loadpatents
Patent applications and USPTO patent grants for Yasumatsu; Yasushi.The latest application filed is for "ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly".
Patent | Date |
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Ion Beam Processing Apparatus, Electrode Assembly, And Method Of Cleaning Electrode Assembly App 20220262598 - Yasumatsu; Yasushi ;   et al. | 2022-08-18 |
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly Grant 11,355,314 - Yasumatsu , et al. June 7, 2 | 2022-06-07 |
Substrate Processing Apparatus And Substrate Processing Method App 20220139686 - TAKANAMI; Yuji ;   et al. | 2022-05-05 |
Substrate processing apparatus and substrate processing method Grant 11,270,873 - Takanami , et al. March 8, 2 | 2022-03-08 |
Ion Beam Processing Apparatus, Electrode Assembly, And Method Of Cleaning Electrode Assembly App 20210104377 - Yasumatsu; Yasushi ;   et al. | 2021-04-08 |
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly Grant 10,879,040 - Yasumatsu , et al. December 29, 2 | 2020-12-29 |
Substrate Processing Apparatus And Substrate Processing Method App 20200343080 - TAKANAMI; Yuji ;   et al. | 2020-10-29 |
Sputtering apparatus and substrate processing apparatus Grant 10,615,012 - Ishihara , et al. | 2020-04-07 |
Ion Beam Processing Apparatus, Electrode Assembly, And Method Of Cleaning Electrode Assembly App 20190108973 - Yasumatsu; Yasushi ;   et al. | 2019-04-11 |
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly Grant 10,224,179 - Yasumatsu , et al. | 2019-03-05 |
Sputtering Apparatus And Substrate Processing Apparatus App 20180261440 - Ishihara; Shigenori ;   et al. | 2018-09-13 |
Sputtering apparatus and substrate processing apparatus Grant 10,062,551 - Ishihara , et al. August 28, 2 | 2018-08-28 |
Sputtering apparatus and substrate processing apparatus Grant 9,997,339 - Ishihara , et al. June 12, 2 | 2018-06-12 |
Grid, method of manufacturing the same, and ion beam processing apparatus Grant 9,721,747 - Tsujiyama , et al. August 1, 2 | 2017-08-01 |
Grid, Method Of Manufacturing The Same, And Ion Beam Processing Apparatus App 20170084419 - Tsujiyama; Masashi ;   et al. | 2017-03-23 |
Processing apparatus and shield Grant 9,583,304 - Yasumatsu February 28, 2 | 2017-02-28 |
Ion Beam Etching Apparatus And Ion Beam Generator App 20160351377 - OKAMOTO; Naoyuki ;   et al. | 2016-12-01 |
Processing apparatus and shield Grant 9,422,619 - Yasumatsu August 23, 2 | 2016-08-23 |
Film-forming apparatus Grant 9,322,095 - Kajihara , et al. April 26, 2 | 2016-04-26 |
Film-forming apparatus Grant 9,322,094 - Kajihara , et al. April 26, 2 | 2016-04-26 |
Ion Beam Processing Apparatus, Electrode Assembly, And Method Of Cleaning Electrode Assembly App 20160056016 - Yasumatsu; Yasushi ;   et al. | 2016-02-25 |
Grid Assembly And Ion Beam Etching Apparatus App 20150287567 - TSUJIYAMA; MASASHI ;   et al. | 2015-10-08 |
Sputtering Apparatus And Substrate Processing Apparatus App 20150262797 - ISHIHARA; Shigenori ;   et al. | 2015-09-17 |
Sputtering Apparatus And Substrate Processing Apparatus App 20150262796 - ISHIHARA; Shigenori ;   et al. | 2015-09-17 |
Film-forming apparatus Grant 9,109,285 - Kajihara , et al. August 18, 2 | 2015-08-18 |
Sputtering Apparatus App 20140291148 - ISHIMURA; Toru ;   et al. | 2014-10-02 |
Processing Device And Shield App 20140283743 - YASUMATSU; Yasushi | 2014-09-25 |
Processing Apparatus And Shield App 20140262766 - Yasumatsu; Yasushi | 2014-09-18 |
Film-forming Apparatus App 20140102889 - Kajihara; Yuji ;   et al. | 2014-04-17 |
Film-forming Apparatus App 20140054167 - Kajihara; Yuji ;   et al. | 2014-02-27 |
Film-forming Apparatus App 20140034489 - Kajihara; Yuji ;   et al. | 2014-02-06 |
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