| Patent | Date |
|---|
Method for manufacturing a contact pad, method for manufacturing a semiconductor device using same, and semiconductor device
Grant 11,171,050 - Yatsuda , et al. November 9, 2 | 2021-11-09 |
Plasma etching method
Grant 11,120,999 - Yatsuda , et al. September 14, 2 | 2021-09-14 |
Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus
Grant 11,056,349 - Yatsuda , et al. July 6, 2 | 2021-07-06 |
Forming method of hard mask
Grant 11,004,684 - Iwashita , et al. May 11, 2 | 2021-05-11 |
Semiconductor Device Manufacturing Method
App 20210118727 - YATSUDA; Koichi ; et al. | 2021-04-22 |
Semiconductor device manufacturing method
Grant 10,910,259 - Yatsuda , et al. February 2, 2 | 2021-02-02 |
Method For Manufacturing Semiconductor Device
App 20210020758 - YATSUDA; Koichi | 2021-01-21 |
Plasma Etching Method
App 20200381264 - YATSUDA; Koichi ; et al. | 2020-12-03 |
Method of forming FinFET source/drain contact
Grant 10,840,359 - Yatsuda November 17, 2 | 2020-11-17 |
Method of Fabricating Semiconductor Device, Vacuum Processing Apparatus and Substrate Processing Apparatus
App 20200152475 - YATSUDA; Koichi ; et al. | 2020-05-14 |
Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus
Grant 10,593,556 - Yatsuda , et al. | 2020-03-17 |
Method For Manufacturing A Contact Pad, Method For Manufacturing A Semiconductor Device Using Same, And Semiconductor Device
App 20200035553 - YATSUDA; Koichi ; et al. | 2020-01-30 |
Method of manufacturing semiconductor device
Grant 10,325,780 - Yatsuda , et al. | 2019-06-18 |
Semiconductor Device Manufacturing Method
App 20190181039 - YATSUDA; Koichi ; et al. | 2019-06-13 |
Forming Method Of Hard Mask
App 20190157083 - Iwashita; Mitsuaki ; et al. | 2019-05-23 |
Method For Manufacturing Semiconductor Device
App 20190109205 - YATSUDA; Koichi | 2019-04-11 |
Forming method of hard mask, forming apparatus of hard mask and recording medium
Grant 10,224,202 - Iwashita , et al. | 2019-03-05 |
Method Of Manufacturing Semiconductor Device
App 20180158693 - Yatsuda; Koichi ; et al. | 2018-06-07 |
Sliding bearing and method for manufacturing sliding bearing
Grant 9,879,718 - Tsuboi , et al. January 30, 2 | 2018-01-30 |
Method Of Fabricating Semiconductor Device, Vacuum Processing Apparatus And Substrate Processing Apparatus
App 20180025917 - YATSUDA; Koichi ; et al. | 2018-01-25 |
Sliding bearing
Grant 9,863,466 - Tsuboi , et al. January 9, 2 | 2018-01-09 |
Forming Method Of Hard Mask, Forming Apparatus Of Hard Mask And Recording Medium
App 20170287713 - Iwashita; Mitsuaki ; et al. | 2017-10-05 |
Sliding Bearing And Method For Manufacturing Sliding Bearing
App 20170219008 - TSUBOI; Yoichiro ; et al. | 2017-08-03 |
Sliding Bearing
App 20170204900 - TSUBOI; Yoichiro ; et al. | 2017-07-20 |
Method For Manufacturing Semiconductor Device
App 20150194441 - YATSUDA; Koichi ; et al. | 2015-07-09 |
Substrate processing method
Grant 8,685,267 - Yatsuda , et al. April 1, 2 | 2014-04-01 |
Plasma etching apparatus, plasma etching method and storage medium
Grant 8,641,916 - Yatsuda , et al. February 4, 2 | 2014-02-04 |
Semiconductor Device Manufacturing Method
App 20120190206 - YATSUDA; Koichi ; et al. | 2012-07-26 |
Forming method of etching mask, control program and program storage medium
Grant 8,198,183 - Yatsuda , et al. June 12, 2 | 2012-06-12 |
Substrate processing method and substrate processing apparatus
Grant 8,114,781 - Nishimura , et al. February 14, 2 | 2012-02-14 |
Substrate Processing Method
App 20110318933 - Yatsuda; Koichi ; et al. | 2011-12-29 |
Semiconductor Device Manufacturing Method
App 20110104901 - Yatsuda; Koichi ; et al. | 2011-05-05 |
Method of manufacturing semiconductor device
Grant 7,871,908 - Yatsuda , et al. January 18, 2 | 2011-01-18 |
Circular Ring-shaped Member For Plasma Process And Plasma Processing Apparatus
App 20100300622 - Yatsuda; Koichi ; et al. | 2010-12-02 |
Plasma Processing Apparatus
App 20100220081 - Yatsuda; Koichi | 2010-09-02 |
Plasma Etching Apparatus, Plasma Etching Method And Storage Medium
App 20100190350 - YATSUDA; Koichi ; et al. | 2010-07-29 |
Method Of Manufacturing Semiconductor Device
App 20100144155 - YATSUDA; Koichi ; et al. | 2010-06-10 |
Forming Method Of Etching Mask, Control Program And Program Storage Medium
App 20090291560 - Yatsuda; Koichi ; et al. | 2009-11-26 |
Manufacturing method, manufacturing apparatus, control program and program recording medium of semiconductor device
App 20090087990 - Yatsuda; Koichi ; et al. | 2009-04-02 |
Manufacturing method, manufacturing apparatus, control program and program recording medium of semicontructor device
App 20090087991 - Yatsuda; Koichi ; et al. | 2009-04-02 |
Method For Forming Etching Mask, Control Program And Program Storage Medium
App 20090081565 - Yatsuda; Koichi ; et al. | 2009-03-26 |
Substrate Processing Method And Substrate Processing Apparatus
App 20080003836 - NISHIMURA; Eiichi ; et al. | 2008-01-03 |
Etching method and plasma etching apparatus
App 20050103441 - Honda, Masanobu ; et al. | 2005-05-19 |
Plasma etching method
App 20020084254 - Yatsuda, Koichi ; et al. | 2002-07-04 |
Plasma processing apparatus
Grant 6,156,151 - Komino , et al. December 5, 2 | 2000-12-05 |
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