| Patent | Date |
|---|
Charged particle beam writing method and charged particle beam writing apparatus
Grant 11,456,153 - Yasui September 27, 2 | 2022-09-27 |
Charged particle beam writing method and charged particle beam writing apparatus
Grant 11,443,918 - Yasui , et al. September 13, 2 | 2022-09-13 |
Writing Data Generating Method And Multi Charged Particle Beam Writing Apparatus
App 20220221800 - Yasui; Kenichi ; et al. | 2022-07-14 |
Writing data generating method and multi charged particle beam writing apparatus
Grant 11,327,408 - Yasui , et al. May 10, 2 | 2022-05-10 |
Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, And Computer-readable Recording Medium
App 20220100099 - YASUI; Kenichi ; et al. | 2022-03-31 |
Data Generation Method And Charged Particle Beam Irradiation Device
App 20220093360 - YASUI; Kenichi | 2022-03-24 |
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium
Grant 11,199,781 - Yasui , et al. December 14, 2 | 2021-12-14 |
Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
Grant 10,971,331 - Sakamoto , et al. April 6, 2 | 2021-04-06 |
Charged Particle Beam Writing Method And Charged Particle Beam Writing Apparatus
App 20200357604 - YASUI; Kenichi ; et al. | 2020-11-12 |
Charged Particle Beam Writing Method And Charged Particle Beam Writing Apparatus
App 20200357605 - YASUI; Kenichi | 2020-11-12 |
Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, And Computer-readab
App 20200278612 - YASUI; Kenichi ; et al. | 2020-09-03 |
Data processing method, charged particle beam writing apparatus, and charged particle beam writing system
Grant 10,714,312 - Yasui | 2020-07-14 |
Drawing data generating method
Grant 10,685,435 - Hara , et al. | 2020-06-16 |
Writing Data Generating Method And Multi Charged Particle Beam Writing Apparatus
App 20200117095 - YASUI; Kenichi ; et al. | 2020-04-16 |
Writing Data Generation Method, Computer-readable Recording Medium On Which Program Is Recorded, And Multi-charged Particle Beam
App 20200051782 - SAKAMOTO; Shinji ; et al. | 2020-02-13 |
Method of creating writing data
Grant 10,503,860 - Hara , et al. Dec | 2019-12-10 |
Generating method of drawing data and charged particle beam drawing method
Grant 10,445,450 - Hara , et al. Oc | 2019-10-15 |
Drawing data creation method and charged particle beam drawing apparatus
Grant 10,199,199 - Hara , et al. Fe | 2019-02-05 |
Data Processing Method, Charged Particle Beam Writing Apparatus, And Charged Particle Beam Writing System
App 20180366297 - YASUI; Kenichi | 2018-12-20 |
Data processing method, charged particle beam writing method, and charged particle beam writing apparatus
Grant 10,096,452 - Yasui , et al. October 9, 2 | 2018-10-09 |
Method Of Creating Writing Data
App 20180285505 - Hara; Shigehiro ; et al. | 2018-10-04 |
Method for generating writing data
Grant 9,984,853 - Hara , et al. May 29, 2 | 2018-05-29 |
Generating Method Of Drawing Data And Charged Particle Beam Drawing Method
App 20180060474 - HARA; Shigehiro ; et al. | 2018-03-01 |
Writing data verification method and multi-charged particle beam writing apparatus
Grant 9,846,760 - Yasui December 19, 2 | 2017-12-19 |
Charged particle beam drawing apparatus and drawing data generation method
Grant 9,779,913 - Hara , et al. October 3, 2 | 2017-10-03 |
Charged particle beam drawing apparatus, format check apparatus and format check method
Grant 9,715,994 - Yasui July 25, 2 | 2017-07-25 |
Drawing Data Generating Method
App 20170193650 - Hara; Shigehiro ; et al. | 2017-07-06 |
Data Processing Method, Charged Particle Beam Writing Method, And Charged Particle Beam Writing Apparatus
App 20170169994 - Yasui; Kenichi ; et al. | 2017-06-15 |
Charged particle beam drawing apparatus, information processing apparatus and pattern inspection apparatus
Grant 9,659,745 - Yasui May 23, 2 | 2017-05-23 |
Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus
Grant 9,558,315 - Yasui , et al. January 31, 2 | 2017-01-31 |
Drawing Data Creation Method And Charged Particle Beam Drawing Apparatus
App 20170018404 - HARA; Shigehiro ; et al. | 2017-01-19 |
Charged Particle Beam Drawing Apparatus And Drawing Data Generation Method
App 20160284510 - HARA; Shigehiro ; et al. | 2016-09-29 |
Method For Generating Writing Data
App 20160155609 - HARA; Shigehiro ; et al. | 2016-06-02 |
Writing Data Verification Method And Multi-charged Particle Beam Writing Apparatus
App 20160110491 - YASUI; Kenichi | 2016-04-21 |
Method Of Generating Write Data, Multi Charged Particle Beam Writing Apparatus, And Pattern Inspection Apparatus
App 20160103945 - YASUI; Kenichi ; et al. | 2016-04-14 |
Charged Particle Beam Drawing Apparatus, Information Processing Apparatus And Pattern Inspection Apparatus
App 20150279617 - YASUI; Kenichi | 2015-10-01 |
Charged Particle Beam Drawing Apparatus, Format Check Apparatus And Format Check Method
App 20140319384 - YASUI; Kenichi | 2014-10-30 |
Vehicle power transmission system
Grant 7,357,210 - Ima , et al. April 15, 2 | 2008-04-15 |
Vehicle power transmission system
App 20050224262 - Ima, Akihiro ; et al. | 2005-10-13 |
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