ring with integrated sensor Grant 10,946,496 - Yavelberg March 16, 2 | 2021-03-16 |
| Polishing Pad with Secondary Window Seal App 20200361054 - Alagarsamy; Rajkumar ; et al. | 2020-11-19 |
| Polishing pad with secondary window seal Grant 10,744,618 - Alagarsamy , et al. A | 2020-08-18 |
| Edge Ring For A Substrate Processing Chamber App 20200161165 - RAJ; Govinda ; et al. | 2020-05-21 |
| Surface acoustic wave sensors in semiconductor processing equipment Grant 10,656,100 - Gopalan , et al. | 2020-05-19 |
| Retaining Ring Having Inner Surfaces with Features App 20200114489 - Reedy; Steven Mark ; et al. | 2020-04-16 |
| Edge ring for a substrate processing chamber Grant 10,553,473 - Raj , et al. Fe | 2020-02-04 |
| Chemical mechanical polishing smart ring Grant 10,513,008 - Huang , et al. Dec | 2019-12-24 |
| Retaining ring having inner surfaces with features Grant 10,500,695 - Reedy , et al. Dec | 2019-12-10 |
| Retaining ring for lower wafer defects Grant 10,399,202 - Hu , et al. Sep | 2019-09-03 |
| Magnetron having enhanced cooling characteristics Grant 10,290,459 - Raj , et al. | 2019-05-14 |
| Surface Acoustic Wave Sensors In Semiconductor Processing Equipment App 20190137415 - GOPALAN; Ramesh ; et al. | 2019-05-09 |
| Magnetron Having Enhanced Cooling Characteristics App 20190051485 - RAJ; Govinda ; et al. | 2019-02-14 |
| Magnetron having enhanced cooling characteristics Grant 10,141,153 - Raj , et al. Nov | 2018-11-27 |
| Surface acoustic wave sensors in semiconductor processing equipment Grant 10,094,788 - Gopalan , et al. October 9, 2 | 2018-10-09 |
| Multiple Sequential Linear Powder Dispensers For Additive Manufacturing App 20180221948 - Rowland; Christopher A. ; et al. | 2018-08-09 |
| Linear Powder Dispenser That Raster Scans For Additive Manufacturing App 20180221949 - Rowland; Christopher A. ; et al. | 2018-08-09 |
| External clamp ring for a chemical mechanical polishing carrier head Grant 10,029,346 - Ala , et al. July 24, 2 | 2018-07-24 |
| Chemical Mechanical Polishing Retaining Ring With Integrated Sensor App 20180133863 - YAVELBERG; SIMON | 2018-05-17 |
| Chemical Mechanical Polishing Smart Ring App 20180071889 - HUANG; Zubin ; et al. | 2018-03-15 |
| Independently Controllable Powder Delivery For Additive Manufacturing App 20180065178 - Rowland; Christopher A. ; et al. | 2018-03-08 |
| Polishing Pad with Secondary Window Seal App 20180065227 - Alagarsamy; Rajkumar ; et al. | 2018-03-08 |
| Chemical mechanical polishing retaining ring with integrated sensor Grant 9,878,421 - Yavelberg January 30, 2 | 2018-01-30 |
| Corrosion resistant retaining rings Grant 9,744,640 - Sheelavant , et al. August 29, 2 | 2017-08-29 |
| Coated retaining ring Grant 9,731,399 - Martin , et al. August 15, 2 | 2017-08-15 |
| Polishing pad with secondary window seal Grant 9,731,397 - Alagarsamy , et al. August 15, 2 | 2017-08-15 |
| Additive Manufacturing With Laser And Plasma App 20170203364 - Ramaswamy; Kartik ; et al. | 2017-07-20 |
| Layerwise Heating, Linewise Heating, Plasma Heating And Multiple Feed Materials In Additive Manufacturing App 20170203363 - Rowland; Christopher A. ; et al. | 2017-07-20 |
| Materials And Formulations For Three-dimensional Printing App 20170189965 - VAIDYA; Kaushik ; et al. | 2017-07-06 |
| Additive Manufacturing With Laser And Gas Flow App 20170182556 - Ramaswamy; Kartik ; et al. | 2017-06-29 |
| Surface Acoustic Wave Sensors In Semiconductor Processing Equipment App 20170176349 - GOPALAN; Ramesh ; et al. | 2017-06-22 |
| Corrosion Resistant Retaining Rings App 20170106495 - SHEELAVANT; Gangadhar ; et al. | 2017-04-20 |
| External Clamp Ring For A Checmical Mechanical Polishing Carrier Head App 20170106496 - ALA; Patrick ; et al. | 2017-04-20 |
| 3d Printed Magnetron Having Enhanced Cooling Characteristics App 20170084418 - RAJ; Govinda ; et al. | 2017-03-23 |
| Retaining Ring Having Inner Surfaces with Features App 20160346897 - Reedy; Steven Mark ; et al. | 2016-12-01 |
| Retaining Ring For Lower Wafer Defects App 20160271750 - HU; Yongqi ; et al. | 2016-09-22 |
| Recording measurements by sensors for a carrier head Grant 9,403,256 - Yavelberg August 2, 2 | 2016-08-02 |
| High sampling rate sensor buffering in semiconductor processing systems Grant 9,384,122 - Yavelberg July 5, 2 | 2016-07-05 |
| Edge Ring For A Substrate Processing Chamber App 20160181142 - RAJ; Govinda ; et al. | 2016-06-23 |
| Surface Profile Modifications For Extended Life Of Consumable Parts In Semiconductor Processing Equipment App 20160155657 - GOPALAN; Ramesh ; et al. | 2016-06-02 |
| Substrate polishing and fluid recycling system Grant 9,339,914 - Yavelberg May 17, 2 | 2016-05-17 |
| Chemical Mechanical Polishing Retaining Ring With Integrated Sensor App 20150360343 - YAVELBERG; SIMON | 2015-12-17 |
| Polishing Pad with Secondary Window Seal App 20150126100 - Alagarsamy; Rajkumar ; et al. | 2015-05-07 |
| Coated Retaining Ring App 20150099437 - MARTIN; Daniel L. ; et al. | 2015-04-09 |
| Polishing pad with secondary window seal Grant 8,961,266 - Alagarsamy , et al. February 24, 2 | 2015-02-24 |
| Polishing Pad with Secondary Window Seal App 20140273762 - Alagarsamy; Rajkumar ; et al. | 2014-09-18 |
| Recording Measurements by Sensors for a Carrier Head App 20140138355 - Yavelberg; Simon | 2014-05-22 |
| Substrate Polishing And Fluid Recycling System App 20140069890 - YAVELBERG; Simon | 2014-03-13 |
| High Sampling Rate Sensor Buffering in Semiconductor Processing Systems App 20130332682 - Yavelberg; Simon | 2013-12-12 |
| Roller assembly for a brush cleaning device in a cleaning module Grant 8,250,695 - Karuppiah , et al. August 28, 2 | 2012-08-28 |
| Roller Assembly For A Brush Cleaning Device In A Cleaning Module App 20110079245 - Karuppiah; Lakshmanan ; et al. | 2011-04-07 |
| Method Of Calibrating Or Compensating Sensor For Measuring Property Of A Target Surface App 20090042481 - Mavliev; Rashid A. ; et al. | 2009-02-12 |
| Methods And Apparatus For Liquid Chemical Delivery App 20090032075 - Lee; Richard Kok Hwee ; et al. | 2009-02-05 |
| Pad characterization tool Grant 7,407,433 - Mavliev , et al. August 5, 2 | 2008-08-05 |
| Multiple Substrate Vapor Drying Systems And Methods App 20080155852 - OLGADO; DONALD J.K. ; et al. | 2008-07-03 |
| Six headed carousel Grant 7,241,203 - Chen , et al. July 10, 2 | 2007-07-10 |
| Pad Characterization Tool App 20070099545 - Mavliev; Rashid A. ; et al. | 2007-05-03 |
| Load cup for chemical mechanical polishing Grant 7,044,832 - Yilmaz , et al. May 16, 2 | 2006-05-16 |
| Methods and apparatus for liquid chemical delivery App 20050252547 - Lee, Richard Kok Hwee ; et al. | 2005-11-17 |
| Load cup for chemical mechanical polishing App 20050176349 - Yilmaz, Alpay ; et al. | 2005-08-11 |
| Closed-loop dome thermal control apparatus for a semiconductor wafer processing system Grant 6,367,410 - Leahey , et al. April 9, 2 | 2002-04-09 |
| Temperature control system for process chamber Grant 6,326,597 - Lubomirsky , et al. December 4, 2 | 2001-12-04 |
| Insulation jacket for fluid carrying conduits Grant 5,775,379 - Manofsky , et al. July 7, 1 | 1998-07-07 |
| Process gas delivery system Grant 5,716,877 - Yavelberg February 10, 1 | 1998-02-10 |
| Process gas delivery system Grant 5,641,359 - Yavelberg June 24, 1 | 1997-06-24 |
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