Patent | Date |
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Pressure Type Flowmeter And Fluid Control Device App 20220082416 - HORIGUCHI; Hiroshi ;   et al. | 2022-03-17 |
Fluid control valve and fluid control device Grant 11,193,509 - Yasuda , et al. December 7, 2 | 2021-12-07 |
Fluid control valve and fluid control device Grant 11,187,343 - Yasuda November 30, 2 | 2021-11-30 |
Fluid control apparatus, fluid control system, fluid control method, and program recording medium Grant 11,162,176 - Yasuda , et al. November 2, 2 | 2021-11-02 |
Calibration data generation apparatus, calibration data generation method, and flow rate control device Grant 11,036,242 - Hoke , et al. June 15, 2 | 2021-06-15 |
Flow rate ratio control device with flow velocity control mode Grant 10,996,689 - Yasuda , et al. May 4, 2 | 2021-05-04 |
Fluid control device, recording medium recorded with control program, and control method Grant 10,969,019 - Yasuda , et al. April 6, 2 | 2021-04-06 |
Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them Grant 10,704,936 - Mudd , et al. | 2020-07-07 |
Fluid Control Device App 20200208656 - Horiguchi; Hiroshi ;   et al. | 2020-07-02 |
Piezoelectric Actuator And Fluid Control Valve App 20200185588 - Hayashi; Shigeyuki ;   et al. | 2020-06-11 |
Flow rate control apparatus, flow rate control method, and program recording medium Grant 10,545,514 - Yasuda , et al. Ja | 2020-01-28 |
Fluid Control Valve And Fluid Control Device App 20190271403 - Yasuda; Tadahiro | 2019-09-05 |
Fluid Control Valve And Fluid Control Device App 20190271335 - Yasuda; Tadahiro ;   et al. | 2019-09-05 |
Flow Rate Ratio Control Device, Program For Flow Rate Ratio Control Device, And Flow Rate Ratio Control Method App 20190204857 - Yasuda; Tadahiro ;   et al. | 2019-07-04 |
Calibration Data Generation Apparatus, Calibration Data Generation Method, And Flow Rate Control Device App 20190196517 - Hoke; Thomas ;   et al. | 2019-06-27 |
Flow Rate Control Apparatus, Flow Rate Control Method, And Program Recording Medium App 20190033896 - Yasuda; Tadahiro ;   et al. | 2019-01-31 |
Fluid Control Apparatus, Fluid Control System, Fluid Control Method, And Program Recording Medium App 20190017172 - Yasuda; Tadahiro ;   et al. | 2019-01-17 |
Fluid Control Device, Recording Medium Recorded With Control Program, And Control Method App 20180356845 - Yasuda; Tadahiro ;   et al. | 2018-12-13 |
Fluid control valve Grant 10,114,385 - Yasuda , et al. October 30, 2 | 2018-10-30 |
Flow Rate Characteristic Function Identification Method, Flow Rate Characteristic Function Identification Device, Storage Medium Storing Flow Rate Characteristic Function Identification Program, And Flow Rate Sensor Or Flow Rate Control Device Using Them App 20180164135 - Mudd; Daniel Thomas ;   et al. | 2018-06-14 |
Sealing member and method of manufacturing the same Grant 9,896,768 - Yasuda , et al. February 20, 2 | 2018-02-20 |
Fluid mixing element Grant 9,795,936 - Yasuda , et al. October 24, 2 | 2017-10-24 |
Fluid mechanism, support member constituting fluid mechanism and fluid control system Grant 9,766,634 - Yasuda September 19, 2 | 2017-09-19 |
Fluid control valve Grant 9,746,102 - Yasuda , et al. August 29, 2 | 2017-08-29 |
Fluid measurement system Grant 9,719,829 - Matsuura , et al. August 1, 2 | 2017-08-01 |
Fluid resistance device Grant 9,690,302 - Yasuda June 27, 2 | 2017-06-27 |
Valve element and fluid control valve Grant 9,657,860 - Hayashi , et al. May 23, 2 | 2017-05-23 |
Flow rate control device Grant 9,494,946 - Yasuda November 15, 2 | 2016-11-15 |
Gas Supply System App 20160181071 - Yamaguchi; Yuji ;   et al. | 2016-06-23 |
Fluid Control Valve App 20160124439 - Yasuda; Tadahiro ;   et al. | 2016-05-05 |
Gas supply system Grant 9,285,079 - Yamaguchi , et al. March 15, 2 | 2016-03-15 |
Fluid Mechanism, Support Member Constituting Fluid Mechanism And Fluid Control System App 20160048136 - Yasuda; Tadahiro | 2016-02-18 |
Inspection Method Of Flow Sensor, Inspection System And Program Recording Medium With Program For Inspection System Recorded Thereon App 20150331430 - Yasuda; Tadahiro ;   et al. | 2015-11-19 |
Fluid mechanism, support member constituting fluid mechanism and fluid control system Grant 9,188,990 - Yasuda November 17, 2 | 2015-11-17 |
Fluid Resistance Device App 20150013792 - Yasuda; Tadahiro | 2015-01-15 |
Fluid controller Grant 8,910,656 - Yasuda December 16, 2 | 2014-12-16 |
Fluid Control Valve App 20140290778 - Yasuda; Tadahiro ;   et al. | 2014-10-02 |
Flow rate control device, diagnostic device for use in flow rate measuring mechanism or for use in flow rate control device including the flow rate measuring mechanism and recording medium having diagnostic program recorded thereon for use in the same Grant 8,789,556 - Yasuda , et al. July 29, 2 | 2014-07-29 |
Fluid Mixing Element App 20140182726 - Yasuda; Tadahiro ;   et al. | 2014-07-03 |
Sealing Member And Method Of Manufacturing The Same App 20140167366 - Yasuda; Tadahiro ;   et al. | 2014-06-19 |
Flow rate measuring device and flow rate controller Grant 8,746,057 - Yasuda , et al. June 10, 2 | 2014-06-10 |
Diagnostic mechanism in differential pressure type mass flow controller Grant 8,744,784 - Yasuda , et al. June 3, 2 | 2014-06-03 |
Valve Element and Fluid Control Valve App 20140070128 - Hayashi; Shigeyuki ;   et al. | 2014-03-13 |
Mass flow controller verifying system, verifying method and verifying program Grant 8,646,307 - Yasuda , et al. February 11, 2 | 2014-02-11 |
Flow Rate Control Device App 20140034164 - Yasuda; Tadahiro | 2014-02-06 |
Fluid Controller App 20130269795 - Yasuda; Tadahiro | 2013-10-17 |
Mass Flow Controller Verifying System, Verifying Method And Verifying Program App 20130174635 - Yasuda; Tadahiro ;   et al. | 2013-07-11 |
Mass flow controller verifying system, verifying method and verifying program Grant 8,443,649 - Yasuda , et al. May 21, 2 | 2013-05-21 |
Flow Rate Control Device, Diagnostic Device For Use In Flow Rate Measuring Mechanism Or For Use In Flow Rate Control Device Including The Flow Rate Measuring Mechanism And Recording Medium Having Diagnostic Program Recorded Thereon For Use In The Same App 20130092256 - Yasuda; Tadahiro ;   et al. | 2013-04-18 |
Flow Rate Control Device, And Diagnostic Device And Recording Medium Recorded With Diagnostic Program Used For Flow Rate Control Device App 20130092258 - Yasuda; Tadahiro ;   et al. | 2013-04-18 |
Flow Rate Control Device, Diagnostic Device For Use In Flow Rate Measuring Mechanism Or For Use In Flow Rate Control Device Including The Flow Rate Measuring Mechanism And Recording Medium Having Diagnostic Program Recorded Thereon For Use In The Same App 20130092257 - Yasuda; Tadahiro ;   et al. | 2013-04-18 |
Fluid Mechanism, Support Member Constituting Fluid Mechanism And Fluid Control System App 20130087230 - Yasuda; Tadahiro | 2013-04-11 |
Flow restrictor Grant 8,376,312 - Mudd , et al. February 19, 2 | 2013-02-19 |
Gas Supply System App 20130025715 - Yamaguchi; Yuji ;   et al. | 2013-01-31 |
Flow Rate Measuring Device And Flow Rate Controller App 20120318383 - Yasuda; Tadahiro ;   et al. | 2012-12-20 |
Flow Rate Ratio Controlling Apparatus App 20120174990 - YASUDA; Tadahiro | 2012-07-12 |
Fluid Measurement System App 20120101744 - Matsuura; Kazuhiro ;   et al. | 2012-04-26 |
Flow controller, flow measuring device testing method, flow controller testing system, and semiconductor manufacturing apparatus Grant 8,104,323 - Yasuda January 31, 2 | 2012-01-31 |
Flow Rate Ratio Controlling Apparatus App 20100269924 - Yasuda; Tadahiro | 2010-10-28 |
Mass Flow Controller Verifying System, Verifying Method And Verifying Program App 20100229967 - Yasuda; Tadahiro ;   et al. | 2010-09-16 |
Flow Controller, Flow Measuring Device Testing Method, Flow Controller Testing System, And Semiconductor Manufacturing Apparatus App 20100145633 - Yasuda; Tadahiro | 2010-06-10 |
Diagnostic Mechanism In Differential Pressure Type Mass Flow Controller App 20100070240 - Yasuda; Tadahiro ;   et al. | 2010-03-18 |
Flow restrictor Grant 7,431,045 - Mudd , et al. October 7, 2 | 2008-10-07 |
Flow Restrictor App 20080041481 - MUDD; Daniel T. ;   et al. | 2008-02-21 |
Flow restrictor App 20060005883 - Mudd; Daniel T. ;   et al. | 2006-01-12 |
Transfer device for use in retention type electrophotographic copying machine Grant 4,401,383 - Suzuki , et al. August 30, 1 | 1983-08-30 |
Transfer unit for electrophotographic copying machine Grant 4,396,273 - Matsuyama , et al. August 2, 1 | 1983-08-02 |
Electrophotographic sensitizing screen Grant 4,279,980 - Nishikawa , et al. July 21, 1 | 1981-07-21 |