Patent | Date |
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Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 10,937,629 - Teguri , et al. March 2, 2 | 2021-03-02 |
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20200118791 - TEGURI; Hironori ;   et al. | 2020-04-16 |
Charged particle beam writing apparatus and charged particle beam writing method Grant RE47,707 - Kato , et al. No | 2019-11-05 |
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 9,934,935 - Yoshikawa , et al. April 3, 2 | 2018-04-03 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,875,876 - Yashima January 23, 2 | 2018-01-23 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20170200582 - YASHIMA; Jun | 2017-07-13 |
Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus Grant 9,659,747 - Yashima May 23, 2 | 2017-05-23 |
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20170047194 - YOSHIKAWA; Ryoichi ;   et al. | 2017-02-16 |
Charged particle beam writing apparatus, and buffer memory data storage method Grant 9,564,293 - Yashima , et al. February 7, 2 | 2017-02-07 |
Charged particle beam writing apparatus, and charged particle beam writing method Grant 9,548,183 - Yashima January 17, 2 | 2017-01-17 |
Method Of Generating Write Data For Energy Beam Writing Apparatus, Method Of Writing With Energy Beam, And Energy Beam Writing Apparatus App 20160211118 - Yashima; Jun | 2016-07-21 |
Charged particle beam drawing apparatus and control method thereof Grant 9,188,853 - Yashima November 17, 2 | 2015-11-17 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,153,420 - Yashima October 6, 2 | 2015-10-06 |
Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing Grant 9,141,750 - Yashima , et al. September 22, 2 | 2015-09-22 |
Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block Grant 9,006,691 - Yashima , et al. April 14, 2 | 2015-04-14 |
Charged Particle Beam Writing Apparatus, And Charged Particle Beam Writing Method App 20150060690 - YASHIMA; Jun | 2015-03-05 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20150014549 - YASHIMA; Jun | 2015-01-15 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,878,149 - Yashima November 4, 2 | 2014-11-04 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,872,141 - Kato , et al. October 28, 2 | 2014-10-28 |
Charged particle beam drawing method and apparatus Grant 8,796,650 - Yashima August 5, 2 | 2014-08-05 |
Charged particle beam writing apparatus and method Grant 8,669,537 - Yashima March 11, 2 | 2014-03-11 |
Charged Particle Beam Writing Apparatus And Irradiation Time Apportionment Method Of Charged Particle Beams For Multiple Writing App 20140017349 - Yashima; Jun ;   et al. | 2014-01-16 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,563,953 - Nakayamada , et al. October 22, 2 | 2013-10-22 |
Charged particle beam writing apparatus Grant 8,563,952 - Yashima , et al. October 22, 2 | 2013-10-22 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,552,405 - Kato , et al. October 8, 2 | 2013-10-08 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130256519 - KATO; Yasuo ;   et al. | 2013-10-03 |
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Grant 8,527,913 - Yashima , et al. September 3, 2 | 2013-09-03 |
Charged particle beam drawing apparatus and control method thereof Grant 8,466,440 - Yashima , et al. June 18, 2 | 2013-06-18 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130099139 - Kato; Yasuo ;   et al. | 2013-04-25 |
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Grant 8,429,575 - Yashima , et al. April 23, 2 | 2013-04-23 |
Beam dose computing method and writing method and record carrier body and writing apparatus Grant 8,352,889 - Emi , et al. January 8, 2 | 2013-01-08 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120292536 - YASHIMA; Jun ;   et al. | 2012-11-22 |
Charged Particle Beam Writing Apparatus And Method Of Same App 20120292537 - YASHIMA; Jun ;   et al. | 2012-11-22 |
Method and apparatus for writing Grant 8,309,283 - Kato , et al. November 13, 2 | 2012-11-13 |
Charged particle beam drawing method and apparatus Grant 8,188,449 - Shibata , et al. May 29, 2 | 2012-05-29 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120126145 - YASHIMA; Jun | 2012-05-24 |
Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing Grant 8,183,545 - Yashima May 22, 2 | 2012-05-22 |
Method For Resizing Pattern To Be Written By Lithography Technique, And Charged Particle Beam Writing Method App 20120104286 - YASHIMA; Jun ;   et al. | 2012-05-03 |
Beam Dose Computing Method And Writing Method And Record Carrier Body And Writing Apparatus App 20120108063 - EMI; Keiko ;   et al. | 2012-05-03 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120068089 - NAKAYAMADA; Noriaki ;   et al. | 2012-03-22 |
Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern Grant 8,122,390 - Yashima , et al. February 21, 2 | 2012-02-21 |
Method For Resizing Pattern To Be Written By Lithography Technique, And Charged Particle Beam Writing Method App 20120036486 - Yashima; Jun ;   et al. | 2012-02-09 |
Beam dose computing method and writing method and record carrier body and writing apparatus Grant 8,103,980 - Emi , et al. January 24, 2 | 2012-01-24 |
Charged Particle Beam Drawing Apparatus And Control Method Thereof App 20120001097 - YASHIMA; Jun ;   et al. | 2012-01-05 |
Charged Particle Beam Drawing Apparatus And Control Method Thereof App 20110291029 - YASHIMA; Jun | 2011-12-01 |
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Grant 8,065,635 - Yashima , et al. November 22, 2 | 2011-11-22 |
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method And Apparatus Of Processing Data For Charged Particle Beam Writing App 20110046762 - YASHIMA; Jun | 2011-02-24 |
Charged Particle Beam Drawing Method And Apparatus App 20110012031 - Shibata; Hayato ;   et al. | 2011-01-20 |
Charged Particle Beam Drawing Method And Apparatus App 20100237253 - YASHIMA; Jun | 2010-09-23 |
Method And Apparatus For Writing App 20100173235 - KATO; Yasuo ;   et al. | 2010-07-08 |
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam Grant 7,740,991 - Emi , et al. June 22, 2 | 2010-06-22 |
Charged Particle Beam Writing Apparatus And Method App 20100072390 - YASHIMA; Jun | 2010-03-25 |
Beam Dose Computing Method And Writing Method And Record Carrier Body And Writing Apparatus App 20100015537 - EMI; Keiko ;   et al. | 2010-01-21 |
Charged particle beam writing method and apparatus Grant 7,601,968 - Abe , et al. October 13, 2 | 2009-10-13 |
Charged Particle Beam Writing Apparatus, And Apparatus And Method For Correcting Dimension Error Of Pattern App 20090200488 - YASHIMA; Jun ;   et al. | 2009-08-13 |
Method For Resizing Pattern To Be Written By Lithography Technique, And Charged Particle Beam Writing Method App 20080184190 - YASHIMA; Jun ;   et al. | 2008-07-31 |
Charged Particle Beam Writing Method And Apparatus App 20070138413 - ABE; Takayuki ;   et al. | 2007-06-21 |
Beam Dose Computing Method And Writing Method And Record Carrier Body And Writing Apparatus App 20070114453 - Emi; Keiko ;   et al. | 2007-05-24 |