Yarussi; Richard A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yarussi; Richard A..The latest application filed is for "image control in a metrology/inspection positioning system".
- Yarussi; Richard A. - San Francisco CA
- Yarussi; Richard A. - Mountain View CA
| Patent | Date |
|---|---|
| Scanning focal length metrology Grant 8,259,296 - Yarussi , et al. September 4, 2 | 2012-09-04 |
| Scanning focal length metrology Grant 8,259,297 - Yarussi September 4, 2 | 2012-09-04 |
| Scanning focal length metrology Grant 7,697,135 - Yarussi , et al. April 13, 2 | 2010-04-13 |
| Spectrometer measurement of diffracting structures Grant 7,372,565 - Holden , et al. May 13, 2 | 2008-05-13 |
| Metrology/inspection positioning system Grant 7,295,314 - Spady , et al. November 13, 2 | 2007-11-13 |
| Image control in a metrology/inspection positioning system Grant 7,289,215 - Spady , et al. October 30, 2 | 2007-10-30 |
| Image Control In A Metrology/inspection Positioning System App 20070222991 - Spady; Blaine R. ; et al. | 2007-09-27 |
| Apparatus and method for the measurement of diffracting structures Grant 7,115,858 - Holden , et al. October 3, 2 | 2006-10-03 |
| Alignment of a rotatable polarizer with a sample Grant 6,665,070 - Yarussi , et al. December 16, 2 | 2003-12-16 |
| Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer Grant 6,522,406 - Rovira , et al. February 18, 2 | 2003-02-18 |
| Compact optical reflectometer system Grant 6,181,427 - Yarussi , et al. January 30, 2 | 2001-01-30 |
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