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Patent applications and USPTO patent grants for YASHIMA; Tetsuya.The latest application filed is for "substrate processing device".
Patent | Date |
---|---|
Substrate Processing Device App 20200388510 - MAEDA; Koji ;   et al. | 2020-12-10 |
Substrate processing apparatus Grant 10,688,622 - Aono , et al. | 2020-06-23 |
Cleaning apparatus and substrate processing apparatus Grant 10,573,509 - Maeda , et al. Feb | 2020-02-25 |
Substrate Processing Apparatus App 20180001440 - AONO; Hiroshi ;   et al. | 2018-01-04 |
Cleaning Apparatus And Substrate Processing Apparatus App 20170372893 - Maeda; Koji ;   et al. | 2017-12-28 |
Polishing apparatus Grant 7,942,725 - Torii , et al. May 17, 2 | 2011-05-17 |
Polishing Apparatus App 20090068935 - TORII; Hiroomi ;   et al. | 2009-03-12 |
Polishing apparatus Grant 7,445,543 - Torii , et al. November 4, 2 | 2008-11-04 |
Polishing apparatus App 20060292967 - Torii; Hiroomi ;   et al. | 2006-12-28 |
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